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Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review

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Abstract

 The problem of modification of rubbing surfaces in micrometer size microdevices (micro-electro-mechanical systems – MEMS) to control adhesion, friction and wear as well as mechanical properties is discussed. Several solutions are reviewed and examples of investigation results are given.

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Authors and Affiliations

  1. Institute of Micromechanics and Photonics, Department of Mechatronics, Warsaw University of Technology, ul.Chodkiewicza 8, 02-525 Warszawa, Poland, , , , , , PL

    Z. Rymuza

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  1. Z. Rymuza
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Received: 30 June 1998 / Accepted: 14 December 1998

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Rymuza, Z. Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review. Microsystem Technologies 5, 173–180 (1999). https://doi.org/10.1007/s005420050160

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  • DOI: https://doi.org/10.1007/s005420050160

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