Abstract.
The generation of submicron-sized holes on metal surfaces by applying femtosecond UV laser pulses was investigated. Different optical schemes based on a Schwarzschild-type reflective objective were used to reach optimized ablation quality and efficiency in different applications (hole ablation, through-hole drilling, generation of surface patterns consisting of holes, etc.). Submicron-sized holes and hole patterns were ablated onto metal surfaces and drilled through ∼5-μm-thick steel foils with 600-nm diameter on the output side. Using a special optical interferometric method, large-area surface processing of high-conductivity materials in the submicron regime was performed. Combining these techniques with the application of high-repetition-rate ultra-short UV laser sources, large-area sub-μm processing of all kinds of materials in industrial environments is possible.
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Received: 28 February 2002 / Accepted: 12 March 2002 / Published online: 25 October 2002
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Békési, J., Klein-Wiele, JH. & Simon, P. Efficient submicron processing of metals with femtosecond UV pulses . Appl Phys A 76, 355–357 (2003). https://doi.org/10.1007/s00339-002-1820-y
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DOI: https://doi.org/10.1007/s00339-002-1820-y