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An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives

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Abstract

 We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic head tracking system of hard disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We realize the aspect ratio of 125 by the LIGA process using a Si-Au mask. We propose to use PMMA molds both as the mechanical structure and as the insulator between electrodes. We believe there are great opportunity for the LIGA process in making micro actuators of HDDs.

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Authors and Affiliations

  1. University of Tokyo Institute of Industrial Science 3rd Division Fujita Lab. 7-22-1 Roppongi, Kinato-ku Tokyo 106, Japan, , , , , , JP

    S. Nakamura, K. Suzuki, M. Ataka & H. Fujita

  2. LPMO, Institute des Microtedimigues de Franche-Comté, France, , , , , , FR

    S. Basrour, V. Soumann, M. Labachelerie & W. Daniau

Authors
  1. S. Nakamura
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  2. K. Suzuki
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  3. M. Ataka
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  4. H. Fujita
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  5. S. Basrour
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  6. V. Soumann
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  7. M. Labachelerie
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  8. W. Daniau
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Additional information

Received: 25 August 1997 / Accepted: 24 October 1997

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Nakamura, S., Suzuki, K., Ataka, M. et al. An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives. Microsystem Technologies 5, 69–71 (1998). https://doi.org/10.1007/s005420050144

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  • DOI: https://doi.org/10.1007/s005420050144

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