Process development of a novel wafer level packaging with TSV applied in high-frequency range transmission Xiao ChenJiajie TangLe Luo Review Paper 18 December 2012 Pages: 483 - 491
Investigations into mixing of fluids in microchannels with lateral obstructions Pankaj Kumar SahuAakash GoliaAshis Kumar Sen Technical Paper 06 July 2012 Pages: 493 - 501
An analytical study of the effect of a support geometry on frequency shift and support loss of piezoelectric ring-shaped resonators for healthcare and environmental applications Dong F. WangTakahisa SagawaRyutaro Maeda Technical Paper 31 July 2012 Pages: 503 - 508
Investigations on characteristics of micro/meso scale gas foil journal bearings for 100–200 W class micro power systems using first order slip velocity boundary conditions and the effective viscosity model Skylab P. BhoreAshish K. Darpe Technical Paper 11 August 2012 Pages: 509 - 523
Electroplated nickel based micro-machined disk resonators for high frequency applications Ritesh Ray ChaudhuriTarun K. Bhattacharyya Technical Paper 15 August 2012 Pages: 525 - 535
Fabrication of TiN-based three-terminal nano mechanical relays using nanoimprint technology Y. J. ChangD. Y. LiuC. L. Kuo Technical Paper 10 August 2012 Pages: 537 - 545
Mechanical strengthening of Si cantilevers by chemical wet etching Mitsuhiro ShikidaTatsuya HasegawaKazuo Sato Technical Paper 12 August 2012 Pages: 547 - 553
Surface state defining factors as key to the strength of ceramic micro parts Marcus MüllerFatih A. ÇetinelRegina Knitter Technical Paper 30 August 2012 Pages: 555 - 561
Optimization of design and characterization of a novel micro-pumping system with peristaltic motion Rishi KantHimanshu SinghShantanu Bhattacharya Technical Paper 19 September 2012 Pages: 563 - 575
A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications Chih-Hsien HuangJunjie YaoJun Zou Technical Paper 13 September 2012 Pages: 577 - 582
An analytical coupling coefficient for MEMS tunable silicon nanowire waveguide coupler devices Y. AkihamaK. Hane Technical Paper 14 September 2012 Pages: 583 - 589
A low power micro fluxgate sensor with improved magnetic core Chong LeiJian LeiYong Zhou Technical Paper 14 September 2012 Pages: 591 - 598
Immersion effect of fluoride liquid into cavities of negative mold in thermal imprint Harutaka MekaruHiroshi Hiroshima Technical Paper 29 September 2012 Pages: 599 - 608
Using silicon molds for ultrasonic embossing on Polymethyl Methacrylate (PMMA) substrates Na QiYi LuoLiding Wang Technical Paper 05 October 2012 Pages: 609 - 616
Characterization of out-of-plane cone metal microneedles and the function of transdermal delivery Jun ZhuQi ShenDi Chen Technical Paper 04 October 2012 Pages: 617 - 621
Generating different profiles of gradient concentrations inside a gel-filled chamber: design and simulation Masoomeh TehranirokhAbbas Z. KouzaniJagat R. Kanwar Technical Paper 05 October 2012 Pages: 623 - 628
Hot embossing of polymer nanochannels using PMMA moulds Junshan LiuXingxing JinLiding Wang Technical Paper 04 October 2012 Pages: 629 - 634
Impact of alcohol additives concentration on etch rate and surface morphology of (100) and (110) Si substrates etched in KOH solutions Krzysztof P. RolaIrena Zubel Technical Paper Open access 06 October 2012 Pages: 635 - 643