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Field Emission Properties of Surface-Modified Silicon Crystals of Different Types of Conduction

  • ELECTRON AND ION EMISSION
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Abstract

A new technology of nanostructuring and modification of the surfaces of silicon crystals of different types of conduction, using self-organized carbon mask coatings and highly anisotropic plasma-chemical etching is proposed. It is shown that the structures obtained make it possible to reduce the field emission excitation thresholds by several times and to increase the maximum field emission current densities by more than an order of magnitude in comparison with traditional technologies. It is established that the relation between the morphological and field emission characteristics of the obtained multi-tip cathode arrays is determined by the type of electrical conduction of the semiconductor and the total dipole moment of its surface. It is shown that the interpretation of the relation between them using the representations of the Fowler and Nordheim theory is not sufficient.

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REFERENCES

  1. N. N. Gerasimenko and Yu. N. Parkhomenko, Silicon as a Material for Nanoelectronics (Tekhnosfera, Moscow, 2007).

    Google Scholar 

  2. Yu. V. Gulyaev, N. P. Aban’shin, B. I. Gorfinkel’, S. P. Morev, A. F. Rezchikov, N. I. Sinitsyn, and A. N. Yakunin, Tech. Phys. Lett. 39, 525 (2013).

    Article  Google Scholar 

  3. Han Jin-Woo, SubOh Jae, and M. Meyyappan, Appl. Phys. Lett. 100, 213505 (2012).

  4. L. F. Velásquez-García, S. Guerrera, Y. Niu, and A. I. Akinwande, IEEE Trans. Electron Devices 58, 1783 (2011).

    Article  Google Scholar 

  5. Fei Zhao, Jian-hua Deng, Dan-dan Zhao, et al., J. Nanosci. Nanotechnol. 10, 1 (2010).

    Article  Google Scholar 

  6. K. Betsui, in Tech. Digest 4th Int. Vacuum Microelectronics Conf., Nagahama, Japan, 1991) (Acad. Soc. Japan, 1991), p. 26.

  7. N. N. Ledentsov, V. M. Ustinov, V. A. Shchukin, et al., Fiz. Tekh. Poluprovodn. (St. Petersburg) 32, 385 (1998).

    Google Scholar 

  8. R. K. Yafarov and V. Ya. Shanygin, Semiconductors 51, 531 (2017).

    Article  Google Scholar 

  9. R. K. Yafarov, Physics of Microwave Vacuum-Plasma Nanotechnologies (Fizmatlit, Moscow, 2009).

    Google Scholar 

  10. E. I. Givargizov, V. V. Zhirnov, A. N. Stepanova, and L. N. Obelenskaya, “Matrix field-emission cathode and electronic device for optical display of information,” RF Patent No. 2074444 (27.02.97).

  11. K. Oura, V. G. Lifshits, A. A. Saranin, A. V. Zotov, and M. Katayama, Surface Science. An Introduction (Springer, 2006; Nauka, Moscow, 2006).

  12. V. Ya. Shanygin and R. K. Yafarov, Semiconductors 47, 469 (2013).

    Article  Google Scholar 

Download references

ACKNOWLEDGMENTS

This work was supported by the Russian Science Foundation, project no. 16-19-10033.

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Authors and Affiliations

  1. Saratov Branch, Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 410019, Saratov, Russia

    R. K. Yafarov, S. Yu. Suzdal’tsev & V. Ya. Shanygin

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  1. R. K. Yafarov
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  2. S. Yu. Suzdal’tsev
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  3. V. Ya. Shanygin
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Correspondence to R. K. Yafarov.

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Translated by E. Chernokozhin

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Yafarov, R.K., Suzdal’tsev, S.Y. & Shanygin, V.Y. Field Emission Properties of Surface-Modified Silicon Crystals of Different Types of Conduction. J. Commun. Technol. Electron. 64, 265–270 (2019). https://doi.org/10.1134/S1064226919030203

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  • DOI: https://doi.org/10.1134/S1064226919030203

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