The fabrication of LIGA mask using photolithography and synchrotron radiation lithography F. YiM. JinD. Xian Pages: 7 - 9
The formation of moulds for 3D microstructures using excimer laser ablation R. A. LawesA. S. HolmesF. N. Goodall Pages: 17 - 19
Etching processes for High Aspect Ratio Micro Systems Technology (HARMST) R. KassingI. W. Rangelow Pages: 20 - 27