Abstract
The X-ray micromachining activities at CAMD are described. Through the HI-MEMS Alliance Program, CAMD has developed an extensive technical infrastructure and process experience. The “X-ray Print-Shop” supports prototyping and is prepared for cost effective low-to-medium volume production of primary parts with high aspect ratio, including exposure of multiple level devices with alignment, as well as tilted and rotated exposures. Important lessons learnt during the course of the program will be reported. An up-grade of the facility to install a 7.5 Tesla superconducting wiggler in the ring is in progress. It will produce hard X-rays for ultra-deep X-ray lithography.
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Received: 25 August 1997/Accepted: 3 September 1997
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Malek, C., Manohara, H. & Saile, V. Research, development and manufacturing plans at CAMD. Microsystem Technologies 4, 2–6 (1997). https://doi.org/10.1007/s005420050081
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DOI: https://doi.org/10.1007/s005420050081