Abstract
Recently, heterojunction-based ultraviolet (UV) photodetectors (PDs) have found a wide range of applications in day-to-day life. The fabrication of these UV PD devices using high-k TiO2 nanostructures i.e. nanotubes (NTs) at low temperature processing steps in association with cost-effective deposition methods is crucial. In this work, Ag/n-TiO2NTs/p-Si heterojunction-based MSM UV PD devices were fabricated using hydrothermal, spin coating and e-beam evaporation methods. The structural, chemical, optical, morphological and elemental composition characteristics of the formed TiO2NTs/p-Si stacks were explored by XRD/Raman, XPS, UV–Vis, FESEM and EDS techniques, respectively. XRD and FESEM analysis revealed the formation of anatase phase of TiO2NTs with an average diameter of ~ 16.1 nm and length of ~ 50.9 nm. XPS investigation revealed two intense core level BE peaks of Ti2p3/2 and Ti2p1/2. The photodetection parameters of the fabricated MSM UV PD device were systematically checked in dark and UV-A light (320–400 nm) illumination. At 3 V, the fabricated Ag/n-TiO2NTs/p-Si device presented superior photosensing properties with a responsivity of 570 mA/W, EQE of 189% and rise/decay times of 120 ms/95 ms. Further, the superior structural and photosensing parameters attained from the fabricated MSM UV PD device may expand its scope to serve as a future cost-effective alternative to other wide bandgap semiconductor (GaN, SiC and ZnO) based heterojunction PD devices.
Similar content being viewed by others
Data Availability
Data will be made available on request.
References
Lahiri R, Ghosh A, Dwivedi SMMD, Chakrabartty S, Chinnamuthu P, Mondal A (2017) Performance of Erbium-doped TiO2 thin film grown by physical vapor deposition technique. Appl Phys A: Mater Sci Process 123:573
Lin B, Fu Z, Jia Y (2001) Green luminescent center in undoped zinc oxide films deposited on silicon substrates. Appl Phys Lett 79:943–945
Wang H, Liang W, Zhang W, Zhou D (2017) Photoelectric performance of TiO2 nanotube array film of highly transparent vs nontransparent on FTO glass. Mater Sci Semicond Process 71:50–53
Zhang C, Bai W, Yang Z (2016) A novel photoelectrochemical sensor for bilirubin based on porous transparent TiO2 and molecularly imprinted polypyrrole. Electrochim Acta 187:451–456
Viet PV, Hieu LV, Thi CM (2016) The directed preparation of TiO2 nanotubes film on FTO substrate via hydrothermal method for gas sensing application. AIMS Mater Sci 3:460–469
Peighambardoust NS, Aydemir U (2020) Blue TiO2 nanotube arrays as semimetallic materials with enhanced photoelectrochemical activity towards water splitting. Turk J Chem 44:1642–1654
Satoshi U, Ryoji C, Miho T, Naruhiko M, Masayuki S (2002) Application of titania nanotubes to a dye-sensitized solar cell. Electrochem 70:418–420
Roy P, Berger S, Schmuki P (2011) TiO2 nanotubes: synthesis and applications. Angew Chem Int Ed 50:2904–2939
Guo W, Xue X, Wang S, Lin C, Wang ZL (2012) An integrated power pack of dye-sensitized solar cell and li battery based on double-sided TiO2 nanotube arrays. Nano Lett 12:2520–2523
Zou J, Zhang Q, Huang K, Marzari N (2010) Ultraviolet photodetectors based on anodic TiO2 nanotube arrays. J Phys Chem C 114:10725–10729
Wang L, Yang W, Chong H, Wang L, Gao F, Tian L, Yang Z (2015) Efficient ultraviolet photodetectors based on TiO2 nanotube arrays with tailored structures. RSC Adv 5:52388–52394
Joshna P, Hazra A, Chappanda KN, Pattnaik PK, Kundu S (2020) Fast response of UV photodetector based on Ag nanoparticles embedded uniform TiO2 nanotubes array. Semicond Sci Technol 35:015001
Zhang D-Y, Ge C-W, Wang J-Z, Zhang T-F, Wu YC, Liang F-X (2016) Single-layer graphene-TiO2 nanotubes array heterojunction for ultraviolet photodetector application. Appl Surf Sci 387:1162–1168
Nallabala NKR, Vattikuti SVP, Verma VK, Singh VR, Alhammadi S, Kummara VK, Manjunath V, Dhanalakshmi M, Reddy VRM (2022) Highly sensitive and cost-effective metal-semiconductor-metal asymmetric type Schottky metallization based ultraviolet photodetecting sensors fabricated on n-type GaN. Mater Sci Semicond Process 138:106297
Pansri S, Supruangnet R, Nakajima H, Rattanasuporn S, Noothongkaew S (2020) Band offset determination of p-NiO/n-TiO2 heterojunctions for applications in high-performance UV photodetectors. J Mater Sci 55:4332–4344
Nallabala NKR, Godavarthi S, Kummara VK, Kesarla MK, Saha D, Akkera HS, Guntupalli GK, Kumar S, Vattikuti SVP (2020) Structural, optical and photoresponse characteristics of metal-insulator-semiconductor (MIS) type Au/Ni/CeO2/GaN Schottky barrier ultraviolet photodetector. Mater Sci Semicond Process 117:105190
Nallabala NKR, Kushvaha SS, Kumari A, Singh VR, Verma VK, Kaleemulla S, Singh LP, Jilani SAK, Vattikuti SVP, Bakash KR, Sambasivam S, Shim J (2023) Self-powered and improved photoresponsive broadband photodetecting sensors using Au/NiFe2O4/p-Si heterojunction architecture. Mater Sci Semicond Process 156:107266
Karaagac H, Aygun LE, Parlak M, Ghaffari M, Biyikli N, Okyay AK (2012) Au/TiO2 nanorod-based Schottky-type UV photodetectors. Phys Status Solidi RRL 6:442–444
Nallabala NKR, Singh LP, Yuvaraj C, Sambasivam S, Kumar S, Shankar MV, Alhammadi S, Kushvaha SS, Kummara VK, Bakash KR, Reddy VRM (2023) UV-to-NIR broadband photodetecting sensors using n-TiO2 nanorods/p-Si heterojunction in lateral and vertical configurations. Appl Phys A: Mater Sci Process 129:412
Nicolaescu M, Bandas C, Orha C, Serban V, Lazau C, Caprarescu S (2021) Fabrication of a UV photodetector based on n-TiO2/p-CuMnO2 heterostructures. Coat 11:1380
Huang Z, Ji C, Cheng L, Han J, Yang M, Wei X, Jiang Y, Wang J (2019) Zero-bias visible to near-infrared horizontal p-n-p TiO2 nanotubes doped monolayer graphene photodetector. Molecules 24:1870
Xue H, Kong X, Liu Z, Liu C, Zhou J, Chen W (2007) TiO2 based metal-semiconductor-metal ultraviolet photodetectors. Appl Phys Lett 90:201118
Chaiyarat W, Yoon UTY, An K-S (2020) Hybridization and characterization of carboxylate-rich Graphene Quantum Dots (GQDs)/TiO2 nanotubes for UV detectors. J Mater Sci: Appl Energy 9:531–538
Wang N, Zheng R, Chen J, Ding Z, San H, Zhang S (2022) Enhanced photoelectrochemical performance of carbon nanotubes modified black TiO2 nanotube arrays for self-driven photodetectors. J Sci: Adv Mater Devices 7:100452
Zhang Q, Chen R, San H, Liu G, Wang K (2015) Betavoltaic microbatteries using TiO2 nanotube arrays. 2015 Transducers – 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Transducers 2015, Anchorage, Alaska, USA, June 21–25, pp 1909–1912
Wehrenfennig C, Palumbiny CM, Snaith HJ, Johnston MB, Schmidt-Mende L, Herz LM (2015) Fast charge-carrier trapping in TiO2 nanotubes. J Phys Chem C 119:9159–9168
Zou Y, Zhang Y, Hu Y, Gu H (2018) Ultraviolet detectors based on wide bandgap semiconductor nanowire. A review. Sensors 18:2072–2097
Grimes AC (2007) Synthesis and application of highly ordered arrays of TiO2 nanotubes. J Mater Chem A 17:1451–1457
Tauc J, Grigorovici R, Vancu A (1966) Optical properties and electronic structure of amorphous germanium. Phys Status Solidi B 15:627–637
Yanagisawa K, Ovenstone J (1999) Crystallization of anatase from amorphous titania using the hydrothermal technique: effects of starting material and temperature. J Phys Chem B 103:7781–7787
Appadurai T, Subramaniyam CM, Kuppusamy R, Karazhanov S, Subramanian B (2019) Electrochemical performance of nitrogen-doped TiO2 nanotubes as electrode material for supercapacitor and Li-Ion battery. Mol 24:2952
Kumar A, Mondal S, Kumar SG, Rao KSRK (2015) High performance sol-gel spin-coated titanium dioxide dielectric based MOS structures. Mater Sci Semicond Process 40:77–83
Kumbhar SM, Shevate SS, Patil AR, Shaikh SK, Rajpure KY (2020) Dip coated TiO2 based metal-semiconductor-metal ultraviolet photodetector for UV A monitoring. Superlattices Microstruct 141:106490
Karayan AI, Ferdian D, Pratesa Y (2012) Synthesis of TiO2 nanotube in TI-10Ta-10Nb thin film by anodization. Int J Technol 3:140–144
Pan L, Wang S, Zou J-J, Huang Z-F, Wang L, Zhang X (2014) Ti3+-defected and V-doped TiO2 quantum dots loaded on MCM-41. Chem Commun 50:988–990
Xia Y, Jiang Y, Li F, Xia M, Xue B, Li Y (2014) Effect of calcined atmosphere on the photocatalytic activity of P-doped TiO2. Appl Surf Sci 289:306–315
Fu J, Cao S, Yu J, Low J, Lei Y (2014) Enhanced photocatalytic CO2-reduction activity of electrospun mesoporous TiO2 nanofibers by solvothermal treatment. Dalton Trans 43:9158–9165
Sofianou M-V, Tassi M, Psycharis V, Boukos N, Thanos S, Vaimakis T, Yu J, Trapalis C (2015) Solvothermal synthesis and photocatalytic performance of Mn4+-doped anatase nanoplates with exposed 0 0 1 facets. Appl Catal B: Environ 162:27–33
Etacheri V, Seery MK, Hinder SJ, Pillai SC (2011) Oxygen rich titania: a dopant free, high temperature stable, and visible-light active anatase photocatalyst. Adv Funct Mater 21:3744–3752
Brevet A, Peterle PM, Imhoff L, de Lucas MCM, Bourgeois S (2005) Initial stages of TiO2 thin films MOCVD growth studied by in situ surface analyses. J Cryst Growth 275:1263
Armelao L, Bertagnolli H, Bleiner D, Groenewolt M, Gross S, Krishnan V, Sada C, Schubert U, Tondello E, Zattin A (2007) Highly dispersed mixed zirconia and hafnia nanoparticles in a silica matrix: first example of a ZrO2–HfO2–SiO2 ternary oxide system. Adv Funct Mater 17:1671
Yang T, Park S-J, Kim TG, Shin DS, Suh K-D, Park J (2017) Ultraviolet photodetector using pn junction formed by transferrable hollow n-TiO2 nanospheres monolayer. Opt Express 25:30843
Park SK, Jeong JS, Yun TK, Bae JY (2015) Preparation of carbon-doped TiO2 and its application as a photoelectrodes in dye-sensitized solar cells. J Nanosci Nanotechnol 15:1529–1532
Selman AM (2016) Studies on the influence of growth time on the rutile TiO2 nanostructures prepared on Si substrates with fabricated high-sensitivity and fast-response p-n heterojunction photodiode. Am J Nano Res Appl 4:23–32
Noothongkaew S, Han JK, Lee YB, Thumthan O, An K-S (2017) Au NPs decorated TiO2 nanotubes array candidate for UV photodetectors. Prog Nat Sci: Mater Int 27:641–646
Chakrabartty S, Mondal A, Sarkar MB, Choudhuri B, Saha AK, Bhattacharyya A (2014) TiO2 nanoparticles arrays ultraviolet-A detector with Au Schottky contact. IEEE Photon Technol Lett 26:1065–1068
Zhou M, Wu B, Zhang X, Cao S, Ma P, Wang K, Fan Z, Su M (2020) TiO2-ZnO core-shell nanotubes: preparation and UV photoelectric properties of aligned ZnO-TiO2 and TiO2-ZnO core-shell structured heterojunction nanotubes. ACS Appl Mater Interfaces 12:38490–38498
Zheng Z, Zhuge F, Wang Y, Zhang J, Gan L, Zhou X, Li H, Zhai T (2017) Decorating perovskite quantum dots in TiO2 nanotubes array for broadband response photodetector. Adv Funct Mater 27:1703115
Zheng L, Deng X, Wang Y, Chen J, Fang X, Wang L, Shi X, Zheng H (2020) Self-powered flexible TiO2 fibrous photodetectors: heterojunction with P3HT and boosted responsivity and selectivity by Au nanoparticles. Adv Funct Mater 30:2001604
Selman AM, Hassan Z (2015) Highly sensitive fast-response UV photodiode fabricated from rutile TiO2 nanorod array on silicon substrate. Sens Actuator A Phys 221:15–21
Selman AM, Hassan Z (2015) Growth and characterization of rutile TiO2 nanorods on various substrates with fabricated fast-response metal-semiconductor-metal UV detector based on Si substrate. Superlattices Microstruct 83:549–564
Guller O, Peksu E, Karaagac H (2018) Synthesis of TiO2 nanorods for Schottky-Type UV-Photodetectors and third-generation solar cells. Phys Status Solidi A 215:1700404
Çalışkan D, Bütün B, Özcan Ş, Özbay E (2013) Metal-semiconductor-metal photodetector on as-deposited TiO2 thin films on sapphire substrate. J Vac Sci Technol B 31:020606
Xiao Y, Min L, Liu X, Liu W, Younis U, Peng T, Kang X, Wu X, Ding S, Zhang DW (2020) Facile integration of MoS2/SiC photodetector by direct chemical vapor deposition. Nanophotonics 9:3035–3044
Megherbi ML, Bencherif H, Dehimi L, Mallemace ED, Rao S, Pezzimenti F, Corte FGD (2021) An efficient 4H-SiC photodiode for UV sensing applications. Electron 10:2517
Mukundan S, Roul B, Shetty A, Chandan G, Mohan L, Krupanidhi SB (2015) Enhanced UV detection by non-polar epitaxial GaN films. AIP Adv 5:127208
Tian H, Liu Q, Hu A, He X, Hu Z, Guo X (2018) Hybrid graphene/GaN ultraviolet phototransistors with high responsivity and speed. Opt Express 26:5408–5415
Inamdar SI, Ganbavle VV, Rajpure KY (2014) ZnO based visible-blind UV photodetector by spray pyrolysis. Superlattices Microstruct 76:253–263
Ali GM, Chakrabarti P (2010) Performance of ZnO-based ultraviolet photodetectors under varying thermal treatment. IEEE Photonics J 2:784–793
Dong Y, Zou Y, Song J, Zhu Z, Li J, Zeng H (2016) Self-powered fiber-shaped wearable omnidirectional photodetectors. Nano Energy 30:173–179
Xie Y, Wei L, Wei G, Li Q, Wang D, Chen Y, Yan S, Liu G, Mei L, Jiao J (2013) A self-powered UV photodetector based on TiO2 nanorod arrays. Nanoscale Res Lett 8:188
Ling CC, Guo TC, Lu WB, Li XF, Zhu L, Ma M, Xue QZ (2018) Ultrahigh photosensitivity and detectivity of hydrogen-treated TiO2 nanorod array/SiO2/Si heterojunction broadband photodetectors and its mechanism. J Mater Chem C 6:2319–2328
Nallabala NKR, Reddy VRM, Singh VR, Bakash KR, Kumar S, Saha D, Mahendran V, Kummara VK, Guntupalli GK, Vattikuti SVP (2022) Enhanced photoresponse performance in GaN based symmetric type MSM ultraviolet-A and MIS ultraviolet-A to C photodetectors. Sens Actuator A Phys 339:113502
Ji T, Liu Q, Zou R, Zhang Y, Wang L, Sang L, Liao M, Hu J (2017) Enhanced UV-visible light photodetectors with a TiO2/Si heterojunction using band engineering. J Mater Chem C 5:12848–12856
Xie F, Lu H, Xiu X, Chen D, Han P, Zhang R, Zheng Y (2011) Low dark current and internal gain mechanism of GaN MSM photodetectors fabricated on bulk GaN substrate. Solid-State Electron 57:39–42
Ali H, Zhang Y, Tang J, Peng K, Sun S, Sun Y, Song F, Falak A, Wu S, Qian C, Wang M, Zuo Z, Jin K-J, Sanchez AM, Liu H, Xu X (2018) High-responsivity photodetection by a self-catalyzed phase-pure p-GaAs Nanowire. Small 14:1704429
Ravikiran L, Radhakrishnan K, Dharmarasu N, Agrawal M, Wang Z, Bruno A, Soci C, Lihuang T, Siong AK (2016) Responsivity drop due to conductance modulation in GaN metal-semiconductor-metal Schottky based UV photodetectors on Si (111). Semicond Sci Technol 31:095003
Gautam V, Gautam S, Maurya GK, Kandpal K, Singh B, Ganesan R, Kushvaha SS, Kumar P (2022) Investigation of RF sputtered, n-Bi2Se3 heterojunction on p-Si for enhanced NIR optoelectronic applications. Sol Energy Mater Sol Cells 248:112028
Nallabala NKR, Yuvaraj C, Vohra A, Dhamodaran A, Kaleemulla S, Jaswanth A, Mohan KC, Sambasivam S, Netheti VSB, Reddy VRM, Kim WK (2023) Evaluation of photosensing parameters of Au/polystyrene/n-Si heterojunction based self-powered organic broadband photodetectors. Silicon 15:5623–5633
Nallabala NKR, Kushvaha SS, Sangaraju S, Kummara VK (2024) Enhanced self-driven ultraviolet photodetection performance of high-k Ta2O5/GaN heterostructure. Mater Sci Semicond Process 170:107954
Xing J, Wei H, Guo E-J, Yang F (2011) Highly sensitive fast-response UV photodetectors based on epitaxial TiO2 films. J Phys D: Appl Phys 44:375104-1–1375104-5
Funding
The authors Dr. N. Nanda Kumar Reddy thankfully acknowledge the financial support received from DST, SERB, Government of India, Major Research Project No. ECR/2017/002868 and DST-FIST Program-2015 (SR/FST/College-263). The author Dr. Adel El-marghany grateful to the funding received from Researchers Supporting Project No. RSPD2023R667, King Saud University, Riyadh, Saudi Arabia. Further, all the authors are grateful to the technical support received from Dr. N. Vijaya Bhaskar Choudary, Secretary and Correspondent, MITS, Madanapalle-517325, A.P, India.
Author information
Authors and Affiliations
Contributions
N.K.R.N, S.S.K, M.V.S and V.R.M.R: Writing-original draft, Project administration, Methodology, Funding acquisition. S.K, M.R.R. A.E, S.S, M.C.S. and P.R: Formal analysis, Resources and Conceptualization. V.K: Software and Data curation. All the authors reviewed the entire manuscript.
Corresponding authors
Ethics declarations
Ethics Approval
This manuscript is not submitted to other journals for simultaneous consideration and is the original work.
Consent to Participate/for Publication
All the authors reviewed the submitted manuscript and agreed with the policies of the journal ‘Silicon’.
Competing Interests
The authors declare no competing interests.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Electronic Supplementary Material
Below is the link to the electronic supplementary material.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Nallabala, N.K.R., Kaleemulla, S., Reddy, M.R. et al. Highly Performing MSM Type Ag/n-titanium Dioxide Nanotubes/p-Si Heterojunction Based Ultraviolet-A Photodetectors. Silicon 16, 2815–2826 (2024). https://doi.org/10.1007/s12633-024-02877-1
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12633-024-02877-1