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A Wide-Aperture, Low-Energy, and High-Current Electron Beam Source with a Plasma Anode Based on a Reflective Discharge

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Abstract

A source of low-energy (10–30 keV) high-current (up to 30-kA) electron beams efficiently and stably operating under conditions of oil-free vacuum has been developed. It is based on an electron gun with an explosive-emission cathode and a plasma anode, which is formed using a high-current reflective discharge. An external guide magnetic field ensures both discharge initiation and maintenance and beam transport. The source, the results of tests of it, and the experience of its operation are described. Methods for reducing the flow of erosion products ejected from the walls of the vacuum chamber to the processed target are proposed. The source is used in physical and technological studies of the modification of properties of surface material layers and for surface processing of articles.

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Authors and Affiliations

  1. Institute of High Current Electronics, Siberian Division, Russian Academy of Sciences, pr. Akademicheskii 2/3, Tomsk, 634055, Russia

    G. E. Ozur, D. I. Proskurovsky & K. V. Karlik

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  1. G. E. Ozur
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  2. D. I. Proskurovsky
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  3. K. V. Karlik
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__________

Translated from Pribory i Tekhnika Eksperimenta, No. 6, 2005, pp. 58–65.

Original Russian Text Copyright © 2005 by Ozur, Proskurovsky, Karlik.

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Ozur, G.E., Proskurovsky, D.I. & Karlik, K.V. A Wide-Aperture, Low-Energy, and High-Current Electron Beam Source with a Plasma Anode Based on a Reflective Discharge. Instrum Exp Tech 48, 753–760 (2005). https://doi.org/10.1007/s10786-005-0136-5

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  • DOI: https://doi.org/10.1007/s10786-005-0136-5

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