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High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation

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Abstract

A novel composite control strategy is developed in this paper to compensate hysteresis, resonance and disturbances in a piezo-actuated nanopositioner. The control objective of the piezoelectric positioner is to achieve high tracking performance in terms of accuracy and speed. For this purpose, a Bouc–Wen model based hysteresis compensator is first applied to mitigate the hysteresis nonlinearity without the complex inverse hysteresis calculation. And then, the linear dynamic of the hysteresis compensated system is identified and inverted to account for the resonance. A model-based inversion feed-forward controller is designed to achieve high speed tracking. Afterwards, a high-gain feedback controller is designed based on a notch filter to handle the modeling inaccuracy and all kinds of disturbances. So, the feed-forward controller can be augmented to the feedback controller to realize high speed and precision tracking. The enhancement of tracking performance is demonstrated through several comparative experiments. The performance of 70 Hz bandwidth and 0.281 μm precision can be achieved, which validated the effectiveness of the proposed composite control scheme.

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Acknowledgments

This work was supported by the Doctoral Science Foundation of Henan Polytechnic University under Grant No. 60407/010.

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Authors and Affiliations

  1. School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo, 454003, China

    Geng Wang & Guoqiang Chen

  2. College of Mechanical Engineering, Inner Mongolia University of Technology, Huhhot, 010051, China

    Fuzhong Bai

Authors
  1. Geng Wang
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  2. Guoqiang Chen
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  3. Fuzhong Bai
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Correspondence to Geng Wang.

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Wang, G., Chen, G. & Bai, F. High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation. Microsyst Technol 22, 2499–2509 (2016). https://doi.org/10.1007/s00542-015-2638-9

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  • DOI: https://doi.org/10.1007/s00542-015-2638-9

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