Fabrication and characterization of polymer microprisms
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An increasing interest in low-cost polymer micro-fabrication techniques demands an increasing necessity for characterizing such techniques. In this research, polymethylmethacrylate (PMMA) and polydimethylsiloxane (PDMS) microprisms were realized by hot embossing and replica molding processes, respectively. In both replication methods, the polymer microprisms were patterned with the same brass master mold. This mold was fabricated via high precision micro-milling, which accommodates a wide range of achievable sidewall angles and a large workable surface area relative to lithographic fabrication technologies. The pattern designed for replication contained a microprism array of 20 parallel, equal length prisms, grouped into four sets of distinct prism geometries. The four geometries include three triangular microprisms with varying interior angles and one semicircular microprism with a radius of 500 μm. The polymer microprisms replicated by PMMA hot embossing and PDMS replica molding were found to exhibit interior angle reductions relative to the brass master mold dimensions. This paper includes a description and analysis of a surface treatment process by which the RMS surface roughness of the mentioned PMMA microprisms was shown to reduce by 28 % after controlled thermal exposures just above their glass transition temperature.
KeywordsPMMA PDMS Interior Angle Master Mold Cyclic Olefin Copolymer
Conflict of interest
The authors declare that they have no conflict of interest.
- Becker H, Gärtner C (2001) Polymer based micro-reactors. J Biotechnol 82:89–99Google Scholar
- Hung K-Y, Tsai Y-W, Lee C-F et al (2012) Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness. IEEE-NEMS, Kyoto, Japan, 5–8 March, 2012, pp 120–124Google Scholar
- Mark J (1999) Polymer data handbook. Oxford University Press, New YorkGoogle Scholar
- Ting Y-S, Lee C–C, Hong C-T et al (2010) Implementation of polymer-dispersed liquid crystal microprism array for LED radiation pattern application. In: IEEE 23rd international conference on micro electro mechanical systems (MEMS), Hong Kong, China, 24–28 Jan 2010, pp 192–195Google Scholar