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An analytical study of the effect of a support geometry on frequency shift and support loss of piezoelectric ring-shaped resonators for healthcare and environmental applications

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Abstract

Ring-shaped resonators with one support have been designed in this work. The ring-shaped resonator reacts with a mass perturbation to provide eigenstate or frequency shifts which could transfer to electrical signals by piezoelectric effect. The aforementioned ring-shaped resonator is mainly comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on the silicon-on-insulator wafer and expected to be a contour mode. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the theoretical analysis was conducted by ANSYS from two aspects including: (a) the effect of support geometry on frequency shift and support loss (from view point of vibration mode shape); and (b) the mass application methodology. It is found that low-amplitude vibration area is smaller at narrow support, and frequency shift of trapezoid support is higher than that of rectangle support.

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Acknowledgments

This research is partly supported by the Japan Society for the Promotion of Science (JSPS) through the “Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program),” initiated by the Council for Science and Technology Policy (CSTP). This work is also managed and supported by MEMS/Nanotech Inter-University Networking (MIN) steered by the Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME). Special thanks are also given to Dr. Peck Cheng Lim at Singapore Institute of Manufacturing Technology (SIMTech) for useful discussions and continuous encouragement.

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Authors and Affiliations

  1. Micro Engineering and Micro Systems Laboratory (i-MEMS-Lab), Department of Mechanical Engineering, Faculty of Engineering, Ibaraki University, Hitachi, Ibaraki, 316-8511, Japan

    Dong F. Wang & Takahisa Sagawa

  2. Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, 305-8564, Japan

    Jian Lu & Ryutaro Maeda

Authors
  1. Dong F. Wang
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  2. Takahisa Sagawa
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  3. Jian Lu
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  4. Ryutaro Maeda
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Correspondence to Dong F. Wang.

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Wang, D.F., Sagawa, T., Lu, J. et al. An analytical study of the effect of a support geometry on frequency shift and support loss of piezoelectric ring-shaped resonators for healthcare and environmental applications. Microsyst Technol 19, 503–508 (2013). https://doi.org/10.1007/s00542-012-1632-8

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  • DOI: https://doi.org/10.1007/s00542-012-1632-8

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