Abstract
High-rate laser processing of technical grade stainless steel by using high-PRF ultrashort pulse lasers is studied in order to gain deeper insight into material removal for micro fabrication. For this, high-average power picosecond and femtosecond lasers are utilized, providing pulses of tens of MHz repetition rate and output powers of 76 W and 32 W, respectively. For (ultra)fast raster scanning of the laser beam, the laser systems are synchronized with a high-precision galvanometer scanner or rather an in-house developed polygon scan system. The influence of the processing parameters (laser power, pulse energy, pulse repetition rate, pulse duration, and fluence) on the ablation rate, removal efficiency, and throughput are studied. In picosecond laser irradiation of stainless steel, for example, the maximum material removal rate is 5.4 mm3/min, obtained with 76 W average laser power. This is lower than the removal rate of 6.8 mm3/min by using the femtosecond laser beam and 32 W average output power. The varying removal rate is the result of the different removal efficiency of picosecond and femtosecond laser pulses, which was determined in the experimental study of 0.071 mm3/W/min and 0.22 mm3/W/min, respectively, by using identical processing parameters except the pulse duration. Finally, the machining quality of laser processed micro cavities are evaluated by means of surface roughness measurements and SEM micrograph analysis. As a result, the mid-fluence range between 0.4 and 1.5 J/cm2 is identified for ultrashort pulses as most suitable processing regime for micro fabrication with regard to removal efficiency, throughput, and machining quality.
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Acknowledgements
The presented results have been conducted in course of the project ”Innoprofile Transfer—Rapid Micro//Hochrate—Laserbearbeitung” (03IPT506X), funded by the Federal Ministry of Education and Research. The authors gratefully acknowledge Felix Dreisow for his assistance in using the sci-series laser.
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Schille, J., Schneider, L., Hartwig, L., Loeschner, U. (2022). High-Rate Laser Processing of Metals Using High-Average Power Ultrashort Pulse Lasers. In: Hinduja, S., da Silva Bartolo, P.J., Li, L., Jywe, WY. (eds) Proceedings of the 38th International MATADOR Conference. MATADOR 2015. Springer, Cham. https://doi.org/10.1007/978-3-319-64943-6_10
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