Modeling product variations in hard disk drive micro-actuator suspensions M. RotunnoR. OboeR. A. de Callafon Technical Paper 30 May 2006 Pages: 803 - 813
Non-contact tape tension measurement and correlation of lateral tape motion and tape tension transients Bart RaeymaekersRyan J. TaylorFrank E. Talke Technical Paper 24 May 2006 Pages: 814 - 821
Modeling, analysis and design of centrifugal force driven transient filling flow into rectangular microchannel Dong Sung KimTai Hun Kwon Technical Paper 17 May 2006 Pages: 822 - 838
Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM D. M. CaoJ. JiangW. J. Meng Technical paper 07 March 2006 Pages: 839 - 845
Surface topography of planar PMMA grating structures produced by the UV-laser based phase mask method C. WochnowskiS. MetevF. Vollertsen Technical Paper 17 May 2006 Pages: 846 - 853
Adhesion and contact modeling and experiments in microelectromechanical systems including roughness effects N. TayebiA. A. Polycarpou Technical paper 24 May 2006 Pages: 854 - 869
Electroplating of micro-patterned tools via replication of silicone rubber forms J. LorenzG. SchanzJ. Konys Technical paper 14 March 2006 Pages: 870 - 876
Mechanical punching of 15 μm size hole Sang Min YiByung Yun JooSoo-Ik Oh Technical Paper 31 March 2006 Pages: 877 - 882
Fabrication and characterizations of a monolithic PZT microstage Hegen XuTakahito OnoMasayoshi Esashi Technical Paper 19 May 2006 Pages: 883 - 890