Theoretical and experimental investigation on electrochemical micromachining Zhaoyang ZhangDi ZhuMinghuan Wang Technical Paper 05 January 2007 Pages: 607 - 612
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation Yongquan WangHualing ChenXueming He Technical Paper 04 January 2007 Pages: 613 - 624
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibration C. FengYa-Pu ZhaoD. Q. Liu Technical Paper 15 November 2006 Pages: 625 - 633
Mathematical analysis and test of an electrostatically actuated micro-power relay S. J. JeongD. E. LeeW. Wang Technical Paper 01 December 2006 Pages: 635 - 645
Head–disk spacing measurement based on Michelson interferometry using white light illumination Y. HeH. ZhangK. Fukuzawa Technical Paper 04 November 2006 Pages: 647 - 655
A new technology for microfluidic structures preparation based on a photoimageable ceramic Iwona WyżkiewiczNatalia LewandowskaArtur Dybko Technical Paper 15 November 2006 Pages: 657 - 661
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridges Yunqiang LiPackirisamy MuthukumaranRama B. Bhat Technical Paper 15 November 2006 Pages: 663 - 675
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumps A. T. Al-HalhouliM. I. KilaniS. Büttgenbach Technical Paper 04 January 2007 Pages: 677 - 687
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental results Thomas G. Hayes IVBharat Bhushan Technical Paper 10 February 2007 Pages: 689 - 699
3D-feature-based structure design for silicon fabrication of micro devices Yang LiuPingyu JiangGuanghui Zhou Technical Paper 05 January 2007 Pages: 701 - 714
Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors Ghader RezazadehFaraz KhatamiAhmadali Tahmasebi Technical Paper 04 January 2007 Pages: 715 - 722
Eutectic bonding of Al-based high aspect ratio microscale structures Fanghua MeiJ. JiangW. J. Meng Technical Paper 16 January 2007 Pages: 723 - 730