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Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

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An Erratum to this article was published on 21 February 2015

Abstract

The certified reference material BAM-L200, a nanoscale stripe pattern for length calibration and specification of lateral resolution, is described. BAM-L200 is prepared from a cross-sectioned epitaxially grown layer stack of AlxGa1−xAs and InxGa1−xAs on a GaAs substrate. The surface of BAM-L200 provides a flat pattern with stripe widths ranging down to 1 nm. Calibration distances, grating periods and stripe widths have been certified by TEM with traceability to the length unit. The combination of gratings, isolated narrow stripes and sharp edges of wide stripes offers plenty of options for the determination of lateral resolution, sharpness and calibration of length scale at selected settings of imaging surface-analytical instruments. The feasibility of the reference material for an analysis of the lateral resolution is demonstrated in detail by evaluation of ToF-SIMS, AES and EDX images. Other applications developed in the community are summarized, too. BAM-L200 fully supports the implementation of the revised International Standard ISO 18516 (in preparation) which is based on knowledge outlined in the Technical Report ISO/TR 19319:2013.

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References

  1. Abbe E (1873) Arch Mikrosk Anat IX:412–468

    Google Scholar 

  2. ISO 22493:2008, Microbeam analysis—Scanning electron microscopy—Vocabulary.

  3. ISO/TR 19319:2013, Surface chemical analysis– Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

  4. Senoner M, Unger W (2013) Surf Interface Anal 45:1313–1316

    Article  CAS  Google Scholar 

  5. Senoner M, Wirth T, Unger W (2010) J Anal At Spectrom 25:1440–1452

    Article  CAS  Google Scholar 

  6. ISO 18516:2006, Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution to be replaced by ISO 18516:2015, Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods.

  7. Senoner M, Wirth T, Unger W, Österle W, Kaiander I, Sellin R, Bimberg D (2004) Surf Interface Anal 36:1423–1426

    Article  CAS  Google Scholar 

  8. Senoner M, Unger W (2007) Surf Interface Anal 39:16–25

    Article  CAS  Google Scholar 

  9. BAM-L200 certificate http://www.rm-certificates.bam.de/de/rmcertificates_media/rm_cert_layer_and_surface/bam_l200e.pdf

  10. Senoner M, Unger WES (2012) J Anal At Spectrom 27(7):1050–1068. doi:10.1039/c2ja30015j

    Article  CAS  Google Scholar 

  11. Whitby JA, Östlund F, Horvath P, Gabureac M, Riesterer J, Utke I, Hohl M, Sedláček L, Jiruše J, Friedli V, Bechelany M, Michler J (2012) Adv Mater Sci Eng, Article ID 180437, 13 pages. doi:10.1155/2012/180437

  12. Kollmer F, Paul W, Krehl M, Niehuis E (2013) Surf Interface Anal 45(1):312–314. doi:10.1002/sia.5093

    Article  CAS  Google Scholar 

  13. Holzlechner G, Kubicek M, Hutter H, Fleig J (2013) J Anal At Spectrom 28:1080–1089. doi:10.1039/c3ja50059d

    Article  CAS  Google Scholar 

  14. Alberts D, von Werra L, Oestlund F, Rohner U, Hohl M, Michler J, Whitby JA (2014) Instrum Sci Technol 42(4):432–445. doi:10.1080/10739149.2013.878843

    Article  CAS  Google Scholar 

  15. Raman SN, Paul DF, Hammond JS, Bomben KD (2011) Microsc Today 19(3):12–15. doi:10.1017/S1551929511000083

    Article  CAS  Google Scholar 

  16. Yadav P, Bouttemy M, Martinez E, Vigneron J, Renault O, Mur P, Munoz D, Etcheberry A, Chabli A (2011) Frontiers of characterization and metrology for nanoelectronics. AIP Conf Proc 1395:113–117. doi:10.1063/1.3657875

    Article  CAS  Google Scholar 

  17. Martinez E, Yadav P, Bouttemy M, Renault O, Borowik Ł, Bertin F, Etcheberry A, Chabli A (2013) S J Electron Spectrosc Relat Phenom 191:86–91. doi:10.1016/j.elspec.2013.11.008

    Article  CAS  Google Scholar 

  18. Senoner M, Wirth T, Unger W, Escher M, Weber N, Funnemann D, Krömker B (2005) J Surf Anal 12:78–82

    CAS  Google Scholar 

  19. Bailly A, Renault O, Barrett N, Desrues T, Mariolle D, Zagone LF, Escher M (2009) J Phys Condens Matter 21:314002, 7pp

    Article  CAS  Google Scholar 

  20. Vila-Comamala J, Jefimovs K, Raabe J, Pilvi T, Fink RH, Senoner M, Maaßdorf A, Ritala M, David C (2009) Ultramicroscopy 109:1360–1364. doi:10.1016/j.ultramic.2009.07.005

    Article  CAS  Google Scholar 

  21. Keskinbora K, Grévent C, Bechtel M, Weigand M, Goering E, Nadzeyka A, Peto L, Rehbein S, Schneider G, Follath R, Vila-Comamala J, Yan H, Schütz G (2013) Opt Express 11755. doi:10.1364/OE.21.011747

  22. Buhr E, Sanftleben N, Klein T, Bergmann D, Gnieser D, Frase CG, Bosse H (2009) Meas Sci Technol 20:084025, 9 pp

    Article  Google Scholar 

  23. Hodoroaba V-D, Motzkus C, Macé T, Vaslin-Reimann S (2014) Microsc Microanal 20:602–612. doi:10.1017/S1431927614000014

    Article  CAS  Google Scholar 

  24. Hodoroaba V-D, Rades S, Unger WES (2014) Surf Interface Anal. doi:10.1002/sia.5426

    Google Scholar 

  25. Machleidt T, Sparrer E, Kapusi D, Franke K-H (2009) Meas Sci Technol 20:084017. doi:10.1088/0957-0233/20/8/084017, 6pp

    Article  Google Scholar 

  26. Cuenat A, Muñiz-Piniella A, Muñoz-Rojo M, Tsoi WC, Murphy CE (2012) Nanotechnology 23:045703. doi:10.1088/0957-4484/23/4/045703, 7pp

    Article  Google Scholar 

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Authors and Affiliations

  1. BAM Bundesanstalt für Materialforschung und -prüfung, 12200, Berlin, Germany

    M. Senoner, H. Rooch, W. Österle, V.-D. Hodoroaba, S. Rades & W. E. S. Unger

  2. Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechntik (FBH), 12489, Berlin, Germany

    A. Maaßdorf

  3. Fachgebiet Mikro- und Feingeräte, Institut für Werkzeugmaschinen und Fabrikbetrieb, Technische Universität Berlin, 10587, Berlin, Germany

    M. Malcher & M. Schmidt

  4. ION-TOF GmbH, 48149, Münster, Germany

    F. Kollmer

  5. Physical Electronics Inc., Chanhassen, MN, 55317, USA

    D. Paul

Authors
  1. M. Senoner
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  2. A. Maaßdorf
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  3. H. Rooch
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  4. W. Österle
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  5. M. Malcher
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  6. M. Schmidt
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  7. F. Kollmer
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  8. D. Paul
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  9. V.-D. Hodoroaba
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  10. S. Rades
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  11. W. E. S. Unger
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Corresponding author

Correspondence to W. E. S. Unger.

Additional information

Published in the topical collection Reference Materials for Chemical Analysis with guest editors Hendrik Emons and Stephen A. Wise.

M. Schmidt deceased on 26 March 2013.

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Senoner, M., Maaßdorf, A., Rooch, H. et al. Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards. Anal Bioanal Chem 407, 3211–3217 (2015). https://doi.org/10.1007/s00216-014-8135-7

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  • DOI: https://doi.org/10.1007/s00216-014-8135-7

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