Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading Yin ZhangYisong WangZhihong Li Technical Paper 12 February 2010 Pages: 909 - 918
A low voltage vertical comb RF MEMS switch Samira AghaeiEbrahim Abbaspour-Sani Technical Paper 07 February 2010 Pages: 919 - 924
Effect of nitrogen doping on piezoresistive properties of a-Si x C y thin film strain gauges M. A. FragaH. FurlanI. C. Oliveira Technical Paper 07 February 2010 Pages: 925 - 930
A miniature in-plane piezoresistive MEMS accelerometer for detection of slider off-track motion in hard disk drives Yanhui YuanHejun DuShao Wang Technical Paper 07 February 2010 Pages: 931 - 940
Fabrication of the plastic component for photonic crystal using micro injection molding Ching-Ho ChangWen-Bin Young Technical Paper 06 February 2010 Pages: 941 - 946
Modeling of micro/nano particle separation in microchannels with field-flow fractionation Minghao SongHongwei SunMohammad Faghri Technical Paper 05 March 2010 Pages: 947 - 954
Single-walled carbon nanotube network/poly composite thin film for flow sensor Hui CaoZhiyin GanSheng Liu Technical Paper 11 March 2010 Pages: 955 - 959
Non-resonant electromagnetic wideband energy harvesting mechanism for low frequency vibrations Bin YangChengkuo Lee Technical Paper 05 March 2010 Pages: 961 - 966
MEMS_DSC: a new device for microcalorimetric analysis in the biological field S. MaggiolinoN. ScuorO. Sbaizero Technical Paper 19 March 2010 Pages: 967 - 971
Axial and shear fracture strength evaluation of silicon microneedles Puneet KhannaKevin LuongoShekhar Bhansali Technical Paper 24 March 2010 Pages: 973 - 978
Dynamic characterization and modification of dynamic properties of a micro scanner Ilgar VeryeriIpek Basdogan Technical Paper 16 April 2010 Pages: 979 - 992
Dynamic actuation and sensing micro-device for mechanical response of cultured adhesive cells Ken-ichi KonnoTadashi KosawadaKaoru Goto Technical Paper 07 April 2010 Pages: 993 - 1000
Fabrication of a surface stress-based PDMS micro-membrane biosensor Shengbo SangHartmut Witte Technical Paper 03 April 2010 Pages: 1001 - 1008
Effect of physical vapor deposition metallic thin films on micro injection molded weld line mechanical properties Lei XieMonika Leester-SchädelStephanus Büttgenbach Technical Paper 06 April 2010 Pages: 1009 - 1013
Monolithic micro-fabrication of Si micro-electro-mechanical structure with GaN light emitting diode R. ItoM. WakuiK. Hane Technical Paper 01 April 2010 Pages: 1015 - 1020
Optimization of thermal fly-height control slider geometry for Tbit/in2 recording Antonis I. VakisAndreas A. Polycarpou Technical Paper 16 April 2010 Pages: 1021 - 1034