Abstract
A non-linear hyperbolic conservation law, used to model the Ion etching process in a single material, is solved using an Essentially Non-Oscillatory (E.N.O.) scheme with a Runge Kutta time stepping routine. The model is extended to deal with a two material configuration which is separated by a moving boundary. The numerical solution of this problem involves the introduction of a co-ordinate stretching to deal with physical restrictions at the moving boundary. A convergence result for the numerical algorithm is shown. Numerical solutions to etched profiles in a single and double material configuration are presented.
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© 1993 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig/Wiesbaden
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Sherwin, S.J., Orszag, S.A., Barouch, E., Karniadakis, G.E. (1993). Application of an E.N.O. Scheme to Simulate the Ion Etching Process. In: Donato, A., Oliveri, F. (eds) Nonlinear Hyperbolic Problems: Theoretical, Applied, and Computational Aspects. Notes on Numerical Fluid Mechanics (NNFM), vol 43. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-87871-7_65
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DOI: https://doi.org/10.1007/978-3-322-87871-7_65
Publisher Name: Vieweg+Teubner Verlag
Print ISBN: 978-3-528-07643-6
Online ISBN: 978-3-322-87871-7
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