1. International Conference on High Aspect Ratio Microstructure Technology HARMST ’97

   • Peter Bley

   Editorial Pages: 1 - 1

2. Research, development and manufacturing plans at CAMD

   • C. Khan Malek
   • H. Manohara
   • V. Saile

   Technical papers Pages: 2 - 6

3. Silicon IC compatible LIGA mask-fabrication process

   • K. Suzuki
   • S. Sugiyama

   Pages: 7 - 11

4. Micromachining program status at the SRRC

   • Y. Cheng
   • B.-Y. Shew
   • W. H. Lee

   Pages: 12 - 16

5. Low Z substrates for cost effective high-energy, stacked exposures

   • H. M. Manohara
   • C. Khan Malek
   • K. Deng

   Pages: 17 - 20

6. Precision of micromilled x-ray masks and exposures

   • C. Friedrich
   • P. Coane
   • N. Gopinathin

   Pages: 21 - 24

7. Automated array assembly: a high throughput, low cost assembly process for LIGA-fabricated micro-components

   • C. M. Egert
   • K. W. Hylton

   Pages: 25 - 27

8. Various replication techniques for manufacturing three-dimensional metal microstructures

   • R. Ruprecht
   • T. Benzler
   • J. Haußelt

   Pages: 28 - 31

9. Microgrippers created in microstructurable glass

   • R. Salim
   • H. Wurmus
   • D. Hülsenberg

   Pages: 32 - 34

10. Systemintegration of microsystems/chip elements in miniaturized automata for high-throughput synthesis and screening in biology, biochemistry and chemistry

    • A. Schober
    • G. Schlingloff
    • G. Mayer

    Pages: 35 - 39

11. High-aspect micro-wingwheels in photosensitive glass

    • C. Gimkiewicz
    • E. Gerhard

    Pages: 40 - 45

12. Tensile testing device for microstructured specimens

    • A. Ilzhöfer
    • H. Schneider
    • C. Tsakmakis

    Pages: 46 - 50