Skip to main content

Vacuum Deposition

  • Living reference work entry
  • Latest version View entry history
  • First Online:
Handbook of Organic Light-Emitting Diodes

Abstract

Vacuum deposition technologies for organic thin films are described as an essential fabrication technology that has enabled today’s displays and lighting products based on organic light-emitting diodes (OLEDs). Fundamentals behind vacuum thermal evaporation are summarized, and requirements for fabrication of high-end OLED displays are presented. Key engineering and advances employed to meet those requirements are then introduced with examples.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Institutional subscriptions

References

  • Armold MS, McGraw GJ, Forrest SR, Lunt RR (2008) Direct vapor jet printing of three color segment organic light emitting devices for white light illumination. Appl Phys Lett 92:053301

    Article  ADS  Google Scholar 

  • Baldo M, Deutsch M, Burrows P, Gossenberger H, Gerstenberg M, Ban V, Forrest S (1998) Organic vapor phase deposition. Adv Mater 10(18):1505

    Article  Google Scholar 

  • Chapman S, Cowling TG (1990) The mathematical theory of non-uniform gases, 3rd edn. Cambridge University Press, Cambridge, UK

    MATH  Google Scholar 

  • Chen S, Kwok HS (2012) Color filter pixel arrangement for improving the color gamut of AMOLED microdisplay. SID Symp Dig Tech Pap 43:1484–1487

    Article  Google Scholar 

  • Cho YJ, Yook KS, Lee JY (2015) Cool and warm hybrid white organic light emitting diode with blue delayed fluorescent emitter both as blue emitter and triplet host. Sci Rep 5:7859

    Article  ADS  Google Scholar 

  • Hatwar TK, Spindler JP, Kondakova M, Giesen D, Deaton J, Vergas JR (2010) Hybrid tandem white OLEDs with high efficiency and long life-time for AMOLED displays and solid state lighting. SID Symp Dig Tech Pap 41:778–781

    Article  Google Scholar 

  • Heo J, Min H, lee M (2015) Laser micromachining of permalloy for fine metal mask. Int J Precis Eng Manuf-Green Technol 2:225–230

    Article  Google Scholar 

  • Kim NH, Kim YH, Yoon JA, Lee SY, Ryu DH, Wood R, Moon CB, Kim WY (2013a) Color optimization of single emissive white OLEDs via energy transfer between RGB fluorescent dopants. J Lumin 143:723–728

    Article  Google Scholar 

  • Kim YJ, Son YH, Kwon JH (2013b) Highly efficient yellow phosphorescent organic light-emitting diodes for two-peak tandem white organic light-emitting diode applications. J Inf Disp 14(3):109–113

    Article  Google Scholar 

  • Koo JR, Lee SJ, Hyung GW, Kim BY, Lee DH, Kim WY, Lee KH, Yoon SS, Kim YK (2013) Highly efficient and simplified phosphorescence white organic light emitting diodes based on synthesized deep-blue host and orange emitter. Thin Solid Films 544:234–237

    Article  ADS  Google Scholar 

  • Kumar SN, John R, Lauer S, Little W, Daul B (2015) Electroforming technology for manufacturing thin metal mask with very small apertures for OLED display manufacturing. SID Symp Dig Tech Pap 46:211–214. 26

    Article  Google Scholar 

  • Kwon JH (2013) RGB color patterning for AMOLED TVs. Inf Disp 2(13):12–15

    Google Scholar 

  • Lee TW, Noh T, Choi BK, Kim MS, Shin DW (2008) High efficiency stacked white organic light emitting diodes. Appl Phys Lett 92:043301

    Article  ADS  Google Scholar 

  • Liao LS, Ren X, Begley WJ (2008) Tandem white OLEDs combining-fluorescent and phosphorescent emission. SID Symp Dig Tech Pap 39:818–821

    Article  Google Scholar 

  • Lih JJ, Chao CL, Lee CC (2006) The challenge of high resolution to active matrix OLED. SID Symp Dig Tech Pap 37:1459–1462

    Article  Google Scholar 

  • Liu J, Shi X, Wang J, Wu X, Huang S, Ye Z, Lu J, Su Y, He G (2013) Double hybrid white OLED employing a novel charge generation unit. SID Symp Dig Tech Pap 44:1403–1406

    Article  Google Scholar 

  • McGraw GJ, Peters DL, Forrest SR (2011) Organic vapor jet printing at micrometer resolution using microfluidic nozzle arrays. Appl Phys Lett 98:013302

    Article  ADS  Google Scholar 

  • Ohring M (2002) Materials science of thin films – deposition and structure, 2nd edn. Academic Press, San Diego

    Google Scholar 

  • Park MJ, Kim GH, Son YH, Bae HW, Kong JH, Kwon JH (2014) High efficiency red top-emitting micro-cavity organic light emitting diodes. Opt Express 22:19919–19929

    Article  ADS  Google Scholar 

  • Park MJ, Son YH, Kim GH, Lampande R, Bae HW, Pode R, Lee YK, Song WJ, Kwon JH (2015) Device performance of third order micro-cavity green top-emission organic light emitting diodes. Org Electron 26:458–463

    Article  Google Scholar 

  • Shtein M, Peumans P, Benziger JB, Forrest SR (2004) Direct, mask- and solvent-free printing of molecular organic semiconductors. Adv Mater 16(18):1615

    Article  Google Scholar 

  • Son YH, Kim SH, Kwon JH (2014) All-phosphorescent three-color two-stack tandem white organic light emitting diodes with high-color rendering index values. J Inf Disp 15(4):185–189

    Article  Google Scholar 

  • Son YH, Park MJ, Pode R, Kwon JH (2016) High efficiency top-emission organic light emitting diodes with second and third-order micro-cavity structure. ECS J Solid State Sci Technol 5:R3131–R3137

    Article  Google Scholar 

  • Spindler JP, Hatwar TK, Miller ME, Arnold AD, Murdoch MJ, Kane PJ, Ludwicki JE, Alessi PJ, Van Slyke SA (2006) System consideration for RGBW OLED display. J SID 14(1):37–48

    Google Scholar 

  • Tian PF, Bulovic V, Burrows PE, Gu G, Forrest SR, Zhou TX (1999) Precise, scalable shadow mask patterning of vacuum-deposited organic light-emitting devices. J Vacuum Sci Tech A 17:2975

    Article  ADS  Google Scholar 

  • Tsujimura T (2012) OLED displays – fundamentals and applications. John Wiley & Sons, Inc., Hoboken, NJ 07030, USA

    Google Scholar 

  • Tyan YS, Rao YQ, Ren XF, Kesel R, Cushman TR, Begley WJ, Bhandari N (2009) Tandem hybrid white OLED devices with improved light extraction. SID Symp Dig Tech Pap 40:895–898

    Article  Google Scholar 

  • Woodbury G (1997) Physical chemistry, 1st edn. Brooks/Cole Publishing Company. Belmont, CA, USA

    Google Scholar 

  • Wu Q, Zhang S, Yue S, Zhang Z, Xie G, Zhao Y, Liu S (2013) Enhanced efficiency in single-host white organic light emitting diode by triplet exciton conversion. J Lumin 143:108–112

    Article  Google Scholar 

  • Yun C, Moon H, Kang HW, Kim M, Sung HJ, Yoo∗ S (2010) High performance pentacene thin-film transistors fabricated by organic vapor-jet printing. IEEE Electron Dev Lett 31(11):1305–1307

    Google Scholar 

  • Yun C, Choi J, Kang HW, Kim M, Moon H, Sung HJ, Yoo S (2012) Digital-mode organic vapor-jet printing (D-OVJP): advanced jet-on-demand control of organic thin-film deposition. Adv Mater 24(21):2857

    Article  Google Scholar 

  • Zhang T, He SJ, Wang DK, Jiang N, Lu ZH (2016) A multi-zoned white organic light emitting diode with high CRI and low color temperature. Sci Rep 6:20517

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Seunghyup Yoo .

Editor information

Editors and Affiliations

Section Editor information

Rights and permissions

Reprints and permissions

Copyright information

© 2020 Springer Japan KK, part of Springer Nature

About this entry

Check for updates. Verify currency and authenticity via CrossMark

Cite this entry

Kwon, J.H., Yoo, S., Lampande, R., Kim, S. (2020). Vacuum Deposition. In: Adachi, C., Hattori, R., Kaji, H., Tsujimura, T. (eds) Handbook of Organic Light-Emitting Diodes. Springer, Tokyo. https://doi.org/10.1007/978-4-431-55761-6_12-2

Download citation

  • DOI: https://doi.org/10.1007/978-4-431-55761-6_12-2

  • Received:

  • Accepted:

  • Published:

  • Publisher Name: Springer, Tokyo

  • Print ISBN: 978-4-431-55761-6

  • Online ISBN: 978-4-431-55761-6

  • eBook Packages: Springer Reference Physics and AstronomyReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

Publish with us

Policies and ethics

Chapter history

  1. Latest

    Vacuum Deposition
    Published:
    30 November 2019

    DOI: https://doi.org/10.1007/978-4-431-55761-6_12-2

  2. Original

    Vacuum Deposition
    Published:
    30 August 2019

    DOI: https://doi.org/10.1007/978-4-431-55761-6_12-1