Abstract
A direct laser beam writing process with a XeCl excimer laser is used to fabricate wing wheels for the application in flow sensors. Each wing wheel is implemented in a different size or with a different number of wings. They were inserted inside a sensor cabinet which has allowed to determine the time per revolution optically for different air flows. It has been possible to develop a model for the different sized wheels to predict the sensor output characteristics. The rotational speed increases with a decreasing number of wings, whereas the sensitivity is decreasing. The sensor output shifts by changing the position of the wheel inside the sensor cabinet.
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Received: 1 February 1997/Accepted: 30 April 1997
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Gimkiewicz, C., Gerhard, E. High-aspect micro-wingwheels in photosensitive glass. Microsystem Technologies 4, 40–45 (1997). https://doi.org/10.1007/s005420050090
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DOI: https://doi.org/10.1007/s005420050090