Abstract
The standard method for producing films by laser-assisted methods, Pulsed Laser Deposition (PLD) will be reviewed. The films considered are usually inorganic films, but also films of organic materials have been produced. Also the deposition of organic films by MAPLE (Matrix Assisted Pulsed Laser Evaporation), in which the target is replaced by a frozen matrix containing a few per cent film material, will be reviewed.
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References
Eason, R. ed. (2007) Pulsed Laser Deposition of Thin Films, Wiley, Hoboken, NJ, 1–682
Phipps, C. ed. (2007) Laser Ablation and Its Applications, Springer, New York, 1–586
Gorbunoff, A. (2002) Laser-Assisted, Fortschritt-Berichte; Reihe 9, VDI 357, VDI Verlag, Düsseldorf, 1–229
Miller, J., and Haglund, R., eds. (1998) Laser Ablation and Desorption, Methods of Experimental Physical Sciences, Academic, New York, vol 30, pp. 1–647
Lippert, T. (2004) Adv. Polym. Sci. 168, 51–246
Bäuerle, D. (2000) Laser Processing and Chemistry, 3rd edition, Springer, Berlin, pp. 1–788
Piqué, A. (2007) Deposition of polymers and biomaterials using the matrix-assisted pulsed laser evaporation (MAPLE) process, in: Pulsed Laser Deposition of Thin Films, Eason, R., ed., Wiley, Hoboken, NJ, 63–83
Bubb, D., McA, D., and Haglund, Jr., R. (2007) Resonant infrared pulsed laser ablation and deposition of thin polymer films, in: Pulsed Laser Deposition of Thin Films, Eason, R., ed., Wiley, Hoboken, NJ, 35–61
Chrisey, D., Pique, A., McGill, R., Horwitz, J., Ringeisen, B., Bubb, D., and Wu, P. (2003) Chem. Rev. 103, 553–576
Thestrup, B., Schou, J., Nordskov, A., and Larsen, N. (1999) Appl. Surf Sci. 142, 248–252
Schou, J. (2006) Laser beam-solid interactions: fundamental aspects, in: Materials Surface Processing by Directed Energy Techniques, Pauleau, Y., ed., Elsevier, Amsterdam, 35–66
Cheung, J., and Horwitz, J. (1992) Mater. Res. Bull. XVLL 2, 30–36
Willmott, P., Manoravi, P., and Holliday, K. (2000) Appl. Phys. A 70, 425–429
Ohkubo, I., Matsumoto, Y., Ueno, K. Chikyow, T., Kawasaki, M., and Koinuma, H. (2003) J. Cryst. Growth 247, 105–109
Rijnders, G., and Blank, D. (2007) Pulsed laser deposition of metals on self-assembled monolayers, in: Pulsed Laser Deposition of Thin Films, Eason, R., ed., Wiley, Hoboken, NJ, 177–190
Willmott, P. (2007) Quasicrystalline thin films, in: Pulsed Laser Deposition of Thin Films, Eason, R., ed., Wiley, Hoboken, NJ, 633–648
Lowndes, D. (1998) Growth and doping of compound semiconductor films by pulsed laser ablation, in: Laser Ablation and Desorption, Experimental Methods in the Physical Sciences, Miller, J.C., and Haglund, R.F., eds., Academic, New York, 30, 475–571
O’Mahony, D., and Lunney, J. (2007) Group III nitride growth, in: Pulsed Laser Deposition of Thin Films, Eason, R., ed., Wiley, Hoboken, NJ, 291–312
Anisimov, S., Luk&yanchuk, B., and Luches, A. (1996) Appl. Surf. Sci. 96–98, 24–32
Toftmann, B., Schou, J., and Lunney, J. (2003) Phys. Rev. B 48, 104101-1–5
Schou, J., Amoruso, S., and Lunney, J. (2007) Plume dynamics, in: Laser Ablation and Its Applications, Phipps, C.R., ed., Springer, New York, 67–95
Chrisey; D., and Hubler, G., ed. (1994) Pulsed Laser Deposition, Wiley, New York, 1–613
Willmott, P., and Huber, J. (2000) Rev. Mod. Phys. 72, 315–328
Amoroso, S. (1999) Appl. Phys. A 69, 323–332
Amoroso, S., Schou, J., and Lunney, J. (2006) Europhys. Lett. 76, 436–442
Hansen, T., Schou, J., and Lunney, J. (1998) Appl. Phys. Lett., 72, 1829–1831
Toftmann, B., Schou, J., Hansen, T., and Lunney, J. (2000) Phys. Rev. Lett. 84, 3998–4001
Willmott, P. (2004) Prog. Surf. Sci. 76, 163–217
Piqué, A., Kim, H., and Arnold, C. (2007) Laser forward transfer of electronic and power generating materials, in: Laser Ablation and Its Applications, Phipps, C.R., ed., Springer, New York, 339–373
Piqué, A, McGill, R., Chrisey, D., Leonhardt, D., Maina, T., Spargo, B., Callahan, J., Vachet, R., Chung, R., and Bucaro, M. (1999) Thin Solid Films 355–356, 536–341
Karas, M. (1993) Mat. Fys. Medd Dan. Vid Selsk 43, 623–641
Toftmann, B., Papantonakis, M.R., Auyeung, RC.Y., Kim, W., O’Malley, S.M., Bubb, D.M., Horwitz, J.S., Schou, J., Johansen, P.M., and Haglund, R.F. (2004) Thin Solid Films 453–454, 177–181
Toftmann, B., Rodrigo, K., Schou. J., and Pedrys, R. (2005) Appl. Surf. Sci. 247, 211–216
Mercado, A., Allmond, C., Hoekstra, J., and Fitz-Gerald, J. (2005) Appl. Phys. A 81, 591–599
Rodrigo, K., Toftmann, B., Schou, J., and Pedrys, R. (2004) Chem. Phys. Lett. 399, 368–372
Rodrigo, K., Czuba, P., Toftmann, B., Schou, J., and Pedrys, R. (2006) Appl. Surf. Sci. 252, 4824–4828
Ringeisen, B., Callahan, J., Wu, P., Piqué, A., Spargo, B., McGill, R., Bucaro, M., Kim, H., Bubb, D., and Chrisey, D. (2001) Langmuir 17, 3472–3479
Purice, A., Schou, J., Kingshott, P., and Dinescu, M. (2007) Chem. Phys. Lett. 435, 350–353
Dreisewerd, K. (2003) Chem. Rev. 103, 395–425
Schou, J. (1987) Nucl. Instrum. Methods B 27, 188–200
Baragiola, R., Vidal, R., Svendsen, W., Schou, J., Shi, M., Bahr, D., and Atteberrry, C. (2003) Nucl. Instrum. Methods B 209, 294–303
Zhigilei, L., and Garrison, B. (2000) J. Appl. Phys. 88, 1281–1298
Chen, Z., Bogaerts, A., and Vertes, A. (2007) Appl. Phys. Lett. 89, 041503-1–3
Urbassek, H. M., and Sibold, D. (1993) Phys. Rev. Lett. 70, 1886–1889
Puretzky, A., Geohegan, D., Hurst, G., Buchanan, M., and Luk’yanchuk, B. (1999) Phys. Rev. Lett. 83, 444–447
Frycek, R., Jelinek, M., Kocourek, F., Vrnata, M., Myslik, V., and Vrbová, M. (2006) Thin Solid Films 495, 308–311
Leveugle. E., Zhigilei, L., Sellinger, A., and Fitz-Gerald, J. (2007) Appl. Surf. Sci. 253, 6456–6460
Leveugle. E., and Zhigilei, L. (2007) J. Appl. Phys. 102, 074914-1–19
Sack, N., and Baragiola, R. (1993) Phys. Rev. B 48, 9977–9978
Focsa, C., and Destombes, J. (2001) Chem. Phys. Lett. 347, 390–396
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Schou, J. (2008). Fundamentals of Laser-Assisted Fabrication of Inorganic and Organic Films. In: Vaseashta, A., Mihailescu, I.N. (eds) Functionalized Nanoscale Materials, Devices and Systems. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-8903-9_15
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DOI: https://doi.org/10.1007/978-1-4020-8903-9_15
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