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Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure

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Abstract

This paper presents a double-sided gyroscope that uses a novel vibrating MOEMS structure via a hybrid plasmonic readout circuit. The proposed mechanism is based on the Coriolis effect and surface plasmon polaritons in which the sensing piece consists of a laser, a ring-shaped gold layer, and a photo-detector. According to the simulations, the proposed device provides a measurement range of \(\pm 630\; ^\circ /\mathrm{s}\), a mechanical displacement sensitivity of \(2.2\; \mathrm{nm}/\left(^\circ /\mathrm{s}\right)\), a mechanical tilt sensitivity of \(0.0025\;^\circ /\left(^\circ /\mathrm{s}\right)\), an optical sensitivity of \(225.15\; \mathrm{\mu W}/\left(^\circ /\mathrm{s}\right)\), a total sensitivity of \(90.06\; \mathrm{\mu A}/\left(^\circ /\mathrm{s}\right)\), an ultra-low resolution of \(0.444\;\upmu ^\circ /\mathrm{s}\), and an accuracy of 99.99%. The proof mass is \(0.43505\; \mathrm{\mu g}\), the operational wavelength is \(\lambda =630\;\mathrm{ nm}\), and the bandwidth is \(1.2 \;\mathrm{kHz}\) with a drive frequency of \(1\; \mathrm{kHz}\). Moreover, a comprehensive study on the effects of various mechanical and optical parameters on the functions of the designed gyroscope is proposed.

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Acknowledgements

The authors gratefully thank Shahid Beheshti University (SBU), Tehran, Iran, for their supports.

Funding

The publishing of this study was supported by Shahid Beheshti University (SBU), Tehran, Iran.

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Authors and Affiliations

  1. Department of Electronics, Faculty of Electrical Engineering, Shahid Beheshti University, Tehran, Iran

    Jalal Gholinejad & Kambiz Abedi

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  1. Jalal Gholinejad
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  2. Kambiz Abedi
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Contributions

The subject of MOEMS opto-plasmonic gyroscope is suggested to Jalal Gholinejad by Kmbiz Abedi, as K. Abedi is the supervisor of J. Gholinejad (PhD student). The novel structure and SPP-idea are provided by J. Gholinejad, and the simulations are done by him. Subsequently, some modifications are implemented by the guidance of K. Abedi. Next, the initial text is prepared by J. Gholinejad, and the passage was edited by K. Abedi. All authors have equal role in this research.

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Correspondence to Kambiz Abedi.

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Gholinejad, J., Abedi, K. Design and Analysis of a MOEMS Gyroscope Based on a Ring-Shaped Hybrid Structure. Plasmonics 18, 1159–1172 (2023). https://doi.org/10.1007/s11468-023-01841-w

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  • DOI: https://doi.org/10.1007/s11468-023-01841-w

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