Reliability implications of using LIGA components in communication networks R. JohnsonI. CookR. Grigsby Pages: 62 - 64
Developing new markets for high aspect ratio micro-machined devices J. SkardonM. Vandenberg Pages: 65 - 68
An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives S. NakamuraK. SuzukiW. Daniau Pages: 69 - 71
Applications of full-field optical methods in micro-mechanics and material engineering M. KujawiĆska Pages: 81 - 89
Fabrication of micro-parts by high aspect ratio structuring and metal injection molding using the supercritical debinding method T. ShimizuY. MurakoshiS. Sugiyama Pages: 90 - 92
Three electrodes touch-mode capacitive pressure sensor K.-M. ChangG.-J. HwangY.-L. Hsien Pages: 93 - 99
Influence of gold thin-film interlayers on anodic bonding of copper microstructures produced by LIGA A. GerlachD. MaasD. Seidel Pages: 100 - 104