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Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces

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Abstract

In implantable medical systems, low-impedance electrode-tissue interface is important for maintaining signal quality for recording and effective charge transfer for stimulation. In this paper, we propose a novel hemispherical biocompatible and flexible microelectrode arrays (MEAs) which were fabricated by the process of micro electrical mechanical system (MEMS). Compared with conventional planar microelectrodes, the interface impedance of hemispherical microelectrodes decreased due to their increased surface area. Parylene C thin film with good biocompatibility and flexibility was chemical vapor deposited as packaging material for decreasing nerve tissue damage. Pt-black coatings were electroplated by applying current pulses in H2PtCl6 solution on electrode sites for the further decrease of interface impedance. Moreover, the geometrical and electrical properties of these MEAs were demonstrated by using a scanning electron microscope (SEM) and an electrochemical workstation. Experimental results showed that the interface impedance decreased by about 34% compared with conventional planar microelectrodes, and significantly decreased by 84% with Pt-black coatings on electrode sites compared with those uncoated microelectrodes.

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References

  • Bauerdick S, Burkhardt C, Kern DP, Nisch W (2003) Substrateintegrated microelectrodes with improved charge transfer capacity by 3-dimensional micro-fabrication. Biomed Microdevices 5(2):93–99

    Article  Google Scholar 

  • Benabid AL (2003) Deep brain stimulation for Parkinson’s disease. Curr Opin Neurobiol 13:696–706

    Article  Google Scholar 

  • Brindley GS (1994) The first 500 patients with sacral anterior root stimulator implants: general description. Paraplegia 32:795–805

    Article  Google Scholar 

  • Clark GM (1998) Research advances for cochlear implants. Auris Nasus Larynx 25:73–87

    Article  Google Scholar 

  • Cogan SF (2008) Neural Stimulation and Recording Electrodes. Annu Rev Biomed Eng 10:275–309

    Article  Google Scholar 

  • Gabay T, Ben-David M, Kalifa I, Sorkin R, Abrams ZR, Ben-Jacob E, Hanein Y (2007) Electro-chemical and biological properties of carbon nanotube based multi-electrode arrays. Nanotechnology 18:035–201

    Article  Google Scholar 

  • Guo L, Stephen D (2009) PDMS-based conformable microelectrode arrays with selectable novel 3-D microelectrode geometries for surface stimulation and recording. 31st annual international conference of the IEEE engineering in medicine and biology society, pp 1623–1626

  • Hung A, Zhou D, Greenberg R, and Judy JW (2002) Micromachined electrodes for high density neural stimulation systems. Proc 15th IEEE Int Conf Micro Electro Mech Syst 56–59

  • Ilic B, Czaplewski D, Neuzil P, Stanczyk T, Blough J, Maclay GJ (2000) Preparation and characterization of platinum black electrodes. J Mater Sci 35:3447–3457

    Article  Google Scholar 

  • Janders M, Egert U, Stelzle M, and Nisch WA (1996) Novel thin film titanium nitride micro-electrodes with excellent charge transfer capability for cell stimulation and sensing applications. Proc 18th Annu Int Conf IEEE Eng Med Biol Soc—Bridging Disciplines for Biomedicine, pp 245–247

  • Koo KI, Chung H, Yu Y, Seo J, Park J, Lim JM, Paik SJ, Park S, Choi HM, Jeong MJ (2006) Fabrication of pyramid shaped three-dimensional 8 × 8 electrodes for artificial retina. Sens Actuators A Phys 130(131):609–615

    Article  Google Scholar 

  • Merrill DR, Bikson M, Jefferys JGR (2005) Electrical stimulation of excitable tissue: design of efficacious and safe protocols. J Neurosci Methods 141:171–198

    Article  Google Scholar 

  • Paik SJ, Park Y (2003) Roughened polysilicon for low impedance microelectrodes in neural probes. J Micromech Microeng 13:373–379

    Article  Google Scholar 

  • Robblee LS, Lefko JL, Brummer SB (1983) Activated Ir: an electrode suitable for reversible charge injection in saline solution. J Electrochem Soc 130:731–733

    Article  Google Scholar 

  • Rodger DC, Li W, Fong AJ, Hossein A, Meng E, Burdick JW (2008) Flexible Microfabricated Parylene Multielectrode Arrays for Retinal Stimulation and Spinal Cord Field Modulation. Sens Actuators B Chem 132(2):449–460

    Article  Google Scholar 

  • Zhou HB, Li G, Zhu ZH, Yao YZ, Jian L, Ren QS (2008) Fabrication of a flexible three-dimensional neural microelectrode array. Opt Precis Eng 16:1396–1402

    Google Scholar 

  • Zhou HB, Li G, Sun XN, Zhu ZH, Jin QH, Zhao JL, Ren QS (2009) Integration of Au nanorods with flexible thin-film microelectrode arrays for improved neural interfaces. J Microelectromech Syst 18:88–96

    Article  Google Scholar 

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Acknowledgments

This work is partly supported by the National Natural Science Foundation of China (No. 60876082, No. 51035005), The National Key Scientific Program (2010CB933901), the Program for New Century Excellent Talents in University (2009), the “Shu Guang” project (08SG13). The authors are also grateful to the colleagues for their essential contribution to this work.

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Authors and Affiliations

  1. National Key Laboratory of Nano/Micro Fabrication Technology, Shanghai, China

    Yuefeng Rui, Jingquan Liu, Yajun Wang & Chunsheng Yang

  2. Key Laboratory for Thin Film and Microfabrication of Minstry of Education, Shanghai, China

    Yuefeng Rui, Jingquan Liu, Yajun Wang & Chunsheng Yang

  3. Institute of Mico and Nano Science and Technology, Shanghai Jiaotong University, Shanghai, China

    Yuefeng Rui, Jingquan Liu, Yajun Wang & Chunsheng Yang

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  1. Yuefeng Rui
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  2. Jingquan Liu
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  3. Yajun Wang
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  4. Chunsheng Yang
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Correspondence to Yuefeng Rui.

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Rui, Y., Liu, J., Wang, Y. et al. Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces. Microsyst Technol 17, 437–442 (2011). https://doi.org/10.1007/s00542-011-1279-x

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  • DOI: https://doi.org/10.1007/s00542-011-1279-x

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