Skip to main content
SpringerLink
Log in

An integrated interfacing circuit for capacitive sensors

  • Originals
  • Technical Papers
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Harrison, D.;Dimeff, J. (1973) A diode quade bridge circuit for use with capacitance transducers, Rev. Sc. Instr., 44 (10): 1468–1472

    Google Scholar 

  2. Ko, W.;Bao, M.;Huang, Y. (1982) A high sensitivity integrated circuit capacitive pressure transducer IEEE. Trans. Elect. Dev. ED-29: 48–56

    Google Scholar 

  3. Ko, W. (1986) Solid state capacitive pressure transducers, sensors and actuators, 10: 303–320

    Google Scholar 

  4. Ko, W.; Yeh, G. (1989) Precision impedance variation measurement circuit, U.S., patent #4,820,971

  5. Park, Y.; Wise, K. (1983) An MOS switched capacitor readout amplifier for capacitive pressure transducer, IEEE Proc. Costom IC Conf. Rochester, N.Y.: 380–344

  6. Sander, C.;Kuntii, J.;Meindl, J. (1980) A monolithic capacitive pressure sensor with pulse period output., IEEE Trans. Elec. Dev., ED-17: 927–930

    Google Scholar 

  7. Shen, W. (1983), A capacitive pressure transducer integrated with CMOS circuit, M.S. Thesis, Case Western Reserve University, Cleveland, Ohio, USA

    Google Scholar 

  8. Watanabe, K.;Temes, G. (1984) A switched capacitor digital capacitance bridge, IEEE Instrument and Measurement, IM-33: 247–251

    Google Scholar 

  9. Yeh, G. (1984) An integrated interfacing circuit for capacitive sensors, Ph.D. Thesis., Case Western Reserve University, Cleveland, Ohio, USA

    Google Scholar 

  10. Electronics Research and Service Organization, a division of Industrial Technology Research Institute, Hsinchu, Taiwan, 310, Republic of China

Download references

Author information

Authors and Affiliations

  1. Electrical Engineering and Applied Physics Department and Electronics Design Center, Case Western Reserve University, 44106, Cleveland, OH, USA

    W. H. Ko & G. -J. Yeh

Authors
  1. W. H. Ko
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. -J. Yeh
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ko, W.H., Yeh, G.J. An integrated interfacing circuit for capacitive sensors. Microsystem Technologies 1, 42–47 (1994). https://doi.org/10.1007/BF01367759

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF01367759

Keywords

Search

Navigation