Abstract
The fabrication method of field electron sources using the atomic structure of silicon crystals and the processes of heterophase vacuum-plasma self-organization of island carbon coatings and highly anisotropic plasma-chemical etching under low adsorption is theoretically justified and experimentally implemented. The interrelation of the morphological and field emission characteristics of fabricated field emission cathodic microstructures is established. The experimental results are interpreted using the Fowler-Nordheim representation in connection with the changes of the surface phases of multipoint silicon microstructures.
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Velásquez-García, L.F., Guerrera, S., Niu, Y., and Akinwande, A.I., Uniform high-current cathodes using massive arrays of Si field emitters individually controlled by vertical Si ungated FETs, Pt. 2: Device fabrication and characterization, IEEE Trans. Electron Dev., 2011, vol. 58, p. 1783.
Fei Zhao, Jian-hua Deng, Dan-dan Zhao, et al., Structures and field emission characteristics of ion irradiated silicon nanowire arrays, J. Nanosci. Nanotechnol., 2010, vol. 10, pp. 1–5.
Gulyaev, Yu.B., Aban’shin, N.P., Gorfinkel’, B.I., et al., New solutions for designing promising devices based on low-voltage field emission from carbon nanostructures, Tech. Phys. Lett., 2013, vol. 39, no. 11, pp. 525–528.
Usanov, D.A. and Yafarov, R.K., Metody polucheniya i issledovaniya samoorganizuyushchikhsya nanostruktur na osnove kremniya i ugleroda (Methods for Production and Investigation of Self-Organized Nanostructures Based on Silicon and Carbon), Saratov: Sarat. Gos. Univ., 2011.
Fursei, G.N., Polyakov, M.A., Kantonistov, A.A., Yafyasov, A.M., Pavlov, B.S., and Bozhevol’nov, V.B., Field and explosive emissions from graphene-like structures, Tech. Phys., 2013, vol. 58, no. 6, pp. 845–851.
Lei Wei, Zhang Xiaobing, Lou Chaogang, and Zhao Zhiwei, Very high field-emission current from a carbonnanotube cathode with a pulse driving mode electron device letters, IEEE Electron Dev. Lett., 2009, vol. 30, no. 5, pp. 571–573.
Betsui, K., Fabrication and characteristics of Si field emitter arrays, in Proceedings of the 4th International Vacuum Microelectronics Conference, Nagahama, Japan, 1991, pp. 26–29.
Ledentsov, N.N., Ustinov, V.M., Shchukin, V.A., et al., Heterostructures with quantum dots: production, properties, lasers. Review, Semiconductors, 1998, vol. 32, no. 4, pp. 343–365.
Yafarov, R.K. and Shanygin, V.Ya., Surface phase transition on silicon crystals (100) with low-temperature microwave plasma chemical vapor deposition, Russ. Microelectron., 2015, vol. 44, no. 3, pp. 178–189.
Yafarov, R.K., Fizika SVCh vakuumno-plazmennykh nanotekhnologii (Physics of Microwave Vacuum-Plasma Nanotechnologies), Moscow: Fizmatlit, 2009.
Givargizov, E.I., Zhirnov, V.V., Stepanova, A.N., and Obelenskaya, L.N., Matrix auto-electronic cathode and electronic device for optical information display, RF Patent No. 2074444.
Oura, K., Lifshits, V.G., Saranin, A.A., et al., Vvedenie v fiziku poverkhnosti (Surface Science: An Introduction), Moscow: Nauka, 2006; New York: Springer, 2003.
Nefedov, D.V., Shanygin, V.Ya., Suzdal’tsev, S.Yu., and Yafarov, R.K., Structuring the surface of single-crystal silicon after vacuum-plasma etching through an island carbon film, in Materialy mezhdunarod. nauchno-tekhnicheskoi konferentsii Aktual’nye problemy elektronnogo priborostroeniya (Proceedings of the International Conference on Actual Problems of Electron Instrument Making), Saratov: Sarat. Gos. Tekh. Univ., 2016, vol. 2, pp. 469–472.
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Original Russian Text © R.K. Yafarov, S.Yu. Suzdaltsev, V.Ya. Shanygin, 2018, published in Mikroelektronika, 2018, Vol. 47, No. 2.
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Yafarov, R.K., Suzdaltsev, S.Y. & Shanygin, V.Y. Field Emission Properties of Nanostructured Silicon Cathode Arrays. Russ Microelectron 47, 104–111 (2018). https://doi.org/10.1134/S1063739718020099
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DOI: https://doi.org/10.1134/S1063739718020099