Abstract
A two-dimensional nano-scale measuring system utilizing a two-dimensional combined optical and X-ray interferometer (2D COXI) was developed for the standardization of measurement in the nanometer region. The system consists of a 2D COXI and an atomic force microscope (AFM). The designed, two-dimensional, flexure-stage scans and the cantilever tip probes the nano-structure of the specimen. The calibrated optical interferometers in the 2D COXI were used to measure two-dimensional nano-scale lengths. The accuracy of the optical interferometers was enhanced to enable sub-nanometer measurements. To demonstrate the nano-scale measuring system, we used it to measure the nano-scale pitches of gratings.
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Acknowledgment
This work was supported by the Korea Science and Engineering Foundation (KOSEF) grant funded by the Korea government (MEST) (No. 20090082696).
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Park, J., Lee, MY. & Lee, DY. A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope. Microsyst Technol 15, 1879–1884 (2009). https://doi.org/10.1007/s00542-009-0916-0
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DOI: https://doi.org/10.1007/s00542-009-0916-0