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Structural design and simulation of a micro-gyroscope based on nano-grating detection

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Abstract

The central concept underpinning the operation of the micro-gyroscope is the detection of the weak Coriolis force. We describe in detail the working principle of an optical micro-gyroscope based on nano-grating detection. A double-layer reflective metal nano-grating is used to detect the Coriolis force acting on the gyroscope. To analyze its structural sensitivity, a simulation model of the gyroscope is configured, results from which show that the structure achieves good modal matching and a structural sensitivity of 6.402 nm/°/s. Furthermore, the structure of the nano-grating is analyzed in an optical simulation, and a tolerance analysis is performed of several structural parameters to gain insight into realizing an actual device. Finally, a model of the gyroscope system was implemented in the SIMULINK environment. Using parameter values obtained from calculations, simulations of the nano-grating gyroscope gave a total sensitivity of 3.03 mv/°/s, along with a theoretical noise floor of 5.95 × 10−5°/s/√Hz. This confirms that the proposed optical micro-gyroscope performs well as designed.

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Acknowledgements

National Natural Science Foundation of China (NSFC) (61573323, 61705200); National Key R&D Program of China (2017YFF0105200). The authors would like to thank the Suzhou Institute of Nano-Tech and Nano-Bionics for the guidance of model design. We thank Richard Haase, Ph.D, from Liwen Bianji, Edanz Group China (www.liwenbianji.cn/ac), for editing the English text of a draft of this manuscript.

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  1. Mengwei Li and Zi Wang contributed equally to this work.

Authors and Affiliations

  1. Microsystem Integration Center, North University of China, Taiyuan, 030051, China

    Mengwei Li, Zi Wang, Hao Geng, Qiannan Wu, Rui Zhang, Zhiqin Cui, Xiaoyan Wang & Gao Wang

  2. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, 030051, China

    Mengwei Li, Zi Wang, Hao Geng, Qiannan Wu, Zhiqin Cui, Xiaoyan Wang & Gao Wang

  3. Engineering and Technology Research Center of Shanxi Provincial for Optical-Electric Information and Instrument, North University of China, Taiyuan, 030051, China

    Rui Zhang

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  1. Mengwei Li
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Correspondence to Mengwei Li.

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Li, M., Wang, Z., Geng, H. et al. Structural design and simulation of a micro-gyroscope based on nano-grating detection. Microsyst Technol 25, 1627–1637 (2019). https://doi.org/10.1007/s00542-019-04420-4

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  • DOI: https://doi.org/10.1007/s00542-019-04420-4

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