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The formation of moulds for 3D microstructures using excimer laser ablation

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Abstract

 Fabrication by the ‘Laser-LIGA’ process of three-dimensional structures for micro-fluidic devices is investigated. Polymer moulds are formed by projection ablation using an excimer laser operating at 248 nm wavelength. The moulds are replicated by electroforming –as in conventional X-ray LIGA – to produce fixed and freely moving nickel microturbine parts with heights of 150 μm, wall angles of 1.5° from vertical and surface roughnesses below 100 nm.

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Authors and Affiliations

  1. Central Microstructure Facility, Rutherford Appleton Laboratory, Chilton, Didcot, Oxon, OX11 0QX, UK, , , , , , GB

    R. A. Lawes & F. N. Goodall

  2. Department of Electrical and Electronic Engineering, Imperial College of Science, Technology and Medicine, Exhibition Road,London SW7 2BT, UK, , , , , , GB

    A. S. Holmes

Authors
  1. R. A. Lawes
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  2. A. S. Holmes
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  3. F. N. Goodall
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Received: 30 October 1995/Accepted: 4 March 1996

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Lawes, R., Holmes, A. & Goodall, F. The formation of moulds for 3D microstructures using excimer laser ablation. Microsystem Technologies 3, 17–19 (1996). https://doi.org/10.1007/s005420050048

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  • DOI: https://doi.org/10.1007/s005420050048

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