Multi-objective decision support system in numerical reliability optimization of modern electronic packaging Łukasz DowhańArtur WymysłowskiRainer Dudek Technical Paper 12 August 2009 Pages: 1777 - 1783
Static and dynamic stabilities of a microbeam actuated by a piezoelectric voltage Ghader RezazadehMohammad FathalilouRasul Shabani Technical Paper 16 September 2009 Pages: 1785 - 1791
Design of micro-retainer to counter-balance spinning seismic proof mass Nan-Chyuan TsaiBing-Hong LiouChih-Che Lin Technical Paper 16 September 2009 Pages: 1793 - 1802
Compensation to imperfect fabrication and asymmetry of micro-gyroscopes by using disturbance estimator Nan-Chyuan TsaiChung-Yang Sue Technical Paper 15 October 2009 Pages: 1803 - 1814
Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers Hamed FarahaniJames K. MillsWilliam L. Cleghorn Technical Paper 01 September 2009 Pages: 1815 - 1826
A methodology for quantitative evaluation of local electrical conductivity: from micron to submicron Bing-Feng JuLei Wu Technical Paper 28 August 2009 Pages: 1827 - 1834
Miniaturization limits of piezoresistive MEMS accelerometers Manuel EngesserAxel R. FrankeJan G. Korvink Technical Paper 25 September 2009 Pages: 1835 - 1844
Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices Nam Cao Hoai LeDzung Viet DaoSusumu Sugiyama Technical Paper 22 August 2009 Pages: 1845 - 1853
Simulating the laser micromachining of a 3D flexible structure Richárd Berenyi Technical Paper 18 August 2009 Pages: 1855 - 1860
An evaluation of process-parameter and part-geometry effects on the quality of filling in micro-injection moulding Usama M. AttiaJeffrey R. Alcock Technical Paper 23 September 2009 Pages: 1861 - 1872
Thermal assisted direct bonding between structured glasses for lab-on-chip technology Qiuping ChenQiuling ChenMonica Ferraris Technical Paper 25 August 2009 Pages: 1873 - 1877
A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope Jinwon ParkMoo-Yeon LeeDong-Yeon Lee Technical Paper 16 September 2009 Pages: 1879 - 1884
Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology Feng CuiWenyuan ChenWu Liu Technical Paper 13 October 2009 Pages: 1885 - 1896
Erratum to: Nonsingular dislocation and crack fields: implications to small volumes J. KioseoglouI. KonstantopoulosE. C. Aifantis Erratum 16 September 2009 Pages: 1897 - 1897