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Tunnel Emission from Nanostructured Field-Emission Array Cathodes with a Fluorine–Carbon Coating

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Abstract

Variations of the morphology and field-emission properties of surface-structured n- and p-type silicon wafers have been studied. The silicon surface has been structured by etching in a fluorine–carbon plasma and depositing subnanodimensional island carbon masks. It has been shown that surface structuring in a fluorine–carbon plasma makes it possible to reach desired field-emission currents in electric fields of different strengths. Physicochemical models of field emission mechanisms and models of destruction of surface-modified multipoint silicon array cathodes have been considered.

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REFERENCES

  1. R. B. Marcus, T. S. Ravi, T. Gmitter, et al., Appl. Phys. Lett. 56, 236 (1990).

    Article  ADS  Google Scholar 

  2. Yu. B. Gulyaev, N. P. Aban’shin, B. I. Gorfinkel’, S.  P. Morev, A. F. Rezchikov, N. I. Sinitsyn, and A. N. Yakunin, Tech. Phys. Lett. 39, 525 (2013).

    Article  ADS  Google Scholar 

  3. R. K. Yafarov, Semiconductors 48, 511 (2014). https://doi.org/10.1134/S1063782614040277

  4. K. Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov, and M. Katayama, Surface Science: An Introduction (Springer, 2003).

    Book  Google Scholar 

  5. R. K. Yafarov and V. Ya. Shanygin, Semiconductors 51, 531 (2017). https://doi.org/10.1134/S1063782617040236

    Article  ADS  Google Scholar 

  6. R. H. Fowler and L. W. Nordheim, Proc. R. Soc. London A 119, 173 (1928).

    Article  ADS  Google Scholar 

  7. D. A. Usanov and R. K. Yafarov, Techniques for Fabrication and Examination of Self-Organizing Nanostructures Based on Silicon and Carbon (Sarat. Gos. Univ., Saratov, 2011).

    Google Scholar 

  8. R. K. Yafarov, The Physics of Microwave Vacuum-Plasma Nanotechnology (Fizmatlit, Moscow, 2009).

    Google Scholar 

  9. M. V. Davidovich and R. K. Yafarov, Tech. Phys. 63, 274 (2018). https://doi.org/10.1134/S106378421802010X

    Article  Google Scholar 

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Funding

This study was supported by the Russian Science Foundation, grant no. 16-19-10033.

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Authors and Affiliations

  1. Kotel’nikov Institute of Radio Engineering and Electronics, Saratov Branch, Russian Academy of Sciences, 410019, Saratov, Russia

    R. K. Yafarov

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  1. R. K. Yafarov
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Correspondence to R. K. Yafarov.

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Translated by V. Isaakyan

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Yafarov, R.K. Tunnel Emission from Nanostructured Field-Emission Array Cathodes with a Fluorine–Carbon Coating. Tech. Phys. 64, 897–901 (2019). https://doi.org/10.1134/S1063784219060240

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  • DOI: https://doi.org/10.1134/S1063784219060240

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