Microsystem Technologies

, Volume 20, Issue 10–11, pp 2071–2077 | Cite as

Fabrication and characterization of polymer microprisms

  • William Brian Derek Forfang
  • Timothy Glenn Conner
  • Byoung Hee You
  • Taehyun Park
  • In-Hyouk Song
Technical Paper


An increasing interest in low-cost polymer micro-fabrication techniques demands an increasing necessity for characterizing such techniques. In this research, polymethylmethacrylate (PMMA) and polydimethylsiloxane (PDMS) microprisms were realized by hot embossing and replica molding processes, respectively. In both replication methods, the polymer microprisms were patterned with the same brass master mold. This mold was fabricated via high precision micro-milling, which accommodates a wide range of achievable sidewall angles and a large workable surface area relative to lithographic fabrication technologies. The pattern designed for replication contained a microprism array of 20 parallel, equal length prisms, grouped into four sets of distinct prism geometries. The four geometries include three triangular microprisms with varying interior angles and one semicircular microprism with a radius of 500 μm. The polymer microprisms replicated by PMMA hot embossing and PDMS replica molding were found to exhibit interior angle reductions relative to the brass master mold dimensions. This paper includes a description and analysis of a surface treatment process by which the RMS surface roughness of the mentioned PMMA microprisms was shown to reduce by 28 % after controlled thermal exposures just above their glass transition temperature.


PMMA PDMS Interior Angle Master Mold Cyclic Olefin Copolymer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Conflict of interest

The authors declare that they have no conflict of interest.


  1. Becker H, Gärtner C (2001) Polymer based micro-reactors. J Biotechnol 82:89–99Google Scholar
  2. Becker H, Heim U (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. Sens Actuators A Phys 83:130–135CrossRefGoogle Scholar
  3. Chang T-L, Luo S-W, Yang H-P et al (2010) Fabrication of diffraction grating in polydimethylsiloxane using femtosecond-pulsed laser micromachining. Microelectron Eng 87:1344–1347CrossRefGoogle Scholar
  4. Chang-Yen D, Eich R, Gale B (2005) A monolithic PDMS waveguide system fabricated using soft-lithography techniques. J Lightwave Technol 23:2088–2093CrossRefGoogle Scholar
  5. Chao C-Y, Guo L (2004) Reduction of surface scattering loss in polymer microrings using thermal-reflow technique. IEEE Photon Technol Lett 16:1498–1500CrossRefGoogle Scholar
  6. Chen C-Y, Yang T, Sun W (2008) Optics system design applying a micro-prism array of a single lens stereo image pair. Opt Express 16:15495–15505CrossRefGoogle Scholar
  7. Feng D, Yan Y, Yang X et al (2005) Novel integrated light-guide plates for liquid crystal display backlight. J Opt A Pure Appl Opt 7:111–117CrossRefGoogle Scholar
  8. Gimkiewicz C, Hagedorn D, Jahns J et al (1999) Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass. Appl Opt 38:2986–2990CrossRefGoogle Scholar
  9. Harvey J, Schröder S, Choi N et al (2012) Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles. Opt Eng 51:013402CrossRefGoogle Scholar
  10. Heyderman L-J, Schift H, David C et al (2000) Flow behavior of thin polymer films used for hot embossing lithography. Microelectron Eng 54:229–245CrossRefGoogle Scholar
  11. Huang S-H, Tseng F (2005) Development of a monolithic total internal reflection-based biochip utilizing a microprism array for fluorescence sensing. J Micromech Microeng 15:2235–2242CrossRefGoogle Scholar
  12. Hung K-Y, Liang T-H (2008) Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices. Microsyst Technol 14:1217–1222CrossRefGoogle Scholar
  13. Hung K-Y, Tsai Y-W, Lee C-F et al (2012) Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness. IEEE-NEMS, Kyoto, Japan, 5–8 March, 2012, pp 120–124Google Scholar
  14. Kim K, Park S, Lee J-B et al (2002) Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology. Microsyst Technol 9:5–10CrossRefGoogle Scholar
  15. Lin C-F, Fang Y-B, Yang P-H (2011) Optimized micro-prism diffusion film for slim-type bottom-lit backlight units. J Disp Technol 7:3–9CrossRefGoogle Scholar
  16. Luo S-W, Chang T-L, Tsai H-Y (2012) Fabrication of glass micro-prisms using ultra-fast laser pulses with chemical etching process. Opt Laser Eng 50:220–225CrossRefGoogle Scholar
  17. Mark J (1999) Polymer data handbook. Oxford University Press, New YorkGoogle Scholar
  18. Niggemann M, Glatthaar M, Lewer P et al (2006) Functional microprism substrate for organic solar cells. Thin Solid Films 511–512:628–633CrossRefGoogle Scholar
  19. Rötting O, Röpke W, Becker H et al (2002) Polymer microfabrication technologies. Microsyst Technol 8:32–36CrossRefGoogle Scholar
  20. Shin Y, Cho K, Lim S et al (2003) PDMS-based micro PCR chip with parylene coating. J Micromech Microeng 13:768–774CrossRefGoogle Scholar
  21. Shin J, Park Y, Liu C et al (2005) Chemical structure and physical properties of cyclic olefin copolymers. Pure Appl Chem 77:801–814CrossRefGoogle Scholar
  22. Song I-H, Jin Y, Ajmera P (2007) Fabrication of a polymeric tapered HARMs array utilizing a low-cost nickel electroplated mold insert. Microsyst Technol 13:287–291CrossRefGoogle Scholar
  23. Ting C-J, Huang M-C, Tsai H-Y et al (2008) Low cost fabrication of the large-area anti-reflection films from polymer by nanoimprint/hot-embossing technology. Nanotechnol 19:1–5CrossRefGoogle Scholar
  24. Ting Y-S, Lee C–C, Hong C-T et al (2010) Implementation of polymer-dispersed liquid crystal microprism array for LED radiation pattern application. In: IEEE 23rd international conference on micro electro mechanical systems (MEMS), Hong Kong, China, 24–28 Jan 2010, pp 192–195Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • William Brian Derek Forfang
    • 1
  • Timothy Glenn Conner
    • 2
  • Byoung Hee You
    • 2
  • Taehyun Park
    • 3
  • In-Hyouk Song
    • 2
  1. 1.Ingram School of EngineeringTexas State UniversitySan MarcosUSA
  2. 2.Department of Engineering TechnologyTexas State UniversitySan MarcosUSA
  3. 3.Division of Mechanical Engineering and AutomationKyungnam UniversityChangwonKorea

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