Technology tools for a high precision accelerometer in bulk micromechanics T. GeßnerE. VetterM. Wiemer Originals Pages: 10 - 13
Experimental and numerical investigations of thermo-mechanically stressed micro-components B. MichelA. SchubertV. Grosser Originals Pages: 14 - 22
Monte Carlo modelling of electron beam lithography: a scaling law G. MessinaS. SantangeloA. Tucciarone Originals Pages: 23 - 29
Process technology for the modular integration of CMOS and polysilicon microstructures James M. BustilloGary K. FedderRoger T. Howe Originals Pages: 30 - 41
Glucose measurement using a micromachined open tubular heterogeneous enzyme reactor (MOTHER) D. J. StrikeP. ThiébaudN. F. de Rooij Originals Pages: 48 - 50