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Development and evaluation of a Venus flytrap-inspired microrobot Liwei ShiShuxiang Guo Technical Paper 17 March 2015 Pages: 1949 - 1958
Silicon micro-cantilever chemical sensors fabricated in double-layer silicon-on-insulator (SOI) wafer Chuanzhao ChenYing ChenXinxin Li Technical Paper 21 March 2015 Pages: 1959 - 1965
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A piezoelectric inertia rotary actuator based on asymmetric clamping mechanism Ji Jie MaJian Ming WenPing Zeng Technical Paper 14 July 2015 Pages: 1975 - 1981
Novel combined through-wafer-groove fabrication approach and its application in wafer level packaging of GaAs CCD Jiaotuo YeShuangfu WangLe Luo Technical Paper 08 April 2015 Pages: 1983 - 1989
Microinjection moulding of miniaturised polymeric ortho-planar springs Sol-Yi HanWook-Bae Kim Technical Paper 23 April 2015 Pages: 1991 - 1999
Modelling and simulation of forming process of the lithographically fabricated out-of-plane microlens using a cellular automata method Zhengyu MiaoWanjun Wang Technical Paper 01 April 2015 Pages: 2001 - 2009
Microfabrication of a dual-mode rectangular waveguide filter Junping DuanBinzhen ZhangWanjun Wang Technical Paper 08 April 2015 Pages: 2011 - 2016
Analysis of intrinsic damping in vibrating piezoelectric microcantilevers Huacheng QiuAbdallah AbabnehHelmut Seidel Technical Paper 31 March 2015 Pages: 2017 - 2025
A flexible dry electrode based on APTES-anchored PDMS substrate for portable ECG acquisition system Ying MengZhenbo LiJiapin Chen Technical Paper 19 March 2015 Pages: 2027 - 2034
The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes Zhanwen XiYun CaoJiong Wang Technical Paper 31 March 2015 Pages: 2035 - 2042
Novel in-line WAT processing of 55 nm CIS product and effect of process waiting time on void growth at interface of SiCN with copper capping layer Hsiao Chi LouHung Lin ChenDavid Wei Zhang Technical Paper 28 March 2015 Pages: 2043 - 2049
Preliminary mechanical analysis of an improved amphibious spherical father robot Yanlin HeLiwei ShiZhe Wang Technical Paper 19 April 2015 Pages: 2051 - 2066
A microfluidic system for liquid colour-changing glasses with shutter shade effect Songjing LiMin ZhangBoxun Nie Technical Paper 31 March 2015 Pages: 2067 - 2075
On-chip whole blood plasma separator based on microfiltration, sedimentation and wetting contrast Sanghoon ParkRoxana ShabaniHyoung Jin Cho Technical Paper 21 August 2015 Pages: 2077 - 2085
Effect of mold stiffness on surface flatness of mold-pressed glass Hiroshi IkedaHaruya KasaJunji Nishii Technical Paper 03 April 2015 Pages: 2087 - 2091
Characterization of a novel antibody immobilization combining protein G with parylene-H for surface plasmon resonance immunosensors Eun Jung ShinWon Gu LeeSang Jun Moon Technical Paper 15 May 2015 Pages: 2093 - 2099
Ultrahigh precision low-cost pinpointed SiO2 patterns nanofabrication by using traditional MEMS fabrication processes Pengfei DaiHonglu ZhangTie Li Technical Paper 21 June 2015 Pages: 2101 - 2107
Micromolding fabrication of microresistors with a composite of carbon nanotubes and SU-8 polymer and the application in Wilkinson power divider Junping DuanWanjun WangJianli Cui Technical Paper 29 April 2015 Pages: 2109 - 2116
Layered axial force coupled membrane based metal contact single-pole quad-throw RF MEMS switch: design, RF performance and mechanical modeling Tejinder SinghNavjot Kaur Technical Paper 19 July 2015 Pages: 2117 - 2123
Thermomechanical behavior of bulk NiTi shape-memory-alloy microactuators based on bimorph actuation Alaa AbuZaiterMarwan NafeaMohamed Sultan Mohamed Ali Technical Paper 07 August 2015 Pages: 2125 - 2131
Optimization for etching shallow ridge and trench profiles on silicon based on continuous etching process in ICPRIE system Lei WanXuan LiTing Mei Technical Paper 24 June 2015 Pages: 2133 - 2139
Design and analysis a novel RF MEMS switched capacitor for low pull-in voltage application Zhongliang DengHao WeiJun Gan Technical Paper 03 July 2015 Pages: 2141 - 2149
Study on breakdown to nano TFT loaded by GPa order mechanical stress Tieying MaYidong Liu Technical Paper 18 March 2016 Pages: 2151 - 2157