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Structural and optical properties of thin In2O3 films produced by autowave oxidation

  • Fabrication, Treatment, and Testing of Materials and Structures
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Abstract

Cubic-phase In2O3 films are produced by the autowave oxidation reaction. Electron microscopy and photoelectron spectroscopy of the atomic profiles show that the samples are homogeneous over the entire area and throughout the thickness, with the typical grain size being 20–40 nm. The optical and electrical properties are studied for In2O3 films fabricated at different pressures in the vacuum chamber. In the wave-length range from 400 to 1100 nm, the transparency of the films was higher than 85%; the resistivity of the films was 1.8 × 10−2 Ω cm.

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References

  1. C. G. Granqvist, Solar Energy Mater. Solar Cells 91, 1529 (2007).

    Article  Google Scholar 

  2. S.-Y. Han, G. S. Herman, and Chin-hung Chang, J. Am. Chem. Soc. 133, 5166 (2011).

    Article  Google Scholar 

  3. R. E. Presley, C. L. Munsee, C.-H. Park, D. Hong, J. F. Wager, and D. A. Keszler, J. Phys. D: Appl. Phys. 37, 2810 (2004).

    Article  ADS  Google Scholar 

  4. A. A. Ivanenko, N. P. Shestakov, A. M. Sysoev, and V. F. Shabanov, in Proceedings of the 7th World Multi-conference on Systemics, Cybernetics, Informatics (Orlando, 2003), vol. 10, p. 124.

    Google Scholar 

  5. K. D. Gopchandran, B. Joseph, J. T. Abraham, P. Koshy, and V. K. Vaidyan, Vacuum 48, 547 (1997).

    Article  Google Scholar 

  6. P. Koscielniak, J. Mazur, J. Henek, M. Kwoka, L. Pawela, and J. Szuber, Thin Solid Films 520, 927 (2011).

    Article  ADS  Google Scholar 

  7. S. I. Rembeza, P. E. Voronov, B. M. Sinel’nikov, and E. S. Rembeza, Semiconductors 45, 1479 (2011).

    Article  ADS  Google Scholar 

  8. S. Cho, Microelectron. Eng. 89, 84 (2012).

    Article  Google Scholar 

  9. D. A. Zuev, A. A. Lotin, O. A. Novodvorsky, F. V. Lebedev, O. D. Khramova, I. A. Petukhov, F. N. Putilin, A. N. Shatokhin, M. N. Rumyantseva, and A. M. Gas’kov, Semiconductors 46, 410 (2012).

    Article  ADS  Google Scholar 

  10. J. M. Dekkers, G. Rijnders, and H. A. Blank, Appl. Phys. Lett. 88, 151908 (2006).

    Article  ADS  Google Scholar 

  11. T. Maruyama and K. Fukui, Thin Solid Films 201, 297 (1991).

    Article  Google Scholar 

  12. A. Suzuki and K. Maki, Chem. Vapor Deposit. 12, 608 (2006).

    Article  Google Scholar 

  13. M. Ritala, T. Asikainen, and H. Leskela, Electronchem. Solid State Lett. 1, 156 (1998).

    Article  Google Scholar 

  14. R. B. H. Tahar, T. Ban, Y. Ohya, and Y. Takahashi, J. Appl. Phys. 83, 2139 (1998).

    Article  ADS  Google Scholar 

  15. C. Cantalini, W. Wlodarski, H. T. Sun, M. Z. Atashbar, M. Passacantando, A. R. Phani, and S. Santucci, Thin Solid Films 350, 276 (1999).

    Article  ADS  Google Scholar 

  16. V. D. Das, S. Kirupavathy, L. Damodare, and N. Lakshminarayan, J. Appl. Phys. 79, 8521 (1996).

    Article  ADS  Google Scholar 

  17. M. Girtan, G. I. Rusu, G. G. Rusu, and S. Gurlui, Appl. Surf. Sci. 162–163, 492 (2000).

    Article  Google Scholar 

  18. H. Kim, J. S. Horwitz, A. Pique, C. M. Gilmore, and D. B. Chrisey, Appl. Phys. A 69, 447 (1999).

    Article  ADS  Google Scholar 

  19. K. Ulutas, D. Deger, and Y. Skarlatos, Phys. Status Solidi A 203, 2432 (2006).

    Article  ADS  Google Scholar 

  20. V. G. Myagkov and V. S. Zhigalov, Solid Phase Reactions and Phase Transformations in Layered Nanostructures (Siberian Branch Acad. Sci., Novosibirsk, 2011) [in Russian].

    Google Scholar 

  21. V. G. Miagkov, L. I. Kveglis, G. I. Frolov, and V. S. Zhigalov, J. Mater. Sci. Lett. 13, 1284 (1994).

    Article  Google Scholar 

  22. A. G. Merzhanov, in Physical Chemistry: Modern Problems, Ed. by Ya. M. Kolotyrkin (Khimiya, Moscow, 1983) [in Russian].

  23. A. G. Merzhanov, Russ. Chem. Rev. 72, 289 (2003).

    Article  ADS  Google Scholar 

  24. E. A. Levashov, A. S. Rogachev, V. I. Yukhvid, and I. P. Borovinskaya, Physicochemical and Technological Bases of Self-Propagated High-Temperature Synthesis (Binom, Moscow, 1999) [in Russian].

    Google Scholar 

  25. A. S. Rogachev, Russ. Chem. Rev. 77, 21 (2008).

    Article  ADS  Google Scholar 

  26. C. Kwon, J. Kim, H. J. Lee, H. C. Jung, and C. G. Park, J. Appl. Phys. 69, 6716 (1991).

    Article  ADS  Google Scholar 

  27. K. Ulutas, D. Deger, N. Kalkan, S. Yildirim, Y. G. Celebi, Y. Iskarlatos, M. L. Ovecogluz, and A. Genc, IOP Conf. Ser.: Mater. Sci. Eng. 15, 012095 (2010).

    Article  Google Scholar 

  28. D. W. Sheel and J. M. Gaskell, Thin Solid Films 520, 1242 (2011).

    Article  ADS  Google Scholar 

  29. I. Hamberg and C. G. Granqvist, J. Appl. Phys. 60, R123 (1986).

    Article  ADS  Google Scholar 

  30. M. Hest, M. S. Dabney, J. D. Perkins, and D. S. Ginley, Thin Solid Films 496, 70 (2006).

    Article  ADS  Google Scholar 

  31. P. Nath and R. F. Bunshah, Thin Solid Films 69, 63 (1980).

    Article  ADS  Google Scholar 

  32. Short Manual of Physico-Chemical Valuers, Ed. by K. P. Mishchenko and A. A. Ravdel (Khimiya, Leningrad, 1974) [in Russian].

    Google Scholar 

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Authors and Affiliations

  1. Kirenskii Institute of Physics, Siberian Branch, Russian Academy of Sciences, Krasnoyarsk, 660036, Russia

    I. A. Tambasov, V. G. Myagkov, A. A. Ivanenko, I. V. Nemtsev, L. E. Bykova & J. L. Mihlin

  2. Institute of Chemistry and Chemical Technology, Siberian Branch, Russian Academy of Sciences, Krasnoyarsk, 660049, Russia

    G. N. Bondarenko & I. A. Maksimov

  3. Joint Stock Company “Academician M.F. Reshetnev Information Satellite Systems”, Zheleznogorsk, 662972, Russia

    I. A. Tambasov, V. V. Ivanov, S. V. Balashov & D. S. Karpenko

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  1. I. A. Tambasov
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  2. V. G. Myagkov
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  3. A. A. Ivanenko
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  4. I. V. Nemtsev
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  5. L. E. Bykova
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  6. G. N. Bondarenko
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  7. J. L. Mihlin
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  8. I. A. Maksimov
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  9. V. V. Ivanov
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  10. S. V. Balashov
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  11. D. S. Karpenko
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Correspondence to I. A. Tambasov.

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Original Russian Text © I.A. Tambasov, V.G. Myagkov, A.A. Ivanenko, I.V. Nemtsev, L.E. Bykova, G.N. Bondarenko, J.L. Mihlin, I.A. Maksimov, V.V. Ivanov, S.V. Balashov, D.S. Karpenko, 2013, published in Fizika i Tekhnika Poluprovodnikov, 2013, Vol. 47, No. 4, pp. 546–550.

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Tambasov, I.A., Myagkov, V.G., Ivanenko, A.A. et al. Structural and optical properties of thin In2O3 films produced by autowave oxidation. Semiconductors 47, 569–573 (2013). https://doi.org/10.1134/S1063782613040210

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  • DOI: https://doi.org/10.1134/S1063782613040210

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