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Two-Stage De-binding for Cu Electrode Application to PZT-PZNN Multilayer Actuator

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Abstract

To fabricate a multilayer actuator by applying Cu paste by the tape casting method, the correlation between the amount of residual carbon from the de-binding process and the sinterability was reviewed and the effect of the former on the piezoelectric properties was observed. The Cu electrode must be fired in a reducing atmosphere to prevent oxidation, but a preliminary de-binding process was performed in an oxidizing atmosphere for effective binder burn-out. After performing a preliminary de-binding process for 24 h in an oxidizing atmosphere, the residual carbon amount was measured with a variation of the main de-binding temperatures in a reducing atmosphere to find the optimal binder burn-out process conditions. As a result of co-firing the specimens (obtained from the two-stage de-binding) in a reducing atmosphere at 900 °C, the maximum sintered density was 7.65 g/cm3. When the final residual carbon amount increased from 0.02 to 0.09 wt%, the capacitance value showed a tendency to decrease from 23.16 to 12.26 nF, and the electrical resistance value increased from 0.2 to 0.8 Ω.

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Funding

Funding was provided by Ministry of Trade, Industry and Energy (Grant No. 10077326).

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Korea University, Seoul, 136-701, Korea

    Sung Cheul Hong & Sahn Nahm

  2. Korea Institute of Ceramic Engineering & Technology, Icheon, 17303, Korea

    Sung Cheul Hong, Zeehoon Park, Dong-Hun Yeo & Hyo-Soon Shin

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  1. Sung Cheul Hong
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  2. Zeehoon Park
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Correspondence to Dong-Hun Yeo.

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Hong, S.C., Park, Z., Yeo, DH. et al. Two-Stage De-binding for Cu Electrode Application to PZT-PZNN Multilayer Actuator. Trans. Electr. Electron. Mater. 23, 348–354 (2022). https://doi.org/10.1007/s42341-022-00399-4

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