Role of the film texturing on the response of particle detectors based on CVD diamond G. FaggioG. MessinaG. V. Rinati Technical papers Pages: 151 - 156
Manufacture of diffraction grating on tiny parts by means of ultraprecision milling K. SawadaS. OdakaT. Sata Pages: 157 - 160
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms D. KamiyaT. HayamaM. Horie Pages: 161 - 165
Multilayer polyimide film substrates for interconnections in microsystems A. FachY. AthanassovJ. Link Pages: 166 - 168
A study of the effect of the fabrication process on diffusion in a layered thin film T. HirasawaH. KoteraS. Shima Pages: 169 - 172
Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review Z. Rymuza Pages: 173 - 180
Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films Z. RymuzaM. MisiakZ. Rżanek-Boroch Pages: 181 - 188
Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes G. SchröpferM. de LabachelerieC. R. Tellier Pages: 194 - 199
Finite element investigation into proposed bearing mechanism for a fluid driven micro actuator R. S. DhariwalS. M. Flockhart Pages: 200 - 204
