1. Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011

   • Chien-Chung Fu
   • Bernd Michel

   Editorial 08 January 2013 Pages: 299 - 299

   

2. Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA

   • Hideki Kido
   • Tomoyuki Kuroki
   • Yuichi Utsumi

   Technical Paper 14 March 2012 Pages: 301 - 307

   

3. Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor

   • Daiji Noda
   • Yuu Kuboyama
   • Tadashi Hattori

   Technical Paper 08 June 2012 Pages: 309 - 313

   

4. Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies

   • Harutaka Mekaru
   • Chieko Okuyama
   • Akihisa Ueno

   Technical Paper 14 June 2012 Pages: 315 - 323

   

5. Effect of buffer materials on thermal imprint on plastic optical fiber

   • Harutaka Mekaru
   • Akihiro Ohtomo
   • Hideki Takagi

   Technical Paper 15 June 2012 Pages: 325 - 333

   

6. 3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer

   • Sascha P. Heussler
   • Herbert O. Moser
   • S. M. P. Kalaiselvi

   Technical Paper 16 June 2012 Pages: 335 - 341

   

7. Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert

   • Jong Hyun Kim
   • Si-Young Choi
   • Suk Sang Chang

   Technical Paper 28 June 2012 Pages: 343 - 349

   

8. Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time

   • Mitsuhiro Horade
   • Susumu Sugiyama

   Technical Paper 03 July 2012 Pages: 351 - 356

   

9. Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography

   • Mitsuhiro Horade
   • Susumu Sugiyama

   Technical Paper 06 July 2012 Pages: 357 - 362

   

10. Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip

    • Dae Keun Choi
    • Sang Hoon Lee

    Technical Paper 03 July 2012 Pages: 363 - 370

    

11. Obstacles for cognitive analogy in analysis and synthesis in microsystems development

    • Albert Albers
    • Peter Börsting
    • Sven Matthiesen

    Technical Paper 24 July 2012 Pages: 371 - 378

    

12. Numerical simulation of the capillary flow in the meander microchannel

    • C. C. Lai
    • C. K. Chung

    Technical Paper 24 July 2012 Pages: 379 - 386

    

13. On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method

    • C. K. Chung
    • M. W. Liao
    • T. Y. Liu

    Technical Paper 02 August 2012 Pages: 387 - 393

    

14. Ensuring functional reliability of molded micro components

    • Albert Albers
    • Tarak Turki
    • Philipp Hoppen

    Technical Paper 31 July 2012 Pages: 395 - 402

    

15. A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures

    • Xuhan Dai
    • Xiaodan Miao
    • Wanjun Wang

    Technical Paper 17 August 2012 Pages: 403 - 407

    

16. A magnetic nano-composite soft polymeric membrane

    • Akanksha Singh
    • Mandar Shirolkar
    • Sulabha K. Kulkarni

    Technical Paper 12 August 2012 Pages: 409 - 418

    

17. BPN a new thick negative photoresist with high aspect ratio for MEMS applications

    • D. Bourrier
    • M. Dilhan
    • H. Granier

    Technical Paper 28 August 2012 Pages: 419 - 423

    

18. High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension

    • Felix Greiner
    • Helmut F. Schlaak

    Technical Paper 13 September 2012 Pages: 425 - 431

    

19. Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique

    • Jun Nakamura
    • Kohei Higuchi
    • Kazusuke Maenaka

    Technical Paper 02 September 2012 Pages: 433 - 438

    

20. Fabrication of flexible light guide plate using CO₂ laser LIGA-like technology

    • C. K. Chung
    • Y. J. Syu
    • K. Z. Tu

    Technical Paper 04 September 2012 Pages: 439 - 443

    

21. Transparent thin thermoplastic biochip by injection-moulding and laser transmission welding

    • Akanksha Singh
    • Wilhelm Pfleging
    • Chantal Khan Malek

    Technical Paper 28 September 2012 Pages: 445 - 453

    

22. Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating

    • Meng-Chi Huang
    • Tein-Li Chang
    • Chien-Chung Fu

    Technical Paper 21 December 2012 Pages: 455 - 460

    

23. Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness

    • Yun-Ju Chuang
    • Shih-Hao Huang
    • Kuo-Yung Hung

    Technical Paper 23 December 2012 Pages: 461 - 470

    

24. Supporting design of primary shaped micro parts and systems through provision of experience

    • Albert Albers
    • Tarak Turki

    Technical Paper 29 December 2012 Pages: 471 - 476

    

25. Fabrication of two dimensional high aspect ratio polymer photonic crystal laser

    • Jie Zhou
    • Gang Liu
    • Yangchao Tian

    Technical Paper 08 January 2013 Pages: 477 - 482