Abstract
Results of nanomechanical studies of ultrathin silicon dioxide and silicon nitride films are discussed. Films applicable to MEMS technology were manufactured on single-crystal silicon wafer’s at atmospheric perssure by the glow discharge technique.
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Received: 30 June 1998 / Accepted: 14 December 1998
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Rymuza, Z., Misiak, M., Kuhn, L. et al. Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films. Microsystem Technologies 5, 181–188 (1999). https://doi.org/10.1007/s005420050161
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DOI: https://doi.org/10.1007/s005420050161