1. Special issue on design, test, integration and packaging of MEMS/MOEMS, 2011

   • Bernard Courtois
   • Bernd Michel

   Editorial 14 September 2012 Pages: 1759 - 1759

   

2. Fabrication of aluminium doped zinc oxide piezoelectric thin film on a silicon substrate for piezoelectric MEMS energy harvesters

   • Aliza Aini Md Ralib
   • Anis Nurashikin Nordin
   • Raihan Othman

   Technical Paper 05 July 2012 Pages: 1761 - 1769

   

3. An electromechanical model for a clamped–clamped beam type piezoelectric transformer

   • Chia-Che Wu
   • Chi-Shao Chen

   Technical Paper 18 April 2012 Pages: 1771 - 1778

   

4. Dynamic behavior of resonant piezoelectric cantilever as liquid level detection sensor

   • M. Maroufi
   • M. Shamshirsaz

   Technical Paper 18 March 2012 Pages: 1779 - 1789

   

5. Microstructured silicon membrane with soft suspension beams for a high performance MEMS microspeaker

   • Iman Shahosseini
   • Elie Lefeuvre
   • Guy Lemarquand

   Technical Paper 14 March 2012 Pages: 1791 - 1799

   

6. Multiple-output MEMS DC/DC converter: a system modeling study

   • A. Chaehoi
   • M. Begbie
   • L. Li

   Technical Paper 14 June 2012 Pages: 1801 - 1806

   

7. Study of black silicon obtained by cryogenic plasma etching: approach to achieve the hot spot of a thermoelectric energy harvester

   • K. N. Nguyen
   • D. Abi-Saab
   • T. Bourouina

   Technical Paper 28 March 2012 Pages: 1807 - 1814

   

8. Fabrication and characterization of a fused silica-based optical waveguide with femtosecond fiber laser pulses

   • Jaw-Luen Tang
   • Chien-Hsing Chen
   • Wei-Te Wu

   Technical Paper 15 June 2012 Pages: 1815 - 1821

   

9. Interfacial configurations and mixing performances of fluids in staggered curved-channel micromixers

   • Jyh Jian Chen
   • Yi Shiang Shie

   Technical Paper 21 March 2012 Pages: 1823 - 1833

   

10. Fabrication methods for the manufacture of sapphire microparts

    • David M. Allen
    • Roxana Redondo
    • Maximilien Dany

    Technical Paper 25 March 2012 Pages: 1835 - 1841

    

11. Study of crescent shaped alignment marks applicable to self-alignment of micro-parts with and without positive and negative poles

    • Dong F. Wang
    • Shouhei Shiga
    • Ryutaro Maeda

    Technical Paper 17 February 2012 Pages: 1843 - 1848

    

12. Fabrication of a high aspect ratio nanoporous array on silicon

    • Jing-Yu Ho
    • Kang J. Chang
    • Gou-Jen Wang

    Technical Paper 18 April 2012 Pages: 1849 - 1856

    

13. Hot embossing of thermoplastic multilayered stacks

    • A. Kolew
    • M. Heilig
    • M. Worgull

    Technical Paper 22 April 2012 Pages: 1857 - 1861

    

14. SU-8-based rapid tooling for thermal roll embossing

    • Khaled Metwally
    • Laurent Robert
    • Chantal Khan-Malek

    Technical Paper 14 June 2012 Pages: 1863 - 1869

    

15. Polymer-based fabrication techniques for enclosed microchannels in biomedical applications

    • Annabel Krebs
    • Thorsten Knoll
    • Thomas Velten

    Technical Paper 10 April 2012 Pages: 1871 - 1877

    

16. Particle focusing in a contactless dielectrophoretic microfluidic chip with insulating structures

    • Chun-Ping Jen
    • Nikolay A. Maslov
    • Fei-Bin Hsiao

    Technical Paper 31 March 2012 Pages: 1879 - 1886

    

17. A microfabricated module for isolating cervical carcinoma cells from peripheral blood utilizing dielectrophoresis in stepping electric fields

    • Chun-Ping Jen
    • Ho-Hsien Chang
    • Kuang-Hung Chen

    Technical Paper 10 April 2012 Pages: 1887 - 1896

    

18. Passive piezoelectric DC sensor applicable to one-wire or two-wire DC electric appliances for end-use monitoring of DC power supply

    • Dong F. Wang
    • Kohei Isagawa
    • Ryutaro Maeda

    Technical Paper 27 May 2012 Pages: 1897 - 1902

    

19. Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force

    • Yu-Ting Wang
    • Tien-Chen Hu
    • Ming-Tzer Lin

    Technical Paper 13 March 2012 Pages: 1903 - 1908

    

20. Linear energy control of laser drilling and its application in the repair of TFT-LCD bright pixels

    • Taco Chen
    • Ming-Tzer Lin
    • Kuan-Jung Chung

    Technical Paper 28 June 2012 Pages: 1909 - 1915

    

21. Measurement of electrical properties of materials under the oxide layer by microwave-AFM probe

    • Lan Zhang
    • Yang Ju
    • Akifumi Fujimoto

    Technical Paper 27 April 2012 Pages: 1917 - 1922

    

22. Mode localization analysis and characterization in a 5-beam array of coupled nearly identical micromechanical resonators for ultra-sensitive mass detection and analyte identification

    • Dong F. Wang
    • Keisuke Chatani
    • Ryutaro Maeda

    Technical Paper 09 May 2012 Pages: 1923 - 1929

    

23. The influence of adhesive materials on chip-on-board packing of MEMS microphone

    • Cheng-Hsin Chuang
    • Yi-Hsuan Huang
    • Shin-Li Lee

    Technical Paper 19 June 2012 Pages: 1931 - 1940