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A Tribological Study of SU-8 Micro-Dot Patterns Printed on Si Surface in a Flat-on-Flat Reciprocating Sliding Test

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Abstract

Tribological properties of optimized SU-8 micro-dot patterns on Silicon (Si) were evaluated using a flat-on-flat tribometer. Sliding tests on the patterns were conducted against a SU-8 spin-coated 2 × 2 mm2 Si substrate at varying normal loads at a fixed rotational speed. It was observed that the pitch of the SU-8 pattern on Si substrate had significant influence on the wear durability. Ultra-thin layer of perfluoropolyether was over-coated onto SU-8 micro-dot patterned specimens for enhanced wear durability, and the specimen of the optimized pitch 450 μm has shown a wear life of more than 100,000 cycles at a normal load of 650 mN.

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Acknowledgment

The authors would like to acknowledge the financial support given to this study by the National Research Foundation (NRF), Singapore (Award No. NRF-CRP 2-2007-04).

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Authors and Affiliations

  1. Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore, 117576, Singapore

    Nam Beng Tay, Myo Minn & Sujeet K. Sinha

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  1. Nam Beng Tay
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  2. Myo Minn
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  3. Sujeet K. Sinha
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Correspondence to Sujeet K. Sinha.

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Tay, N.B., Minn, M. & Sinha, S.K. A Tribological Study of SU-8 Micro-Dot Patterns Printed on Si Surface in a Flat-on-Flat Reciprocating Sliding Test. Tribol Lett 44, 167 (2011). https://doi.org/10.1007/s11249-011-9835-1

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  • DOI: https://doi.org/10.1007/s11249-011-9835-1

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