Abstract
Micro/Nano mechatronic systems might be defined as systems that include nano- or micro-scale components. These components can be sensors, actuators, and/or physical structures. Furthermore, the high-precision control laws for such small scales are important to ensure stability, accuracy, and precision in these systems. In this writing, four categories of such small-scale systems are considered by providing multifarious novel or key examples from the literature: control engineering and modeling, design and fabrication, measurement engineering, and sensor/actuator development. The applications discussed in the examples vary from nano-positioners, crucial in systems such as atomic force microscopes, to biological sensors like carbon nano-tubes that respond to chemical or molecular stimuli. It is observed that in many instances, especially in micro−/nano-robots, the categories overlap for the completion of a system that needs to be small in size, to be controllable with high accuracy, to have high precision sensing capacity, and finally to be able to carry out submillimeter measurements. Thus, a holistic point of view upon such systems is necessary for future applications. This paper does not limit the type of sensors or actuators to the industrial ones and extends the investigated examples to encompass biological sensing and actuating mechanisms that respond to chemical stimuli, proposing for the inclusion of these units in nano−/micro-mechatronic systems intended to be used in human body or other bio-environments. Several other research opportunities are discussed, challenges in the field are identified, and some propositions are put forward for future directions.
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Fukuda T, Niimi T, Obinata G (2013) Micro-Nano mechatronics - new trends in material, Measurement, Control, Manufacturing and Their Applications in Biomedical Engineering. InTech
Cahill DG, Ford WK, Goodson KE, Mahan GD, Majumdar A, Maris HJ, Merlin R, Phillpot SR (2003) Nanoscale thermal transport. J Appl Phys 93(2):793–818
Singh H, Myong RS (2018) Critical review of fluid flow physics at micro-to Nano-scale porous media applications in the energy sector. Advan Mat Sci Eng
Wautelet M (2001) Scaling laws in the macro-, micro-and nanoworlds. Eur J Phys 22(6):601–611
Jalili N (2010) Piezoelectric-based vibration control: From Macro to micro/nano scale systems, 1st edn. Springer, New York, NY, p 517
Kenton B, Fleming A, Leang K (2011) Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed. Rev Sci Instrum 82(12):123703
Tuma T, Haeberle W, Rothuizen H, Lygeros J, Pantazi A, Sebastian A (2014) Dual-stage Nanopositioning for high-speed scanning probe microscopy. IEEE/ASME Trans Mechatron 19(3):1035–1045
Shi H, Zhu D (2018) Multi-Axis Nanopositioning system for the hard X-ray Split-delay system at the LCLS. Synchrotron Radiation News 31(5):15–20
Zhu Z, To S, Ehmann KF, Zhou X (2017) Design, analysis, and realization of a novel piezoelectrically actuated rotary spatial vibration system for micro−/nanomachining. IEEE/ASME transactions on mechatronics 22(3):1227–1237
Tang H et al (2015) A flexible parallel nanopositioner for large-stroke micro/nano machining, In: IEEE 2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
Zhang Y, Zeng A, Huang H, Hou W (2015) Large-area three-dimensional profilometer based on digital micromirror device. J Opt Technol 82(2):102–107
Liu J, Wang Y, Gu K, You X, Zhang M, Li M, Wang W, Tan J (2016) Measuring profile of large hybrid aspherical diffractive infrared elements using confocal profilometer. Measure Sci Tech 27(12):125011
Liu Y (2009) Nanopositioning and Nanomeasuring System: Friction and Its Control, Advan Tribo, Springer, Berlin, Heidelberg, pp 592–593
Amthor A, Zschaeck S, Ament C (2010) High precision position control using an adaptive friction compensation approach. IEEE Trans Autom Control 55(1):274–278
Gubisch M, Liu Y, Spiess L, Romanus H, Krischok S, Ecke G, Schaefer JA, Knedlik C (2005) Nanoscale multilayer WC/C coatings developed for nanopositioning: part I Microstructures and mechanical properties. Thin Solid Films 488(1):132–139
Liu Y, Gubisch M, Hild W, Scherge M, Spiess L, Knedlik C, Schaefer JA (2005) Nanoscale multilayer WC/C coatings developed for nanopositioning, part II: friction and wear. Thin Solid Films 488(1):140–148
Zhang QS, Chen XB, Yang Q, Zhang WJ (2012) Development and characterization of a novel piezoelectric-driven stick-slip actuator with anisotropic-friction surfaces. Int J Adv Manuf Tech 61(9):1029–1034
Guo Z, Tian Y, Zhang D, Wang T, Wu M (2019) A novel stick-slip based linear actuator using bi-directional motion of micropositioner. Mech Syst Signal Process 128:37–49
Jeon JW, Kim JM (2017) A cylindrical magnetic levitation stage for high-precision rotations. In: 2017 17th International Conference on Control, Automation and Systems (ICCAS), IEEE, pp 545–550
Dong X, Yoon D, Okwudire CE (2017) A novel approach for mitigating the effects of pre-rolling/pre-sliding friction on the settling time of rolling bearing nanopositioning stages using high frequency vibration. Precis Eng 47:375–388
Berger A, Ioslovich I, Gutman PO (2015) Time optimal trajectory planning with feedforward and friction compensation. In 2015 American Control Conference (ACC) (pp. 4143–4148) IEEE, July 2015
Kamenar E, Zelenika S (2017) Nanometric positioning accuracy in the presence of presliding and sliding friction: Modelling, identification and compensation. Mechanics based design of structures and machines 45(1):111–126
Zhang Y, Yan P (2018) An adaptive integral sliding mode control approach for piezoelectric nano-manipulation with optimal transient performance. Mechatronics 52:119–126
Cheng F, Fan KC, Miao J, Li BK, Wang HY (2012) A BPNN-PID based long-stroke nanopositioning control scheme driven by ultrasonic motor. Precis Eng 36(3):485–493
Liu CH, Jywe WY, Jeng YR et al (2010) Design and control of a long-traveling nano-positioning stage. Precis Eng 34:3497–3506
Awtar S, Parmar G (2013) Design of a large range XY nanopositioning system, J Mech Rob, vol 5, no. 2, pp 021008–021008-10
Parmar G (2014) Kira Barton, and S. Awtar, large dynamic range nanopositioning using iterative learning control. Precis Eng 38(1):48–56
Wang J, Zhu C (2017) Dual-drive long-travel precise positioning stage of grating ruling engine. Int J Adv Manuf Technol 93(9–12):3541–3550
Roy NK, Cullinan MA (2018) Design and characterization of a two-axis, flexure-based nanopositioning stage with 50 mm travel and reduced higher order modes. Precis Eng 53:236–247
Ito S, Troppmair S, Lindner B, Cigarini F, Schitter G (2018) Long-range fast nanopositioner using nonlinearities of hybrid reluctance actuator for energy efficiency. IEEE Trans Ind Electron 66(4):3051–3059
Okyay A, Erkorkmaz K, Khamesee MB (2018) Mechatronic design, actuator optimization, and control of a long stroke linear nano-positioner. Precis Eng 52:308–322
Nagel WS, Leangy KK (2017) Design of a dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner with mechanically mitigated cross-coupling, In: 2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), IEEE, pp 706–711
Rakotondrabe M, Clévy C, Lutz P (2010) Complete open loop control of hysteretic, creeped, and oscillating piezoelectric cantilevers. IEEE Trans Autom Sci Eng 7(3):440–450
Kuhnen K, Janocha H (2001) Inverse feedforward controller for complex hysteretic nonlinearities in smart-material systems. Control Intell Syst 29(3):74–83
Kuhnen K, Janocha H (1999) Adaptive inverse control of piezoelectric actuators with hysteresis operators, Control Conference (ECC), 1999 European. IEEE
Kuhnen K (2003) Modeling, identification and compensation of complex hysteretic nonlinearities: a modified Prandtl-Ishlinskii approach. Eur J Control 9(4):407–418
Al Janaideh M, Rakheja S, Su C (2011) An analytical generalized Prandtl–Ishlinskii model inversion for hysteresis compensation in micropositioning control. IEEE/ASME Trans. Mechatron. 16(4):734–744
Ang W, Khosla PK, Riviere CN (2007) Feedforward controller with inverse rate-dependent model for piezoelectric actuators in trajectory-tracking applications. IEEE/ASME Trans. Mechatron. 12(2):134–142
Rakotondrabe M (2010) Bouc–wen modeling and inverse multiplicative structure to compensate hysteresis nonlinearity in piezoelectric actuators. IEEE Trans Autom Sci Eng 8(2):428–431
Fujii F, Tatebatake KI, Morita K, Shiinoki T (2018) September. A Bouc–Wen model-based compensation of the frequency-dependent hysteresis of a piezoelectric actuator exhibiting odd harmonic oscillation. In: Actuators, vol 7, no 3, p 37
Liu Y, Shan J, Gabbert U, Qi N (2013) Hysteresis and creep modeling and compensation for a piezoelectric actuator using a fractional-order Maxwell resistive capacitor approach. Smart Mater Struct 22(11):115020
Liu Y, Shan J, Gabbert U (2014) Feedback/feedforward control of hysteresis-compensated piezoelectric actuators for high-speed scanning applications. Smart Mater Struct 24(1):015012
Lin C, Yang S (2006) Precise positioning of piezo-actuated stages using hysteresis-observer based control. Mechatronics 16(7):417–426
Leang KK, Devasia S (2007) Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators. IEEE Trans Control Syst Technol 15(5):927–935
Zhang D, Zhang C, Wei Q, et al (2008) Modeling piezoelectrically driven micro/nanopositioning systems with high operating frequency. In: 10th International Conference on Control, Automation, Robotics and Vision, 2008. CARCV 2008. IEEE
Rios SA, Fleming AJ (2015) Design of a charge drive for reducing hysteresis in a piezoelectric bimorph actuator. IEEE/ASME Transactions on Mechatronics 21(1):51–54
Singh T, Singhose W (2002) Input shaping/time delay control of maneuvering flexible structures. In: Proceedings of the American Control Conference, 2002, IEEE, vol 3
Vaughan J, Yano A, Singhose W (2008) Comparison of robust input shapers. J Sound Vib 315(4):797–815
Fleming AJ (2010) Nanopositioning system with force feedback for high-performance tracking and vibration control. IEEE/ASME Trans. Mechatron. 15(3):433–447
Mahmood IA, Moheimani SR (2009) Making a commercial atomic force microscope more accurate and faster using positive position feedback control. Rev Sci Instrum 80(6):63705
Syed HH (2017) Comparative study between positive position feedback and negative derivative feedback for vibration control of a flexible arm featuring piezoelectric actuator. Int J Adv Robot Syst 14(4):17298814–17718801
Aphale SS, Namavar M, Fleming AJ (2018) Resonance-shifting Integral Resonant Control for High-speed Nanopositioning, In: 2018 Annual American Control Conference (ACC), IEEE, pp 6006–6011
Aphale S, Fleming AJ, Moheimani SOR (2007) High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control. Micro & Nano Lett 2(1):9–12
Fleming AJ, Moheimani SOR (2006) Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners. IEEE Trans Control Syst Technol 14(1):33–44
Aphale SS, Devasia S, and Moheimani SR (2008) High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties, Nanotechnology 19(12):125503
Russell D, Fleming AJ, Aphale SS (2015) Simultaneous optimization of damping and tracking controller parameters via selective pole placement for enhanced positioning bandwidth of nanopositioners, J Dyn Sys Measure Control 137(10):101004
Wang G, Chen G, Bai F (2016) High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation. Microsyst Technol 22(10):2499–2509
He W, Yan Z, Sun C, Chen Y (2017) Adaptive neural network control of a flapping wing micro aerial vehicle with disturbance observer. IEEE transactions on cybernetics 47(10):3452–3465
Al-Mahasneh AJ, Anavatti SG, Garratt MA (2017) Altitude identification and intelligent control of a flapping wing micro aerial vehicle using modified generalized regression neural networks, In 2017 IEEE Symposium Series on Computational Intelligence (SSCI), IEEE, pp 1–6
Verboom JL, Tijmons S, De Wagter C, Remes B, Babuska R and de Croon GC (2015) May. Attitude and altitude estimation and control on board a flapping wing micro air vehicle, In: 2015 IEEE International Conference on Robotics and Automation (ICRA). IEEE, pp 5846–5851
Mahjoubi H, Byl K (2012) Steering and horizontal motion control in insect-inspired flapping-wing MAVs: the tunable impedance approach. In: 2012 American Control Conference (ACC), IEEE, pp 901–908
Lindholm GJ, Cobb RG (2014) Closed-loop control of a constrained, resonant-flapping micro air vehicle. AIAA J 52(8):1616–1623
Lee JW, Nguyen AT, Han JH (2018) Longitudinal flight control of bioinspired flapping-wing micro air vehicle with extended unsteady vortex-lattice method. In: 31st Congress of the International Council of the Aeronautical Sciences (ICAS 2018). ICAS, September
Chen Z, Um TI, Bart-Smith H (2012) Modeling and control of artificial bladder enabled by ionic polymer-metal composite. In: 2012 American Control Conference (ACC), pp 1925–1930
Srairi F, Saidi L, Djeffal F, Meguellati M (2016) Modeling, control and optimization of a new swimming microrobot design. Engineering Letters 24(1)
Wang B, Zhang Y, Zhang L (2018) Recent progress on micro-and nano-robots: towards in vivo tracking and localization. Quantitative imaging in medicine and surgery 8(5):461–479
Liang Z, Fan D (2018) Visible light–gated reconfigurable rotary actuation of electric nanomotors. Science Advances 4(9):p.eaau0981
Betal S, Saha AK, Ortega E, Dutta M, Ramasubramanian AK, Bhalla AS, Guo R (2018) Core-shell magnetoelectric nanorobot–a remotely controlled probe for targeted cell manipulation. Sci Rep 8(1):1–9
Andhari SS, Wavhale RD, Dhobale KD, Tawade BV, Chate GP, Patil YN, Khandare JJ, Banerjee SS (2020) Self-propelling targeted magneto-nanobots for deep tumor penetration and pH-responsive intracellular drug delivery. Sci Rep 10(1):1–16
Arnon S, Dahan N, Koren A, Radiano O, Ronen M, Yannay T, Giron J, Ben-Ami L, Amir Y, Hel-Or Y and Friedman D (2016) Thought-controlled nanoscale robots in a living host. PloS one 11(8):p.e0161227
Jeon S, Hoshiar AK, Kim K, Lee S, Kim E, Lee S, Kim JY, Nelson BJ, Cha HJ, Yi BJ, Choi H (2019) A magnetically controlled soft microrobot steering a guidewire in a three-dimensional phantom vascular network. Soft robotics 6(1):54–68
Khalesi R, Pishkenari HN, Vossoughi G (2020) Independent control of multiple magnetic microrobots: design, dynamic modelling, and control. Journal of Micro-Bio Robotics 16(2):215–224
Pawashe C, Floyd S, Diller E, Sitti M (2011) Two-dimensional autonomous microparticle manipulation strategies for magnetic microrobots in fluidic environments. IEEE Trans Robot 28(2):467–477
Kim SJ, Jeon SM, Nam JK, Jang GH (2014) Closed-loop control of a self-positioning and rolling magnetic microrobot on 3D thin surfaces using biplane imaging. IEEE Trans Magn 50(11):1–4
Zarrouk A, Belharet K, Tahri O (2020) Vision-based magnetic actuator positioning for wireless control of microrobots. Robot Auton Syst 124:103366
Salehizadeh M, Diller E (2020) Three-dimensional independent control of multiple magnetic microrobots via inter-agent forces. The International Journal of Robotics Research 39(12):1377–1396
Kim JJ, Choi YM, Ahn D, Hwang B, Gweon DG, Jeong J (2012) A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism. Mech Mach Theory 50:109–120
Chu C, Fan S (2006) A novel long-travel piezoelectric-driven linear nanopositioning stage. Precis Eng 30(1):85–95
Lobontiu N, Garcia E (2003) Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms. Comput Struct 81(32):2797–2810
Ninomiya T, Okayama Y, Matsumoto Y, Arouette X, Osawa K, Miki N (2011) MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid. Sens. Actuators, A 166(2):277–282
Ma HW, Yao SM, Wang LQ, Zhong Z (2006) Analysis of the displacement amplification ratio of bridge-type flexure hinge. Sens. Actuators, A 132(2):730–736
Choi YM, Gweon DG (2011) A high-precision dual-servo stage using Halbach linear active magnetic bearings. IEEE/ASME Trans. Mechatron. 16(5):925–931
Choi KB, Lee JJ, Hata S (2010) A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel. Sens Actuators, A 161(1):173–181
Pal P, Sato K (2010) Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes. Microsyst Technol 16(7):1165–1174
Essa K, Modica F, Imbaby M, El-Sayed MA, ElShaer A, Jiang K, Hassanin H (2017) Manufacturing of metallic micro-components using hybrid soft lithography and micro-electrical discharge machining. Int J Adv Manuf Technol 91(1–4):445–452
Wang HJ, Zuo DW, Xu F, Lu WZ (2016) Fabrication of nano-crystalline diamond duplex micro-gear by hot filament chemical vapor deposition. Materials transactions, p. M2016334
Kim S, Qiu F, Kim S, Ghanbari A, Moon C, Zhang L, Nelson BJ, Choi H (2013) Fabrication and characterization of magnetic microrobots for three-dimensional cell culture and targeted transportation. Adv Mater 25(41):5863–5868
Ceylan H, Yasa IC, Sitti M (2017) 3D chemical patterning of micromaterials for encoded functionality. Adv Mater 29(9):1605072
Reeves JB, Jayne RK, Barrett L, White AE, Bishop DJ (2019) Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning. Nanoscale 11(7):3261–3267
Xu Q (2015) Design, fabrication, and testing of an MEMS microgripper with dual-axis force sensor. IEEE Sensors J 15(10):6017–6026
Chen M, Yu H, Guo S, Xu R and Shen W (2015) An electromagnetically-driven MEMS micromirror for laser projection. In: 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE, pp 605–607
Moon BU, Tsai SS, Hwang DK (2015) Rotary polymer micromachines: in situ fabrication of microgear components in microchannels. Microfluid Nanofluid 19(1):67–74
Cheah KH, Low KS (2014) Fabrication and performance evaluation of a high temperature co-fired ceramic vaporizing liquid microthruster. J Micromech Microeng 25(1):015013
Hamid NA, Majlis BY, Yunas J, Syafeeza AR, Wong YC, Ibrahim M (2017) A stack bonded thermo-pneumatic micro-pump utilizing polyimide based actuator membrane for biomedical applications. Microsyst Technol 23(9):4037–4043
Sari I, Kraft M (2015) A MEMS linear accelerator for levitated micro-objects. Sensors Actuators A Phys 222:15–23
Yan J et al (2001) Towards flapping wing control for a micromechanical flying insect, Robotics and Automation. In: IEEE International Conference on ICRA, vol 4, IEEE
Bhat SS, Zhao J, Sheridan J, Hourigan K, Thompson MC (2019) Evolutionary shape optimisation enhances the lift coefficient of rotating wing geometries. J Fluid Mech 868:369–384
Gong D, Lee D, Shin S, Kim S (2019) String-based flapping mechanism and modularized trailing edge control system for insect-type FWMAV. International Journal of Micro Air Vehicles 11:1756829319842547
Moses KC, Michaels SC, Willis M et al (2017) Artificial Manduca sexta forewings for flapping-wing micro aerial vehicles: how wing structure affects performance, Bioinspiration Biomimetics, vol 12, no 5
Zhang J, Deng X (2017) Resonance principle for the design of flapping wing micro air vehicles. IEEE Trans Robot 33(1):183–197
Van Truong T, Kureemun U, Tan VBC et al (2017) Study on the structural optimization of a flapping wing micro air vehicle. Struct Multidiscip Optim 57(2):1–12
De Wagter C, Tijmons S, Remes BD and de Croon GC (2014) Autonomous flight of a 20-gram flapping wing mav with a 4-gram onboard stereo vision system. In: 2014 IEEE International Conference on Robotics and Automation (ICRA), IEEE, pp 4982–4987
Phan HV, Kang T, and Cheol Park H (2017) Design and stable flight of a 21 g insect-like tailless flapping wing micro air vehicle with angular rates feedback control. Bioinspiration Biomimetics 12(3):036006
Hassanalian M, Abdelkefi A, Wei M, Ziaei-Rad S (2017) A novel methodology for wing sizing of bio-inspired flapping wing micro air vehicles: theory and prototype. Acta Mech 228(3):1097–1113
Bonnet F, Mills R, Szopek M, Schönwetter-Fuchs S, Halloy J, Bogdan S, Correia L, Mondada F, Schmickl T (2019) Robots mediating interactions between animals for interspecies collective behaviors, Science Robotics 4(28):eaau7897, 2019
Nan Y, Karásek M, Lalami ME et al (2017) Experimental optimization of wing shape for a hummingbird-like flapping wing micro air vehicle. Bioinspiration Biomimetics 12(2):026010
Nguyen QV, Chan WL, Debiasi M (2016) Hybrid design and performance tests of a hovering insect-inspired flapping-wing micro aerial vehicle. J Bionic Eng 13(2):235–248
Sivasankaran PN, Ward TA (2016) Spatial network analysis to construct simplified wing structural models for biomimetic micro air vehicles. Aerosp Sci Technol 49:259–268
Graule MA, Chirarattananon P, Fuller SB, Jafferis NT, Ma KY, Spenko M, Kornbluh R, Wood RJ (2016) Perching and takeoff of a robotic insect on overhangs using switchable electrostatic adhesion. Science 352(6288):978–982
Whitney JP, Sreethara PS, Ma KY et al (2011) Pop-up book MEMS. J Micromech Microeng 21(11):115021
Lee YJ, Lua KB (2018) Optimization of simple and complex pitching motions for flapping wings in hover. AIAA J 56(6):2466–2470
Ryu S, Kim HJ (2017) Development of a flapping-wing micro air vehicle capable of autonomous hovering with onboard measurements. In: 2017 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), IEEE, pp 3239–3245
Chin YW, Ang Z, Luo Y, Chan WL, Chahl JS, Lau GK (2018) Spring-assisted motorized transmission for efficient hover by four flapping wings. Journal of Mechanisms and Robotics 10(6):061014
Hussein AA, Seleit AE, Taha HE, Hajj MR (2019) Optimal transition of flapping wing micro-air vehicles from hovering to forward flight. Aerosp Sci Technol 90:246–263
Lee J, Ryu S, Kim T, Kim W and Kim HJ (2018) Learning-based path tracking control of a flapping-wing micro air vehicle. In: 2018 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS), IEEE, pp 7096–7102
Fei F, Tu Z, Zhang J, Deng X (2019) Learning extreme hummingbird maneuvers on flapping wing robots, arXiv preprint arXiv:1902.09626
Li X (2018) Battery Lifetime-Aware Flight Control for Flapping Wing Micro Air Vehicles (doctoral dissertation, UC Irvine)
Chin YW (2019) Design and development of energy-efficient mechanism for flapping-wing micro air vehicle (doctoral dissertation)
Ke X, Zhang W, Cai X, Chen W (2017) Wing geometry and kinematic parameters optimization of flapping wing hovering flight for minimum energy. Aerosp Sci Technol 64:192–203
Ollerton J, Winfree R, Tarrant S (2011) How many flowering plants are pollinated by animals? Oikos 120(3):321–326
Loftus TP (2016) To bee or not to bee: Robobees and the issues they present for United States Law and Policy, U. Ill. JL Tech. & Pol'y, p 161
Potts SG, Neumann P, Vaissière B, Vereecken NJ (2018) Robotic bees for crop pollination: why drones cannot replace biodiversity. Sci Total Environ 642:665–667
Fukuda T, Hosokai H, Ohyama H et al (1991) Giant magnetostrictive alloy (GMA) applications to micro mobile robot as a micro actuator without power supply cables. Micro Electro Mechanical Systems, 1991, MEMS'91. In: Proceedings an Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Ebefors T, Mattsson JU, Kälvesten E et al (1999) A walking silicon micro-robot. In Proceeding Transducers 99:1202–1205
Donald BR, Levey CG, McGray CD, Paprotny I, Rus D (2006) An untethered, electrostatic, globally controllable MEMS micro-robot. J Microelectromech Syst 15(1):1–15
Kim B, Lee MG, Lee YP, Kim YI, Lee GH (2006) An earthworm-like micro robot using shape memory alloy actuator. Sens. Actuators, A 125(2):429–437
Pawashe C, Floyd S, Sitti M (2009) Modeling and experimental characterization of an untethered magnetic micro-robot. Int J Robot Res 28(8):1077–1094
Louf JF, Bertin N, Dollet B, Stephan O, Marmottant P (2018) Hovering microswimmers exhibit ultrafast motion to navigate under acoustic forces. Adv Mater Interfaces 5(16):1800425
Ren L, Nama N, McNeill JM, Soto F, Yan Z, Liu W, Wang W, Wang J, Mallouk TE (2019) 3D steerable, acoustically powered microswimmers for single-particle manipulation. Science Advances 5(10):eaax3084
Aghakhani A, Yasa O, Wrede P, Sitti M (2020) Acoustically powered surface-slipping mobile microrobots. Proc Natl Acad Sci 117(7):3469–3477
Yim S, Sitti M (2011) Design and rolling locomotion of a magnetically actuated soft capsule endoscope. IEEE Trans Robot 28(1):183–194
Mousa A, Feng L, Dai Y, Tovmachenko O (2018) Self-driving 3-legged crawling prototype capsule robot with orientation controlled by external magnetic field. In: 2018 WRC Symposium on Advanced Robotics and Automation (WRC SARA), IEEE. pp 243–248
Kim SJ, Jang GH, Jeon SM, Nam JK (2015) A crawling and drilling microrobot driven by an external oscillating or precessional magnetic field in tubular environments, Journal of Applied Physics 117(17):17A703
Guo S, Fukuda T, Asaka K (2002) Fish-like underwater microrobot with 3 DOF. Robotics and Automation. In: Proceedings IEEE International Conference on ICRA'02, IEEE. vol 1
Deng X, Avadhanula S, Biomimetic micro underwater vehicle with oscillating fin propulsion: System design and force measurement. In: Proceedings of the 2005 IEEE International Conference on Robotics and Automation, ICRA 2005, IEEE
Wang Z, Hang G, Li J, Wang Y, Xiao K (2008) A micro-robot fish with embedded SMA wire actuated flexible biomimetic fin. Sens. Actuators, A 144(2):354–360
Ye Z, Hou P, Chen Z (2017) 2D maneuverable robotic fish propelled by multiple ionic polymer–metal composite artificial fins. Int J Intell Robot Appl 1(2):1–14
Wang Z, Wang Y, Li J et al. (2009) A micro biomimetic manta ray robot fish actuated by SMA. In: 2009 IEEE International Conference on Robotics and Biomimetics (ROBIO). IEEE
Shi L, Guo S, Mao S et al (2013) Development of a lobster-inspired underwater microrobot. Int J Adv Robot Syst 10(1):44
Guo S, Shi L, Ye X, et al (2007) A new jellyfish type of underwater microrobot. In: International Conference on Mechatronics and Automation ICMA 2007. IEEE
Guo S, Li M, Shi L et al (2012) Development of a novel underwater biomimetic microrobot with two motion attitudes. In: 2012 ICME International Conference on Complex Medical Engineering (CME). IEEE
Zhang W, Guo S, and Asaka K (2005) Developments of two novel types of underwater crawling microrobots. In: IEEE International Conference on Mechatronics and Automation, 2005. vol 4. IEEE, 2005
Guo S, Shi L, Xiao N, Asaka K (2012) A biomimetic underwater microrobot with multifunctional locomotion. Rob Auton Syst 60(12):1472–1483
Guo S, Shi L, Asaka K (2008) IPMC actuator-sensor based a biomimetic underwater microrobot with 8 Legs. In: IEEE International Conference on Automation and Logistics ICAL 2008. IEEE
Cho SK (2014) Mini and micro propulsion for medical swimmers. Micromachines 5(1):97–113
Ishihara K, Furukawa T (1991) Intelligent microrobot DDS (Drug Delivery System) measured and controlled by ultrasonics. In: Proceedings IROS'91. IEEE/RSJ International Workshop on Intelligent Robots and Systems' 91. Intelligence for Mechanical Systems. IEEE
Freitas RA (2006) Pharmacytes: An ideal vehicle for targeted drug delivery. J Nanosci Nanotechnol 6(9–1):2769–2775
Nelson BJ, Kaliakatsos IK, Abbott JJ (2010) Microrobots for minimally invasive medicine. Annu Rev Biomed Eng 12:55–85
Dogangil G, Ergeneman O, Abbott JJ et al (2008) IROS 2008. In: International Conference on IEEE/RSJ. IEEE
Peyer KE, Zhang L, Nelson BJ (2013) Bio-inspired magnetic swimming microrobots for biomedical applications. Nanoscale 5(4):1259–1272
Nisar A, Afzulpurkar N, Mahaisavariya B, Tuantranont A (2008) MEMS-based micropumps in drug delivery and biomedical applications. Sensors Actuators B Chem 130(2):917–942
Steager EB, Sakar MS, Magee C et al (2013) Automated biomanipulation of single cells using magnetic microrobots. Int J Robot Res 32(3):346–359
Tao W, Zhang M (2005) A genetic algorithm–based area coverage approach for controlled drug delivery using microrobots. Nanomed Nanotechnol Biol Med 1(1):91–100
Douglas SM, Bachelet I, Church GM (2012) A logic-gated nanorobot for targeted transport of molecular payloads. Science 335(6070):831–834
Ceylan H, Yasa IC, Yasa O, Tabak AF, Giltinan J, Sitti M (2019) 3D-printed biodegradable microswimmer for theranostic cargo delivery and release. ACS Nano 13(3):3353–3362
Yasa IC, Tabak AF, Yasa O, Ceylan H, Sitti M (2019) 3D-printed microrobotic transporters with recapitulated stem cell niche for programmable and active cell delivery. Adv Funct Mater 29(17):1808992
Saxena S, Pramod BJ, Dayananda BC, Nagaraju K (2015) Design, architecture and application of nanorobotics in oncology. Indian J Cancer 52(2):236–241
Cavalcanti A, Shirinzadeh B, Freitas Jr, RA et al (2007) Nanorobot architecture for medical target identification. Nanotechnology 19(1):015103
Esselstyn CB Jr, Gendy G, Doyle J et al (2014) A way to reverse CAD? J Fam Pract 63(7):356–364
Ornish D, Scherwitz LW, Billings JH, Brown SE, Gould KL, Merritt TA, Sparler S, Armstrong WT, Ports TA, Kirkeeide RL, Hogeboom C, Brand RJ (1998) Intensive lifestyle changes for reversal of coronary heart disease. Jama 280(23):2001–2007
Suraj H, Reddy VB (2011) QCA based navigation for nano robot for the treatment of coronary artery disease. In: Proceedings (MeMeA) Medical Measurements and Applications IEEE
Savabi R, Nabaei M, Farajollahi S, Fatouraee N (2020) Fluid structure interaction modeling of aortic arch and carotid bifurcation as the location of baroreceptors. Int J Mech Sci 165:105222
de Ávila, BEF, Angsantikul P, Ramírez-Herrera DE, Soto, F, Teymourian, H, Dehaini, D, Chen Y, Zhang L, Wang J (2018) Hybrid biomembrane–functionalized nanorobots for concurrent removal of pathogenic bacteria and toxins, Sci Rob 3(18):eaat0485
Huang C, Lv JA, Tian X, Wang Y, Yu Y, Liu J (2015) Miniaturized swimming soft robot with complex movement actuated and controlled by remote light signals. Sci Rep 5:17414
Servant A, Qiu F, Mazza M, Kostarelos K and Nelson BJ (2015) Controlled in vivo swimming of a swarm of bacteria-like microrobotic flagella. Adv Mat 27(19):2981–2988
Yasa IC, Ceylan H, Bozuyuk U, Wild AM and Sitti M (2020) Elucidating the interaction dynamics between microswimmer body and immune system for medical microrobots. Sci Rob, 43
Wu Z, Troll J, Jeong HH, Wei Q, Stang M, Ziemssen F, Wang Z, Dong M, Schnichels S, Qiu T, Fischer P (2018) A swarm of slippery micropropellers penetrates the vitreous body of the eye. Science Advances 4(11):eaat4388
Walker D, Käsdorf BT, Jeong HH, Lieleg O, Fischer P (2015) Enzymatically active biomimetic micropropellers for the penetration of mucin gels. Sci Adv 1(11):e1500501
Kehayias P, Turner MJ, Trubko R, Schloss JM, Hart CA, Wesson M, Glenn DR, Walsworth RL (2019) Imaging crystal stress in diamond using ensembles of nitrogen-vacancy centers. Phys Rev B 100(17):174103
Kuo CY, Chan CL, Gau C, Liu CW, Shiau SH, Ting JH (2007) Nano temperature sensor using selective lateral growth of carbon nanotube between electrodes. IEEE Trans Nanotechnol 6(1):63–69
Geiger D, Schrezenmeier I, Roos M, Neckernuss T, Lehn M, Marti O (2017) Measurement of nano particle adhesion by atomic force microscopy using probability theory based analysis. J Phys D Appl Phys 50(20):205301
Kwon S, Kim B, An S, Lee W, Kwak HY, Jhe W (2018) Adhesive force measurement of steady-state water nano-meniscus: effective surface tension at nanoscale. Sci Rep 8(1):8462
Ye J, Sun T, Huang D, Li Z, Lin L (2017) Stand-alone differential capacitance force sensors with sub-nano-newton sensitivity. J Micromech Microeng 27(9):095017
Lay A, Wang DS, Wisser MD, Mehlenbacher RD, Lin Y, Goodman MB, Mao WL, Dionne JA (2017) Upconverting nanoparticles as optical sensors of Nano-to micro-Newton forces. Nano Lett 17(7):4172–4177
Mukhopadhyay A, Granick S (2001) Micro-and nanorheology. Curr Opin Colloid In 6(5):423–429
Garcia L, Barraud C, Picard C et al (2016) A micro-nano-rheometer for the mechanics of soft matter at interfaces. Rev Sci Instrum 87(11):113906
Bown MR, MacInnes JM, Allen RWK et al (2006) Three-dimensional, three-component velocity measurements using stereoscopic micro-PIV and PTV. Meas Sci Technol 17(8):2175
Li RJ, Fan KC, Huang QX, Zhou H, Gong EM, Xiang M (2016) A long-stroke 3D contact scanning probe for micro/nano coordinate measuring machine. Precis Eng 43:220–229
Fan KC, Fei YT, Yu XF et al (2006) Development of a low-cost micro-CMM for 3D micro/nano measurements. Meas Sci Technol 17(3):524
Krishnamoorthy U, Olsson Iii RH, Bogart GR et al (2008) In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor. Sens. Actuators, A 145:283–290
Laine J, Mougenot D (2014) A high-sensitivity MEMS-based accelerometer. Lead Edge 33(11):1234–1242
Zou X, Thiruvenkatanathan P, Seshia AA (2014) A seismic-grade resonant MEMS accelerometer. J Microelectromech Syst 23(4):768–770
Sonmezoglu S, Alper SE, Akin T (2014) An automatically mode-matched MEMS gyroscope with wide and tunable bandwidth. J Microelectromech Syst 23(2):284–297
Cao H, Li H, Kou Z, Shi Y, Tang J, Ma Z, Shen C, Liu J (2016) Optimization and experimentation of dual-mass MEMS gyroscope quadrature error correction methods. Sensors 16(1):71
Chen WC, Gao GW, Wang J, Liu L, Li XL (2012) The study of the MEMS gyro zero drift signal based on the adaptive Kalman filter. In: Key Engineering Materials, vol 500. Trans Tech Publications, pp 635–639
Prikhodko IP, Trusov AA, Shkel AM (2013) Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing. Sensors Actuators A Phys 201:517–524
Fuller SB, Helbling EF, Chirarattananon P and Wood RJ (2014) Using a MEMS gyroscope to stabilize the attitude of a fly-sized hovering robot. In: International Micro Air Vehicle Conference and Competition (IMAV), Delft University of Technology, Delft, the Netherlands, Aug. 12–15, pp 102–109
Tian J, Yang W, Peng Z, Tang T, Li Z (2016) Application of MEMS accelerometers and gyroscopes in fast steering mirror control systems. Sensors 16(4):440
Wang Y, Wang L, Yang T, Li X, Zang X, Zhu M, Wang K, Wu D, Zhu H (2014) Wearable and highly sensitive graphene strain sensors for human motion monitoring. Adv Funct Mater 24(29):4666–4670
Hu G, Zhou R, Yu R, Dong L, Pan C, Wang ZL (2014) Piezotronic effect enhanced Schottky-contact ZnO micro/nanowire humidity sensors. Nano Res 7(7):1083–1091
Setter JR, Hesketh PJ, Hunter GW (2006) Sensors: engineering structures and materials from micro to nano. Interface 15(1):66–69
Jiang G, Goledzinowski M, Comeau FJ, Zarrin H, Lui G, Lenos J, Veileux A, Liu G, Zhang J, Hemmati S, Qiao J (2016) Free-standing functionalized Graphene oxide solid electrolytes in electrochemical gas sensors. Adv Funct Mater 26(11):1729–1736
Wang X, Ji S, Wang H, Yan D (2011) Room temperature nitrogen dioxide chemresistor using ultrathin vanadyl-phthalocyanine film as active layer. Sensors and Actuators B: Chemical 160(1):115–120m
Waggoner PS, Craighead HG (2007) Micro-and nanomechanical sensors for environmental, chemical, and biological detection. Lab Chip 7(10):1238–1255
Minh Triet N, Thai Duy L, Hwang BU, Hanif A, Siddiqui S, Park KH, Cho CY, Lee NE (2017) High-performance Schottky diode gas sensor based on the Heterojunction of three-dimensional Nanohybrids of reduced Graphene oxide–vertical ZnO Nanorods on an AlGaN/GaN layer. ACS Appl Mater Interfaces 9(36):30722–30732
Xue L, Wang W, Guo Y, Liu G, Wan P (2017) Flexible polyaniline/carbon nanotube nanocomposite film-based electronic gas sensors. Sensors Actuators B Chem 244:47–53
Fan H, Cheng Y, Gu C, Zhou K (2016) A novel gas sensor of formaldehyde and ammonia based on cross sensitivity of cataluminescence on nano-Ti3SnLa2O11. Sensors Actuators B Chem 223:921–926
Nikfarjam A, Hosseini S, Salehifar N (2017) Fabrication of a highly sensitive single aligned TiO2 and gold nanoparticle embedded TiO2 nano-fiber gas sensor. ACS Appl Mater Interfaces 9(18):15662–15671
Alshammari AS, Alenezi MR, Lai KT, Silva SRP (2017) Inkjet printing of polymer functionalized CNT gas sensor with enhanced sensing properties. Mater Lett 189:299–302
Bing L, Qing-Hao M, Jia-Ying W, Biao S and Ying W (2015) Three-dimensional gas distribution mapping with a micro-drone. In: 2015 34th Chinese Control Conference (CCC), IEEE, pp 6011–6015
Castro A, Magnezi N, Sintayehu B, Quinto A, Abshire P (2018) Odor source localization on a Nano Quadcopter. In: 2018 IEEE Biomedical Circuits and Systems Conference (BioCAS). IEEE, pp 1–4
Yao W, Wei XC, and Zhang J (2010) A capacitive humidity sensor based on gold–PVA core–shell nanocomposites. Sens. Actuators B 145(1):327–333
Kashi MA, Ramazani A, Abbasian H et al (2012) Capacitive humidity sensors based on large diameter porous alumina prepared by high current anodization. Sens. Actuators, A 174:69–74
Rittersma ZM, Splinter A, Bödecker A, Benecke W (2000) A novel surface-micromachined capacitive porous silicon humidity sensor. Sensors Actuators B Chem 68(1):210–217
Rubinger CPL, Martins CR, De Paoli MA et al (2007) Sulfonated polystyrene polymer humidity sensor: synthesis and characterization. Sensors Actuators B Chem 123(1):42–49
Kim DU, Gong MS (2005) Thick films of copper-titanate resistive humidity sensor. Sensors Actuators B Chem 110(2):321–326
Cho NB, Lim TH, Jeon YM, Gong MS (2008) Inkjet printing of polymeric resistance humidity sensor using UV-curable electrolyte inks. Macromol Res 16(2):149–154
Nohria R, Khillan RK, Su Y, Dikshit R, Lvov Y, Varahramyan K (2006) Humidity sensor based on ultrathin polyaniline film deposited using layer-by-layer nano-assembly. Sensors Actuators B Chem 114(1):218–222
Gerlach G, Sager K (1994) A piezoresistive humidity sensor. Sens. Actuators, A 43(1–3):181–184
Plassmeyer PN, Mitchson G, Woods KN, Johnson DC, Page CJ (2017) Impact of relative humidity during spin-deposition of metal oxide thin films from aqueous solution precursors. Chem Mater 29(7):2921–2926
Lei X, Rui W, Qi X et al (2011) Micro humidity sensor with high sensitivity and quick response/recovery based on ZnO/TiO2 composite nanofibers. Chinese Physics Letters 28(7):070702
Shin B, Ha J, Lee M, Park K, Park GH, Choi TH, Cho KJ, Kim HY (2018) Hygrobot: a self-locomotive ratcheted actuator powered by environmental humidity. Science Robotics 3(14):2629
Jing W, Chowdhury S and Cappelleri D (2017) Magnetic mobile microrobots for mechanobiology and automated biomanipulation. In: Microbiorobotics. Elsevier, pp 197–219
Go G, Yoo A, Song HW, Min HK, Zheng S (2020) Nguyen. K.T, Kim, S., Kang, B., Hong, A., Kim, C.S. and Park, J.O., Multifunctional Biodegradable Microrobot with Programmable Morphology for Biomedical Applications. ACS nano
Kim DI, Lee H, Kwon SH, Choi H, Park S (2019) Magnetic nano-particles retrievable biodegradable hydrogel microrobot. Sensors Actuators B Chem 289:65–77
Tamanaha CR, Mulvaney SP, Rife JC, Whitman LJ (2008) Magnetic labeling, detection, and system integration. Biosens Bioelectron 24(1):1–13
Fritzsche W, Andrew Taton T (2003) Metal nanoparticles as labels for heterogeneous, chip-based DNA detection. Nanotechnology 14(12):R63
Xiao Y, Lubin AA, Heeger AJ, Plaxco KW (2005) Label-free electronic detection of thrombin in blood serum by using an aptamer-based sensor. Angew Chem 117(34):5592–5595
Baker BR, Lai RY, Wood MCS, Doctor EH, Heeger AJ, Plaxco KW (2006) An electronic, aptamer-based small-molecule sensor for the rapid, label-free detection of cocaine in adulterated samples and biological fluids. JACS 128(10):3138–3139
Zayats M, Huang Y, Gill R, Ma CA, Willner I (2006) Label-free and reagentless aptamer-based sensors for small molecules. JACS 128(42):13666–13667
Song S, Wang L, Li J, Fan C, Zhao J (2008) Aptamer-based biosensors, TrAC. Trends Anal Chem 27(2):108–117
Zou Y, Xiang C, Sun LX, Xu F (2008) Glucose biosensor based on electrodeposition of platinum nanoparticles onto carbon nanotubes and immobilizing enzyme with chitosan-SiO 2 sol–gel. Biosens Bioelectron 23(7):1010–1016
Zhang GJ, Chua JH, Chee RE, Agarwal A, Wong SM (2009) Label-free direct detection of MiRNAs with silicon nanowire biosensors. Biosens Bioelectron 24(8):2504–2508
Bunimovich YL, Shin YS, Yeo WS, Amori M, Kwong G, Heath JR (2006) Quantitative real-time measurements of DNA hybridization with alkylated nonoxidized silicon nanowires in electrolyte solution. JACS 128(50):16323–16331
Barone PW, Baik S, Heller DA, Strano MS (2005) Near-infrared optical sensors based on single-walled carbon nanotubes. Nat Mater 4(1):86–92
Jeng ES, Moll AE, Roy AC, Gastala JB, Strano MS (2006) Detection of DNA hybridization using the near-infrared band-gap fluorescence of single-walled carbon nanotubes. Nano Lett 6(3):371–375
Heller DA, Jeng ES, Yeung TK, Martinez BM, Moll AE, Gastala JB, Strano MS (2006) Optical detection of DNA conformational polymorphism on single-walled carbon nanotubes. Science 311(5760):508–511
Ahuja T, Kumar D (2009) Recent progress in the development of nano-structured conducting polymers/nanocomposites for sensor applications. Sensors Actuators B Chem 136(1):275–286
Yoon H, Jang J (2009) Conducting-polymer nanomaterials for high-performance sensor applications: issues and challenges. Adv Funct Mater 19(10):1567–1576
Aravinda CL, Cosnier S, Chen W, Myung NV, Mulchandani A (2009) Label-free detection of cupric ions and histidine-tagged proteins using single poly (pyrrole)-NTA chelator conducting polymer nanotube chemiresistive sensor. Biosens Bioelectron 24(5):1451–1455
Bangar MA, Shirale DJ, Chen W, Myung NV, Mulchandani A (2009) Single conducting polymer nanowire chemiresistive label-free immunosensor for cancer biomarker. Anal Chem 81(6):2168–2175
Yoon H, Jang J (2009) Conducting-polymer nanomaterials for high-performance sensor applications: issues and challenges. Adv Funct Mater 19(10):1567–1576
Huang Z, Tsui GCP, Deng Y, Tang CY (2020) Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications. Nanotechnol Rev 9(1):1118–1136
Tung HW, Maffioli M, Frutiger DR, Sivaraman KM, Pané S, Nelson BJ (2013) Polymer-based wireless resonant magnetic microrobots. IEEE Trans Robot 30(1):26–32
Petrini L, Migliavacca F, Biomedical applications of shape memory alloys (2011). J Met Metall, vol 2011
Seelecke S, Muller I (2004) Shape memory alloy actuators in smart structures: modeling and simulation. Appl Mech Rev 57(1):23–46
Bogdanski D, Köller M, Müller D, Muhr G, Bram M, Buchkremer HP, Stöver D, Choi J, Epple M (2002) Easy assessment of the biocompatibility of Ni–Ti alloys by in vitro cell culture experiments on a functionally graded Ni–NiTi–Ti material. Biomaterials 23(23):4549–4555
Chu CL, Chung CY, Lin PH, Wang SD (2004) Fabrication of porous NiTi shape memory alloy for hard tissue implants by combustion synthesis. Mater Sci Eng A 366(1):114–119
Jani JM, Leary M, Subic A et al (2014) A review of shape memory alloy research, applications and opportunities. Mater Des 56:1078–1113
Zakharov D, Lebedev G, Irzhak A et al (2012) Submicron-sized actuators based on enhanced shape memory composite material fabricated by FIB-CVD. Smart Mater Struct 21(5):052001
Caizzone S, Occhiuzzi C, Marrocco G (2011) Multi-chip RFID antenna integrating shape-memory alloys for detection of thermal thresholds. IEEE Trans Antennas Propag 59(7):2488–2494
Xu D, Wang L, Ding G, Zhou Y, Yu A, Cai B (2001) Characteristics and fabrication of NiTi/Si diaphragm micropump. Sens. Actuators, A 93(1):87–92
Kim DH, Lee MG, Kim B et al (2005) A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study. Smart Mater. Struct 14(6):1265
Chang-Jun Q, Pei-Sun M, Qin Y (2004) A prototype micro-wheeled-robot using SMA actuator. Sens. Actuators, A 113(1):94–99
Kalimullina E, Kamantsev A, Koledov V et al (2014) Magnetic shape memory microactuators. Micromachines 5(4):1135–1160
Ambrosino C, Capoluongo P, Davino D et al (2007) Fiber bragg grating and magnetic shape memory alloy: novel high-sensitivity magnetic sensor. IEEE Sensors J 7(2):228–229
Gueltig M, Ossmer H, Ohtsuka M et al (2015) Thermomagnetic actuation by low hysteresis metamagnetic Ni-co-Mn-in films. Materials Today: Proceedings 2:S883–S886
Gueltig M, Ossmer H, Ohtsuka M et al (2014) High frequency thermal energy harvesting using magnetic shape memory films. Adv Energy Mater 4(17)
Riccardi L, Naso D, Janocha H, Turchiano B (2012) A precise positioning actuator based on feedback-controlled magnetic shape memory alloys. Mechatronics 22(5):568–576
Huang HW, Sakar MS, Petruska AJ, Pané S, Nelson BJ (2016) Soft micromachines with programmable motility and morphology. Nat Commun 7(1):1–10
Lee YW, Ceylan H, Yasa IC, Kilic U, Sitti M (2020) 3D-printed multi-stimuli-responsive Mobile micromachines. ACS Appl Mater Interfaces
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Conceptualization: NJ, AGD; Formal analysis and investigation AGD; Writing—original draft preparation AGD; Writing—review and editing: NJ, AGD, MTA; Supervision: NJ, MTA.
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Ghanbarzadeh-Dagheyan, A., Jalili, N. & Ahmadian, M.T. A holistic survey on mechatronic Systems in Micro/Nano scale with challenges and applications. J Micro-Bio Robot 17, 1–22 (2021). https://doi.org/10.1007/s12213-021-00145-8
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DOI: https://doi.org/10.1007/s12213-021-00145-8