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Design and Analysis of a Robust Gyroscope via Grating SPP on Cantilever

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Abstract

In this paper, using a MOEMS cantilever, an opto-plasmonic gyroscope is introduced. A metallic grating, as the substrate for surface plasmon polaritons, is employed on the cantilever. The mechanical structure converts input angular velocity into a change of the light incidence angle, then reflected optical power is measured by a photo-detector. Subsequently, the output current of the sensor is modulated according to the input angular velocity. This robust system has a simple and effective structure, and the simulation results propose characteristics including optical sensitivity of \(0.13\;{\text{nW}}/(^\circ /{\text{s}})\), total sensitivity of \(0.05\;{\text{nA}}/(^\circ /{\text{s}})\), ultra-wide measurement range of \(\pm 567228217.18 \;^\circ /{\text{s}}\), and resolution of \(0.77 \;^\circ /{\text{s}}\). Moreover, the operating wavelength is λ = 630 nm with a minimum required laser power of 73 pW, and the designed structure has dimensions of \(15 \times 30 \times 6\;{\mu m}^{3}\). Furthermore, a comprehensive study on the effects of various mechanical and optical parameters on the performance of the gyroscope is presented, and a comparative study is done.

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Acknowledgements

The authors gratefully thank Shahid Beheshti University (SBU), Tehran, Iran for its supports.

Funding

The publishing of this study was supported by Shahid Beheshti University (SBU), Tehran, Iran.

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Authors and Affiliations

  1. Faculty of Electrical Engineering, Department of Electronics, Shahid Beheshti University, Tehran, Iran

    Jalal Gholinejad & Kambiz Abedi

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  1. Jalal Gholinejad
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  2. Kambiz Abedi
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Contributions

The subject of MOEMS opto-plasmonic gyroscope is suggested to Jalal Gholinejad by Kmbiz Abedi, as K. Abedi is the supervisor of J. Gholinejad (PhD Student). The novel structure and SPP-idea are provided by J. Gholinejad, and the simulations are done by him. Subsequently, some modifications are implemented by guidance of K. Abedi. Next, the initial text is prepared by J. Gholinejad, and the passage was edited by K. Abedi. All authors have equal role in this research.

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Correspondence to Kambiz Abedi.

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Gholinejad, J., Abedi, K. Design and Analysis of a Robust Gyroscope via Grating SPP on Cantilever. Sens Imaging 25, 8 (2024). https://doi.org/10.1007/s11220-024-00460-x

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