Electrodes for Nerve Recording and Stimulation
With the rapid development of MEMS fabrication technologies, versatile microelectrodes with different structures and functions have been designed and fabricated. The flexible MEMS microelectrodes exhibit multiaspect excellent characteristics compared to stiff microelectrodes based on silicon or SU-8, which comprising: lighter weight, smaller volume, better conforming to neural tissue, and lower fabrication cost.
This chapter mainly reviewed key technologies on flexible MEMS microelectrodes for neural interface in recent years, including: design and fabrication technology, fluidic channels, μLEDs, and electrode-tissue interface modification technology for performance improvement. Furthermore, the future directions of flexible MEMS microelectrodes were described including transparent and stretchable microelectrodes with characteristics of multifunction, high-density, biodegradation, and next-generation electrode-tissue interface modifications facilitated electrode efficacy and implantation safety.
The goal of this chapter is to provide the reader a broader overview of flexible MEMS technologies that can be applied together to solve problems in neural interface.
KeywordsMEMS Microelectrodes Neural Interface Conducting Polymer Nanotechnology
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