Abstract
This paper presents a novel MOEMS (Micro Opto Electromechanical Systems) pressure sensor suitable for localized precision measurements in high temperature environments. The sensor is based on a micromachined Fabry-Perot device (MFPD) that uses a thin film microcantilever beam as the top mirror and a silicon substrate as the bottom mirror of the optical microcavity. The major effect that the viscosity and density of the air surrounding the MFPD have on the viscous damping provides the mechanism for the detection of the pressure. A major advantage of this configuration is that there is no need for a sealed microcavity since the air is trapped by the viscous damping effects. The sensor has been tested up to 90 psi and pressure sensitivities of about 0·04%/psi with a MFPD sensor with a resonant frequency of about 46·7 kHz have been measured.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Eklund E, Shkel A 2005 Factors affecting the performance of micromachined sensors based on Fabry-Perot interferometry. J. Micromechanics Microengineering 15: 1770–1776
Goetz J 2000 Sensors that can take the heat. Sensors Magazine 20–38 June 2000
Haueis M, Dual J, Cavalloni C, Gnielka M, Buser R 2001 A fully packaged single crystalline resonant force sensor. J. Micromechanics and Microengineering 11: 514–521
Meirovitch L 1986 Elements of vibration analysis, (New York: McGraw Hill) 2nd. Ed. Chapter 5
Nieva P, McGruer N, Adams G 2006 Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications. J. Micromechanics and Microengineering 16:2618–2631
Nieva P M, Adams G G, McGruer N E 2007 Design and modelling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure and temperature. In Proc. of Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, (San Diego: CA, USA) Vol. 6529, pp. 23
Suster M, Ko W, Young D 2004 An optically powered wireless telemetry module for high-temperature MEMS sensing and communication. J. Microelectromechanical Systems 13(3): 536–541
Turner R C, Fuierer P A, Newnham R E, Shrout T R 1994 Materials for high temperature acoustic and vibration sensors: A review. Applied Acoustics 41: 299–324
Wang W, Lin R, Guo D, Sun T 2004 Development of a novel Fabry-Perot pressure microsensor. Sensors and Actuators A116: 59–65
Xiao-qi N, Ming W, Xu-xing C, Yi-xian G, Hua R 2006 An optical fibre MEMS pressure sensor using dual-wavelength interrogation. Meas. Sci. Technol. 17: 2401–2404
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Nieva, P.M., Kuo, J., Chiang, SH.W. et al. A novel MOEMS pressure sensor: Modelling and experimental evaluation. Sadhana 34, 615–623 (2009). https://doi.org/10.1007/s12046-009-0039-4
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12046-009-0039-4