Skip to main content
SpringerLink
Log in

Simulation of formation of nanostructures during sputtering of the surface by ion bombardment

  • Modeling of Production Processes and Elements of Equipment
  • Published:
Russian Microelectronics Aims and scope Submit manuscript

Abstract

The results of the investigation of a spatially nonlocal model of surface erosion by the ion bombardment are presented. It is shown that the equilibrium states of the surface in the scope of the model are the plane and a terrace-like profile. Critical values of the bombardment angle and surface diffusion, at which the equilibrium states are lost to perturbations in the form of traveling waves, are determined. The obtained results allow us to explain the main form of the surface topography formed during ion sputtering of the surface, and to determine their parameters, the existence region, and the sequence of appearance.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Smirnov, V.K., Kibalov, D.S., Orlov, O.M., and Graboshnikov, V.V., Technology for Nanoperiodic Doping of a Metal-Oxide-Semiconductor Field-Effect Transistor Channel Using a Self-Forming Wave-Ordered Structure, Nanotecnology, 2003, vol. 14, pp. 709–715.

    Article  Google Scholar 

  2. Sigmund, P., A Mechanism of Surface Micro-Roughening by Ion Bombardment, J. Mater. Sci., 1973, vol. 8, pp. 1545–1553.

    Article  Google Scholar 

  3. Bradley, R.M. and Harper, J.M.F., Theory of Ripple Topography Induced by Ion Bombardment, J. Vac. Sci. Technol. A, 1988, vol. 6, pp. 2390–2395.

    Article  Google Scholar 

  4. Carter, G., The Physics and Applications of Ion Beam Erosion, J. Phys. D: Appl. Phys, 2001, vol. 34 R.

  5. Birkgan, S.E., Bachurin, V.I., Rudy, A.S., and Smirnov, V.K., Nanoscale Model of Surface Erosion by Ion Bombardment, Rad. Eff. & Def. in Sol., 2004, vol. 159, no. 6, pp. 319–329.

    Google Scholar 

  6. Rudyi, A.S. and Bachurin, V.I., A Spatially Nonlocal Model of Erosion of the Surface by Ion Bombardment, Izv. Ross. Akad. Nauk, Ser. Fiz., 2008, vol. 72, no. 5, pp. 624–629.

    Google Scholar 

  7. Kibalov, D.S., Wave-Like Nanostructures on the Surface of Silicon Initiated by the Ion Bombardment, Extended Abstract of the Doctoral (Phys.-Math.) Dissertation, Moscow, 2005.

  8. Sobolev, S.L., Nekotorye primeneniya funktsional’nogo analiza v matematicheskoi fizike (Certain Applications of the Functional Analysis in Mathematical Physics, LGU, 1950, p. 256.

Download references

Author information

Authors and Affiliations

  1. Yaroslavl State University, Sovetskaya ul. 14, Yaroslavl, 150000, Russia

    A. S. Rudyi, A. N. Kulikov & A. V. Metlitskaya

Authors
  1. A. S. Rudyi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. N. Kulikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Metlitskaya
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. S. Rudyi.

Additional information

Original Russian Text © A.S. Rudyi, A.N. Kulikov, A.V. Metlitskaya, 2011, published in Mikroelektronika, 2011, Vol. 40, No. 2, pp. 109–118.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Rudyi, A.S., Kulikov, A.N. & Metlitskaya, A.V. Simulation of formation of nanostructures during sputtering of the surface by ion bombardment. Russ Microelectron 40, 98–107 (2011). https://doi.org/10.1134/S1063739711020089

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063739711020089

Keywords

Search

Navigation