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Stereometric analysis of TiO2 thin films deposited by electron beam ion assisted

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Abstract

The micromorphology and semiconductor properties of TiO2 thin films growth using different ion beam energies have been finely analyzed using atomic force microscopy (AFM), ultra-violet visible (UV–visible) spectroscopy and stereometric analysis. The AFM measurements and surface stereometric analysis are essential for the accurate characterization of the 3-D surface topographic features and allow the determination of the 3-D surface texture parameters that influence the optical properties of the material. The samples were divided into four groups to discuss the obtained results, according to the ion beam energy applied in the sample preparation. The results obtained from experimental measurements suggested that the surface of samples prepared at lower beam energy had the most regular surface (Sq = 6.25 nm), while the most irregular surface was found in samples prepared with the highest ion beam energy (Sq = 13.40 nm). The transmittance (%) and reflectance (%) spectra, and the band gap energy experienced noticeable changes with increasing applied energy and deposition pressures due to the increase of the surface tension and decrease of the grain sizes. Our investigation shows that the deposition pressure and applied energy affect the optical and the roughness of titania thin films, which partially contribute to the functionality of the surface that, in turn, makes titania useful for the fabrication of different optoelectronic devices.

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Authors and Affiliations

  1. Department of Physics, Faculty of Science, Imam Khomeini International University, Qazvin, Iran

    Reza Shakoury

  2. Vacuum Technology Group, ACECR, Sharif University Branch, Tehran, Iran

    Ali Arman

  3. Development and Innovation Management (DMCDI), Technical University of Cluj-Napoca, The Directorate of Research, Constantin Daicoviciu St., No. 15, 400020, Cluj-NapocaCluj County, Romania

    Ştefan Ţălu

  4. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, 30332, USA

    Davoud Dastan

  5. Facultad de Ciencias Físico Matemáticas (FCFM), Universidad Autónoma de Nuevo León (UANL), Av. Universidad s/n, San Nicolás de Los Garza, 66455, Nuevo León, Mexico

    Carlos Luna

  6. Department of Physics, KermanshahBranch, IslamicAzadUniversity, Kermanshah, Iran

    Sahar Rezaee

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  1. Reza Shakoury
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Correspondence to Sahar Rezaee.

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Shakoury, R., Arman, A., Ţălu, Ş. et al. Stereometric analysis of TiO2 thin films deposited by electron beam ion assisted. Opt Quant Electron 52, 270 (2020). https://doi.org/10.1007/s11082-020-02388-4

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