1. Preface: Harmst2003

   • Jill Hruby

   OriginalPaper Pages: 225 - 225

2. Friction stir microforming of superplastic alloys

   • S. Mohan
   • R.S. Mishra

   OriginalPaper Pages: 226 - 229

3. 3D microstructure fabrication for a high luminosity lighting-panel for LCD using synchrotron radiation

   • M. Minamitani
   • Y. Utsumi
   • T. Hattori

   OriginalPaper Pages: 230 - 234

4. Improvement of capillary electrophoresis property for microchannels fabricated by deep X-ray lithography

   • Y. Utsumi
   • M. Ozaki
   • T. Hattori

   OriginalPaper Pages: 235 - 239

5. MODULIGA: The LIGA process as a modular production method-current standardization status in Germany

   • L. Hahn
   • P. Meyer
   • L. Singleton

   OriginalPaper Pages: 240 - 245

6. Micro-ECM for production of microsystems with a high aspect ratio

   • R. Förster
   • A. Schoth
   • W. Menz

   OriginalPaper Pages: 246 - 249

7. Micro wire EDM for high aspect ratio 3D microstructuring of ceramics and metals

   • A. Schoth
   • R. Förster
   • W. Menz

   OriginalPaper Pages: 250 - 253

8. Knowledge-based design environment for primary shaped micro parts

   • A. Albers
   • N. Burkardt
   • J. Marz

   OriginalPaper Pages: 254 - 260

9. The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structure

   • Y. Tian
   • P. Zhang
   • X. Tian

   OriginalPaper Pages: 261 - 264

10. Simulation of deep UV lithography with SU-8 resist by using 365 nm light source

    • X. Tian
    • G. Liu
    • X. Zhang

    OriginalPaper Pages: 265 - 270

11. Fabrication of ceramic microcomponents using deep X-ray lithography

    • C. Müller
    • T. Hanemann
    • J. Goettert

    OriginalPaper Pages: 271 - 277

12. Fabrication of diamond micro tools for ultra precision machining

    • E. Ritzhaupt-Kleissl
    • C. Müller
    • P. Gluche

    OriginalPaper Pages: 278 - 279

13. Carbon paper flow fields made by WEDM for small fuel cells

    • M. A. Müller
    • C. Müller
    • W. Menz

    OriginalPaper Pages: 280 - 281

14. Deep photo-lithography characterization of SU-8 resist layers

    • E. F. Reznikova
    • J. Mohr
    • H. Hein

    OriginalPaper Pages: 282 - 291

15. LIGA fabrication of X-ray Nickel lenses

    • V. Nazmov
    • E. Reznikova
    • V. Saile

    OriginalPaper Pages: 292 - 297

16. Coupling bulge testing and nanoindention to characterize materials properties of bulk micromachined structures

    • M. S. Kennedy
    • A. L. Olson
    • D. F. Bahr

    OriginalPaper Pages: 298 - 302

17. Optimisation of SU-8 processing parameters for deep X-ray lithography

    • R. L. Barber
    • M. K. Ghantasala
    • D. C. Mancini

    OriginalPaper Pages: 303 - 310

18. Fabrication of microneedle array using LIGA and hot embossing process

    • Sang Jun Moon
    • Seung S. Lee
    • T. H. Kwon

    OriginalPaper Pages: 311 - 318

19. Corrosion behavior of a structural nickel electrodeposit

    • F. D. Wall
    • M. A. Martinez
    • J. J. Vandenavyle

    OriginalPaper Pages: 319 - 330

20. Experimental study of NiFe and CoFe throughmask electrodeposition of high aspect ratio features

    • J. J. Kelly
    • N. Y. C. Yang

    OriginalPaper Pages: 331 - 334

21. Design and simulation of an asymmetric variable reluctance stepping millimotor

    • W.-Y. Lu
    • E.J. Garcia
    • J.S. Korellis

    OriginalPaper Pages: 335 - 342

22. Fabrication of high-aspect-ratio microstructures using SU8 photoresist

    • G. Liu
    • Y. Tian
    • Y. Kan

    OriginalPaper Pages: 343 - 346

23. Fabrication of high-aspect-ratio hydrogel microstructures

    • V. R. Tirumala
    • R. Divan
    • G. T. Caneba

    OriginalPaper Pages: 347 - 352

24. Effects of contact-stress on hot-embossed PMMA microchannel wall profile

    • K. F. Lei
    • W. J. Li
    • Y. Yam

    OriginalPaper Pages: 353 - 357

25. Deep X-ray lithography using mask with integrated electrothermal actuator

    • K.-C. Lee
    • S.S. Lee

    OriginalPaper Pages: 358 - 364

26. Application of 3D gray mask for the fabrication of curved SU-8 structures

    • Kuo-Yung Hung
    • Fan-Gang Tseng
    • Hwai-Pwu Chou

    OriginalPaper Pages: 365 - 369

27. Low cost transparent SU-8 membrane mask for deep X-ray lithography

    • S. Cabrini
    • F. Pérennès
    • E.Di. Fabrizio

    OriginalPaper Pages: 370 - 373

28. Micro-Structures of TiC/Ti₅Si₃ composite produced by powder metallurgy and LIGA process

    • N. Miyano
    • H. Iwasa
    • S. Sugiyama

    OriginalPaper Pages: 374 - 378

29. Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring

    • G. Aigeldinger
    • J. T. Ceremuga
    • D. M. Skala

    OriginalPaper Pages: 379 - 384