Structure, properties, and MEMS and microelectronic applications of vanadium oxides Robert B. DarlingShiho Iwanaga OriginalPaper 22 October 2009 Pages: 531 - 542
RF sputtering: A viable tool for MEMS fabrication Sudhir ChandraVivekanand BhattRavindra Singh OriginalPaper 22 October 2009 Pages: 543 - 556
Microstructures using RF sputtered PSG film as a sacrificial layer in surface micromachining Vivekanand BhattSudhir ChandraChatar Singh OriginalPaper 22 October 2009 Pages: 557 - 562
A new approach to integrate PLZT thin films with micro-cantilevers Ravindra SinghT. C. GoelSudhir Chandra OriginalPaper 22 October 2009 Pages: 563 - 572
Biomicrofluidics: Recent trends and future challenges Tamal DasSuman Chakraborty OriginalPaper 22 October 2009 Pages: 573 - 590
Bio-functionalization of silicon nitride-based piezo-resistive microcantilevers Nitin S. KaleManoj JoshiV. Ramgopal Rao OriginalPaper 22 October 2009 Pages: 591 - 597
Of light, of MEMS: Optical MEMS in telecommunications and beyond F. CholletH. B. LiuA. Q. Liu OriginalPaper 22 October 2009 Pages: 599 - 606
Fabrication of polymer-based reflowed microlenses on optical fibre with control of focal length using differential coating technique Mohammed AshrafFranck CholletChun Yang OriginalPaper 22 October 2009 Pages: 607 - 613
A novel MOEMS pressure sensor: Modelling and experimental evaluation Patricia M. NievaJim KuoAbdullah Syed OriginalPaper 22 October 2009 Pages: 615 - 623
An X band RF MEMS switch based on silicon-on-glass architecture M. S. GiridharAshwini JambhalikarT. K. Alex OriginalPaper 22 October 2009 Pages: 625 - 631
Design and characterization of in-plane MEMS yaw rate sensor K. P. VenkateshNishad PatilRudra Pratap OriginalPaper 22 October 2009 Pages: 633 - 642
Composite Si/PS membrane pressure sensors with micro and macro-porous silicon L. SujathaEnakshi Bhattacharya OriginalPaper 22 October 2009 Pages: 643 - 650
Effect of metal coating and residual stress on the resonant frequency of MEMS resonators Ashok Kumar PandeyK. P. VenkateshRudra Pratap OriginalPaper 22 October 2009 Pages: 651 - 661
System integration design in MEMS — A case study of micromachined load cell Shishir KumarK. P. VenkateshS. P. Madhavi OriginalPaper 22 October 2009 Pages: 663 - 675
Sensors and packages based on LTCC and thick-film technology for severe conditions C. JacqTh. MaederP. Ryser OriginalPaper 22 October 2009 Pages: 677 - 687