Table of contents

  1. Front Matter
    Pages i-xxiv
  2. Modeling of Processing, Structures, and Devices in MEMS

    1. Front Matter
      Pages 1-1
    2. Zai-Fa Zhou, Qing-An Huang
      Pages 3-25
    3. Zai-Fa Zhou, Qing-An Huang
      Pages 67-97
    4. Libo Zhao, Zhuangde Jiang, Zhikang Li, Yihe Zhao
      Pages 99-153
    5. Honglong Chang, Jianbing Xie, Ying Liu
      Pages 155-193
  3. Characterization and Test of Materials and Microstructures in MEMS

    1. Front Matter
      Pages 195-195
    2. Zai-Fa Zhou, Qing-An Huang, Xin-Ge Guo, Yi-Fan Gu
      Pages 197-235
    3. Jinling Yang, Quan Yuan
      Pages 303-321
  4. Physical Microsensors

    1. Front Matter
      Pages 323-323
    2. Zhuangde Jiang, Yulong Zhao, Libo Zhao, Tingzhong Xu
      Pages 325-385
    3. Junbo Wang, Deyong Chen, Bo Xie, Jian Chen, Lin Zhu, Yulan Lu
      Pages 387-419
    4. Qiancheng Zhao, Chunhua He, Jian Cui, Guizhen Yan
      Pages 421-460
    5. Dingbang Xiao, Xuezhong Wu, Qingsong Li, Zhanqiang Hou
      Pages 461-515
    6. Rong Zhu
      Pages 517-538
    7. Zhenxiang Yi, Ming Qin, Qing-An Huang
      Pages 539-576
    8. Jiaqi Wang, Zhenan Tang
      Pages 577-594
    9. Rong Zhu
      Pages 595-623
    10. Dong F. Wang, Huan Liu, Xuesong Shang, Weikang Xian, Yipeng Hou, Xu Yang et al.
      Pages 625-655
  5. Chemical Microsensors

    1. Front Matter
      Pages 657-657
    2. Zheyao Wang, Wenzhou Ruan
      Pages 659-688
    3. Tie Li, Lei Xu, Yuelin Wang
      Pages 717-752
    4. Dong F. Wang, Xu Du, Xiaodong Li, Di Zhou, Cao Xia, Guowen Zheng et al.
      Pages 753-786
    5. Jianqiu Huang, Qing-An Huang
      Pages 787-816
    6. Shanhong Xia, Jianhua Tong, Chao Bian, Jizhou Sun, Yang Li
      Pages 847-903
  6. Microactuators

    1. Front Matter
      Pages 905-905
    2. Jiahao Zhao, Yongfeng Gao
      Pages 907-927
    3. Jinling Yang, Jinying Zhang
      Pages 929-944
    4. Zhuoqing Yang, Guifu Ding, Yan Wang, Xiaolin Zhao
      Pages 945-995
    5. Honglong Chang, Yongcun Hao
      Pages 997-1015
    6. Guohua Liu, Wei Zhang
      Pages 1017-1035
  7. RF MEMS

    1. Front Matter
      Pages 1037-1037
    2. Li-Feng Wang, Qing-An Huang, Lei Han
      Pages 1039-1076
    3. Zhiqiang Zhang, Xiaoping Liao
      Pages 1077-1115
    4. Zewen Liu, Xin Guo
      Pages 1117-1147
    5. Changjian Zhou, Xiangguang Tian, Tian-Ling Ren
      Pages 1149-1193
  8. Optical MEMS

    1. Front Matter
      Pages 1195-1195
  9. Power MEMS

    1. Front Matter
      Pages 1265-1265
    2. Yufeng Zhang, Weijian Yuan, Rui Xue, Xiaowei Liu
      Pages 1267-1296
    3. Licheng Deng, Zhiyu Wen, Xingqiang Zhao
      Pages 1297-1333
    4. Chi Zhang, Zhong Lin Wang
      Pages 1335-1376
  10. Implantable Medical Devices

    1. Front Matter
      Pages 1377-1377
    2. Renxin Wang, Huaiqiang Yu, Zhihong Li
      Pages 1379-1411
    3. Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Ming-Hao Wang
      Pages 1413-1436
    4. Weihua Pei, Hongda Chen
      Pages 1437-1465

About this book


This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field.

The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.


Micro fluid RF MEMS actuators bio MEMS sensors

Editors and affiliations

  • Qing-An┬áHuang
    • 1
  1. 1.Key Laboratory of MEMS of the Ministry of EducationSoutheast UniversityNanjingChina

Bibliographic information

  • DOI
  • Copyright Information Springer Nature Singapore Pte Ltd. 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Engineering
  • Print ISBN 978-981-10-5944-5
  • Online ISBN 978-981-10-5945-2
  • Series Print ISSN 2522-5065
  • Series Online ISSN 2522-5073
  • Buy this book on publisher's site